User guide
Technical Data for Alicat MCS and MCRS-Series Mass Flow Controllers
 
 
     
 Air  Air
1 Argon  Ar
2 Methane  
3   CO
  CO2
5 Ethane  
 Hydrogen  H2
7 Helium  He
8 Nitrogen  N2
9 Nitrous Oxide N2O
 Neon  Ne
11 Oxygen  O2
12 Propane  C3H8
13 normal-Butane  
 Acetylene  C2H2
15 Ethylene  
 iso-Butane 
17 Krypton  Kr
18  
19  
  C-25
21  
22  C-8
23  C-2
  C-75
25  A-75
  A-25
27
2.5% CO2
28
2% O2
Star29
29  P-5
 Nitric Oxide NO
31  NF3
32 Ammonia NH3
  H2S
 Propylene 
in an inert carrier
NO2
carrier
 










