Service manual

EBS - MARK II
1-49
Released:01/2013
E-mail: [e-mail]; webside: amfreece.com
Phone: [phone]; Fax: [phone]
E - STANDARD MACHINE
1.10. X-Y MOVEMENT MOTORS ADJUSTMENT
X-Y movement motors test screen enables user to adjust and test bedplate movement in X
and Y axis and chuck movement in Y axis. X-Y movement motors test screen is protected by
password level III, see chapter E 1.2.1. To enter X-Y movement motors test screen press icon
on the service menu screen.
a) Information in point provides user with current positions in X, Y axis.
b) Icons in point are used to test X-Y movements in all directions.
c) Icons in point are used to establish the home position in case of a respective sensor’s
shutter position change.
d) Icons in point
are used for electronic adjustment of home positions within the range ±
1.5 mm.