Manual


Technical Data for Alicat MS-Series Mass Flow Meters



 Air Air
1 Argon Ar
2 Methane 
3 Carbon Monoxide CO
 Carbon Dioxide CO2
5 Ethane C2H6
6 Hydrogen H2
 Helium He
8 Nitrogen N2
9 Nitrous Oxide N2O
 Neon Ne
11 Oxygen O2
12 Propane C3H8
13 normal-Butane 
 Acetylene C2H2
15 Ethylene 
16 iso-Butane 
 Krypton Kr
18  
19  SF6
  C-25
21  
22  C-8
23  C-2
  
25  
26  A-25





28



Star29
29  P-5
 Nitric Oxide NO
31  NF3
32 Ammonia NH3
33 Chlorine Gas Cl2
  H2S
35 Sulfur Dioxide SO2
36 Propylene C3H6



in an inert carrier
NO2






  
 




