7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description Description NOTE In this subchapter refers to either or both of the Agilent 10737L and Agilent 10737R interferometers. The Agilent 10737L/R Compact Three-Axis interferometers (see figures 7O-1 through 7O-3) allow up to three measurements (displacement, pitch, and yaw) to be made on a single axis.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description • The corner cube assembly. This assembly is factory-aligned to produce the required beam pattern. Do not remove the corner cube assembly or loosen the screws holding the assembly in place. Moving this assembly will change the output beam pattern.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description 1 073 R R FE FEROMET 1 0 ER 7 3 7 L AGILENT 10737L COMPACT THREE-AXIS INTERFEROMETER E 7L 3-AXIS INT To Measurement Mirror See View A See View B Axis #2 Output Axis #1 Output Axis #2 Axis #1 Axis #3 = = Primary measurement beam Measurement Point = Secondary measement beam View A MEASUREMENT FACE Axis #3 Output Input for all A xes View B INPUT FACE Figure 7O-2.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description AGILENT 10737R COMPACT THREE-AXIS INTERFEROMETER 3 07 R E 3-AXIS IN 7R T 7R 73 10 1 RF ERF ER O M E TE To Measurement Mirror See View B See View A Axis #2 Output Axis #1 Output Axis #2 Axis #1 Axis #3 Axis #3 Output Input for all A xes View A INPUT FACE = = = Primary measurement beam Measurement Point Secondary measurement beam View B MEASUREMENT FACE Figure 7O-3.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description Applications General The Agilent 10737L or Agilent 10737R interferometer, by making three simultaneous distance measurements along or parallel to the X-axis, can make these measurements: • displacement along the X-axis • rotation (pitch) about the Y-axis • rotation (yaw) about the Z-axis The angular measurements made by either of these interferometers can be calculated by taking the arctangent of the differenc
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description MEASUREMENT USING AGILENT 10737R/L COMPACT THREE-AXIS INTERFEROMETERS Laser Head To Fiber Optics Receivers Beam Directing Optics Agilent 10737L Compact Three-axis Interferometer To Fiber Optics Receivers Agilent 10737R Compact Three-axis Interferometer Multiaxis Stage Figure 7O-4.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Description MEASUREMENT PATH (fB) Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers From Laser fB Reference Mirror Axis #2 Axis #3 Axis #1 = fB±2 ∆ f1 Axis #2 = fB±2 ∆ f2 Axis #3 = fB±2 ∆ f3 Axis #1 λ/4 Plate NOTE: Because the Measurement mirror may have a combination of displacement, pitch, and yaw motions, the Measurement Axes may have different Df values, as shown Measurement Mirror REFERENCE PATH
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Special Considerations Special Considerations Laser beam power consideration When working with an application that requires use of a separate beam splitter, make sure that you provide enough laser beam power to any multiaxis interferometer so all receivers connected to it receive adequate light power.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Special Considerations AGILENT 10737L THREE-AXIS INTERFEROMETER 14.38 mm (0.566) MP1 See Note 1 7.19 mm (0.283) Bottom of interferometer as shown in specification drawing 7.19 mm (0.283) Interferometer Input Face 68.92 (2.71) Axis No.1 Output Axis No.2 Output MP2 See Note 1 Input for all axes FROM LASER HEAD 10.11 mm 24.49 mm (0.39) (0.964) MP3 20.90 mm 17.3 mm See Notes 1 & 2 (0.83) (0.68) Axis No.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Special Considerations AGILENT 10737R THREE-AXIS INTERFEROMETER Axis No.2 Output Interferometer Input Face Input for all axes 68.92 (2.71) Axis No.1 Output MP2 See Note 1 14.38 mm (0.566) 7.19 mm (0.283) MP1 See Note 1 7.19 mm (0.283) FROM LASER HEAD Axis No.3 Output 24.49 mm 10.11 mm (0.964) (0.39) 17.3 mm 20.90 mm (0.68) (0.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Mounting Mounting Adjustable mounts The Agilent 10711A Adjustable Mount provides a convenient means of mounting, aligning, and securely locking an Agilent 10737L or Agilent 10737R interferometer in position. Since the mount allows some tilt and yaw adjustment, the need for custom fixturing is minimized. The mount allows the interferometer to be rotated about its physical centerline, simplifying installation.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Installation and Alignment Installation and Alignment Summary The installation and alignment procedure has two major parts: • Planning and setting up the laser beam path(s) • Installing and aligning the interferometer(s). Objectives of the installation and alignment procedure are: 1. Minimizing cosine error. 2. Maximizing signal strength at the receivers. 3.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Installation and Alignment Table 7O-1. Tools and Equipment Required or Recommended Item and Description Mfr. Part Number (Mfr = Agilent unless otherwise indicated) Comment, Note, etc. Penta prism or similar prism that bends light exactly 90 degrees Prisms of this type are available from scientific or optical supply shops Recommended, but not required.