User`s guide

Scanner Maintenance and Calibration 8
Agilent 5500 SPM User’s Guide 151
If the measured dimension does not match the actual, the adjust the Y
Sensitivity term according to the following equation:
Z Calibration
Sensitivity
After the X and Y dimensions have been calibrated, obtain an image of a
Z calibration standard and render the data as Tilted. Zoom in on a single
pit to minimize distortion. Position the cross section tool over a Z
feature. Place markers at the top and bottom of the feature. Measure the
step size.
Figure 105 Cross-section checking feature height for Z sensitivity
It is important to correctly position the markers for the Z feature
measurement. Place them in the center of the scan range. It may also be
necessary to decrease the Integral (I) gain in the Servo window until the
NewSensitivity
CurrentSensitivity Kno wnSize
MeasuredSize
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