User`s guide

Closed-Loop Scanners 9
Agilent 5500 SPM User’s Guide 161
Once the graph looks like Figure 110, the Offset and Gain are properly
set and the Z Sensor is usable over its entire range.
8 To calibrate the Z Sensitivity you will need a step height calibration
standard (the standard calibration grid supplied with your system
will suffice). Its features are 200 nm deep.
a Set up the microscope for Contact Mode imaging.
b Initiate an approach.
c Obtain a 10 micron image centered on one of the calibration
standard pits (Figure 111):. Flattening should be turned off.
Figure 111 200 nm deep pit on the calibration standard
d In the Realtime Images window use a Horizontal or Vertical
Cross Section tool to gauge a pit of known depth. If the depth
does not match the actual value, calculate a new Sensitivity value
using the following equation:
e Enter the new Sensitivity value into the Scanner Setup window.
f Image the same pit again and check that the depth is now
measured at 200 nm. If not, repeat the previous steps until the
value is measured correctly.
The Z closed loop sensor is now calibrated.
NewSensitivity
CurrentSensitivity Kno wnSize
MeasuredSize
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