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Installation and Alignment Alignment aid (Agilent Part Number 10706-60001) is the same as one used on the Agilent 10706B Plane Mirror Interferometer. Refer to the “Alignment aids” section for the Agilent 10706B Plane Mirror Interferometer, in subchapter 7C of this manual for a further discussion of its use.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure Procedure Planning the measurement setup Determine the general plan for your measurement. Examples of measurement setups are given throughout this manual. Particularly, your plan should address: 1. Which axes you want to measure, and what measurements you want to make, 2. Where the interferometers will be positioned with respect to the stage mirrors, 3.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure Installing and aligning an interferometer CAUTION In performing the procedure below, perform only the removal, disassembly or assembly steps described. Do not remove or take apart anything you are not instructed to. Do not touch any glass surface or allow it to be scratched, dirtied or otherwise harmed. CAUTION Do not touch any glass surface of any optic.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure Removing the high stability adapter (reference mirror) To remove the high stability adapter, refer to figures 7O-1 and 7O-8, and: 1 Use the 5/64-inch hex key to remove the two cap screws with springs that hold the high stability adapter (reference mirror) to the interferometer. Set the screws in a clean, safe place where they will not be lost.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure Aligning the measurement beam path 1 Remove the receiver assembly and high stability adapter, as described in the respective procedures, above. 2 Install the interferometer so the beam from the laser source enters its input aperture and is normal to its input face. 3 Set the alignment aid (Agilent Part Number 10706-60001) on the interferometer’s Measurement beam aperture as shown in Figure 7O-8.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure Figure 7O-9. Agilent 10737L Compact Three-Axis Interferometer — return beam pattern 12 Install the receiver assembly. To do this, reverse the “Removing the receiver assembly” procedure, above. 13 Plug in the fiber-optic cables. 14 Adjust each receiver’s gain by turning its gain adjustment screw to cause the receiver’s LED to light, then reduce the gain until the LED just turns off.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure Aligning the reference beam path The measurement path must be aligned and the laser beam centered on the input aperture before aligning the reference mirror. L 0 7 3 7 R 1 R R FE 1 FEROMET E 1 Remove the receiver assembly and the plane mirror converter (see figures 7O-1 and 7O-4), and set aside on a clean surface. Do not touch any glass surface of any optic.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Procedure 6 Tilt the reference mirror by adjusting the 2-56 screws until the beam from the reference mirror autoreflects back to the center of the laser small aperture. 7 Remove the alignment aid. 8 Check the position of the beams in the interferometer’s output apertures (see Figure 7O-9). Once again, translucent tape is helpful for viewing the beams in the apertures.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Operation Operation Measurements For an interferometer setup to measure distances along the X-axis, measurements of displacement, pitch, and yaw are derived as described below. These computations are done via software on the system controller or computer.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Specifications and Characteristics Specifications and Characteristics Specifications describe the device’s warranted performance. Supplemental characteristics (indicated by TYPICAL or NOMINAL) are intended to provide non-warranted performance information useful in applying the device. Plane mirror systems have a fundamental optical resolution of one quarter wavelength (0.158 micron, 6.23 microinches).
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Specifications and Characteristics Agilent 10737L/R Compact Three-Axis Interferometer Specifications Linear Resolution: 5 nm (using Agilent 10885A, or Agilent 10895A electronics) 0.6 nm (using Agilent 10897A, or Agilent 10898A electronics) Yaw Resolution: 0.35 µrad (0.07 arc-sec) (using Agilent 10885A, or Agilent 10895A electronics) 0.04 µrad (0.
Chapter 7O Agilent 10737L and Agilent 10737R Compact Three-Axis Interferometers Specifications and Characteristics 32 mm (1.26) 3 x Fiber-Optic Connectors for Agilent 10780F-037 Receivers 10703L ER From Laser 10737L 32 mm (1.26) 3- 4x Drilled For Clearance of 4-40 Screw and tapped 6-32 UNC-2B ∞ .250 deep 4x this side and 4x far side. 66 mm (2.6) 3.0 mm (0.12) To Plane Mirror 64.1 mm (2.53) 125 mm (4.92) 7.19 mm (0.283) 38.2 mm (1.50) 7.19 mm (0.283) 7.19 mm (0.283) 7.19 mm (0.283) 82 mm (3.
