User Manual

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Manual 15000008 Rev 0 Page 1 of 2
Operation Manual
Back Pressure Regulators
(Model BP1000)
A. General information
AP Tech back pressure regulators are used in gas delivery systems to maintain a specified inlet
(upstream) pressure. A back pressure regulator is similar to a precision pressure relief device.
Many models are available with different operating characteristics (pressure ratings, flow
capabilities, etc.) and porting configurations.
Refer to the appropriate catalog data sheet for specific product information.
B. Installation
1. Prior to installation, verify that the operating characteristics of the back pressure
regulator as described below are appropriate for the system in which it will be installed.
a. Verify the materials of construction are compatible with the intended process gas.
b. Verify the pressure and temperature ratings are acceptable for the intended application.
c. If the back pressure regulator is equipped with either a supply or delivery pressure gauge,
verify that the pressure gauge range is suitable for application.
d. Verify that the flow capability of the back pressure regulator is appropriate for the
application.
2. Inspect the back pressure regulator to determine the flow path through the regulator and
how the regulator will need to be installed in the system.
a. The inlet (high pressure) port(s) is labeled with an “IN” marked into the body near the port.
Arrows are sometimes used next to the
IN to point toward an inlet port.
b. The outlet (low pressure) port(s) is labeled with an “
OUT” marked into the body near the
port. Arrows are sometimes used next to the
OUT to point toward an outlet port.
c. Always connect the gas source to the inlet port. Never connect the gas source to the outlet
port.
3. Install the regulator using the appropriate method described below. A large variety of
porting options and connections are available.
a. For tube stub connections, weld connectors or other components to the tube stubs per
standard industry practice (reference SEMI standard F78).
b. For metal face seal connectors, assemble connections per standard practice described by
fitting supplier (typically 1/8 turn past fingertight).
c. For NPT connections, apply PTFE (e.g. Teflon) tape to connector threads and install
connector in regulator body wrench tight.