Manual

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Technical Data for WHISPER Low Pressure Drop Mass Flow Meters
0 to 0.5 sccm Full Scale through 0 to 500 slpm Full Scale
Standard Operating Specications (Contact Alicat for available options.)
Performance Whisper Mass Flow Meter
Accuracy at calibration conditions
after tare
± (0.8% of Reading + 0.2% of Full Scale)
High Accuracy at calibration conditions
after tare
± (0.4% of Reading + 0.2% of Full Scale)
High Accuracy option not available for units ranged under 5 sccm or over 500
slpm.
Accuracy for Bidirectional Meters
at calibration conditions after tare
± (0.8% of reading + 0.2% of total span from positive full scale to negative full scale)
Repeatability ± 0.2% Full Scale
Zero Shift and Span Shift 0.02% Full Scale / ºCelsius / Atm
Operating Range / Turndown Ratio 0.5% to 100% Full Scale / 200:1 Turndown
Maximum Measurable Flow Rate 128% Full Scale
Typical Response Time 10 ms (Adjustable)
Warm-up Time < 1 Second
Communications / Power Whisper Mass Flow Meter
Monochrome LCD or Color TFT
Display with integrated touchpad
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature
Digital Output Signal
1
Options RS-232 Serial / RS-485 Serial / PROFIBUS
3
Analog Output Signal
2
Options 0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Optional Secondary Analog Output
Signal
2
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA
Electrical Connection Options 8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking
Supply Voltage 7 to 30 Vdc (15-30 Vdc for 4-20 mA outputs)
Supply Current 0.040 Amp (+ output current on 4-20 mA)
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass
Flow, Volumetric Flow, Pressure or Temperature
3. If selecting PROFIBUS, no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS
specications for PROFIBUS supply voltages and currents (page 48) .
Operating Conditions Whisper Mass Flow Meter
Mass Reference Conditions (STP) 25ºC & 14.696 psia (standard — others available on request)
Operating Temperature −10 to +50 ºCelsius
Humidity Range (Non–Condensing) 0 to 100%
Maximum Pressure
50 psig
1
Higher line pressures available, please contact Alicat.
Mounting Attitude Sensitivity None
Ingress Protection IP40
Wetted Materials
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum
If your application demands a different material, please contact Alicat.
1. Do Not subject a WHISPER Differential Pressure sensor to upstream-downstream pressure differentials exceeding 15 PSID.
Full Scale Flow
Mass Meter
Pressure Drop at FS Flow
(psid)venting to atmosphere
Mechanical Dimensions Process Connections
1
0.5 sccm to 2 sccm 0.06
3.9”H x 2.4”W x 1.1”D
M-5 (10-32) Female Thread
2
5 sccm to 20 sccm 0.07
50 sccm 0.07
4.1”H x 2.4”W x 1.1”D 1/8” NPT Female
100 sccm to 200 sccm 0.06
500 sccm 0.07
1 slpm to 5 slpm 0.07
10 slpm 0.08 4.3”H x 2.7”W x 1.1”D
1/4” NPT Female
20 slpm 0.25 4.4”H x 4.0”W x 1.6”D
40 slpm 0.12 5.0”H x 4.0”W x 1.6”D 1/2” NPT Female
50 slpm 0.14
5.0”H x 4.0”W x 1.6”D 3/4” NPT Female100 slpm 0.24
250 slpm 0.60
500 slpm 0.39 5.3”H x 5.2”W x 2.9”D 3/4” NPT Female
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter ttings. VCR and
SAE connections upon request.
2. Shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT ttings.
Range Specic Specications