User`s guide

Closed-Loop Scanners 9
Agilent 5500 SPM User’s Guide 158
17
Adjust the Sensitivity of the X sensor:
a In the Realtime Images window choose Tools > Horizontal
Cross Section. Place the cross-section tool across a set of
features.
b Set markers in the cross section window to measure the
dimension across several features of known width.
c Use the equation below to adjust the Sensitivity value:
d Image the features again and verify that the measured width
matches the actual width.
18 Repeat the step above with the Vertical Cross Section tool to set the
Sensitivity of the Y sensor.
Z Sensor Calibration
To calibrate the Z sensor, the output of the sensor will be plotted while
the piezo is being moved through its entire range. Since only the motion
NewSensitivity
CurrentSensitivity Kno wnSize
MeasuredSize
-------------------------------------------------------------------------------------
=