User`s guide

Scanner Maintenance and Calibration 8
Agilent 5500 SPM User’s Guide 147
X Sensitivity
Using the Cross-section tool, measure the length of a set of features
across the scan (Figure 100).
Figure 100 Cross-section of several features to check Xsensitivity
If the measured dimension does not match the actual, then adjust the X
Sensitivity term according to the following equation:
After adjustment the measured size should be within 5 % of the actual
size.
Y Calibration
The methods used for calibrating the scanner’s Y axis are similar to
those used for the X dimension. The exception is that the scan range will
be set to ½ of the scanner’s full range. The Y axis is generally used as
NewSensitivity
CurrentSensitivity Kno wnSize
MeasuredSize
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