Specifications

APPENDIX VIII: System Specification File
The SysSpec.dat file lists the specifications and tolerances for critical system
parameters. During the self-test process the values of these parameters are
measured and compared to the specification stored in the SysSpec.dat file.
[Spec]
ImageOff=150.000 ;Image offset tolerance in um
NaviScaleTol0=2.000 ;Mag. 1 magnification tolerance in %
NaviScaleTol1=2.000 ;Mag. 2 magnification tolerance in %
NaviScaleTol2=2.000 ;Mag. 3 magnification tolerance in %
NaviScaleTol2=2.000 ;Mag. 3 magnification tolerance in %
NaviScaleX1=51600 ;magnification spec. of pixel size (Width
NaviScaleY1=38600 ;and height) when normalised to 1000x1000
NaviScaleX2=29600 ;image size, for 4 Images
NaviScaleY2=22200
NaviScaleX3=24500
NaviScaleY3=18300
NaviScaleX4=14100
NaviScaleY4=10600
ImageAngle=0.200 ;Image angle spec. in degree
RefRailAngle=0.050 ;Reference Rail Angle spec. in degree
XYCompTol=0.005 ;X & Y linear error compensation tolerance
SkewCompTol=0.005 ;Skew error compensation tolerance
Aper=120.000 ;aperture spec. for all Images
Focus1=43000.000 ;focus spec. for Magnification 1
Focus2=22000.000 ;focus spec. for Magnification 2
Focus3=23000.000 ;focus spec. for Magnification 3
Focus4=13000.000 ;focus spec. for Magnification 4
XErrTol=150 ;stage calibration X Error tolerance in um
YErrTol=150 ;stage calibration Y Error tolerance in um
SErrTol=150 ;stage calibration skew error tolerance in um
System specification ends, the second half of the file stores machine unique information.
They are data needed for system to Test Board the self-test.
MIN_F_AREA=650
T_THRESHOLD=160
C_THRESHOLD=150
FiduLight=0
[Fiducial]
LMX=-143585.222
LMY=-126282.756
BLMX=-66005.075
BLMY=-137848.975
RRDist=3Scanspection0.000