Datasheet

2.2 Notation
2.2. Notation
The use of DANGER, WARNING and CAUTION notation in this manual is conform to
the SEMI standard S-13-0298
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; their definition is given below. They may also be used
to alert against unsafe practices.
DANGER:
Indicates an immediate hazardous situation, which, if not avoided,
may result in death or serious injury.
WARNING:
Indicates a potentially hazardous situation, which, if not avoided,
may result in death or serious injury.
CAUTION:
Indicates a potentially hazardous situation, which, if not avoided,
may result in minor or moderate injury or property damage.
The use of IMPORTANT and Note notations is defined below.
IMPORTANT:
Contains instructions or practices associated with maintenance and operation
of the Starter Kit. Highlights specific actions or steps to be followed in order to
avoid defeating equipment functionality or cause product damage.
Note: contains instructions or practices associated with maintaining the Starter Kit.
Clarifies issues needing the reader’s attention.
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SEMI S13-0298: Safety Guidelines for Operation and Maintenance Manuals Used with Semicon-
ductor Manufacturing Equipment, Semiconductor Equipment and Materials International (Moun-
tainview, CA) 1998
c
2012 SA 19