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Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment • FAST SHIPPING AND DELIVERY • TENS OF THOUSANDS OF IN-STOCK ITEMS • EQUIPMENT DEMOS • HUNDREDS OF MANUFACTURERS SUPPORTED • LEASING/MONTHLY RENTALS • ITAR CERTIFIED SECURE ASSET SOLUTIONS SERVICE CENTER REPAIRS Experienced engineers and technicians on staff at our full-service, in-house repair center WE BUY USED EQUIPMENT Sell your excess, underutilized, and idle used equipment We also offer credit for buy-back
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PZ 62E User Manual E-500/E-501 Series Modular Piezo Controller Release: 2.15.1 Date: 2013-07-11 This document describes the following products:     E-500 and E-501 Chassis with Power Supply E-503, E-504, E-505, E-506, E-508 Amplifier Modules E-509 Sensor / Piezo Servo Control Modules E-515 and E-517 Display / Interface Modules © Physik Instrumente (PI) GmbH & Co. KG Auf der Römerstr. 1 ⋅ 76228 Karlsruhe, Germany Tel. +49-721-4846-0 ⋅ Fax: +49-721-4846-1019 info@pi.ws ⋅ www.pi.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Table of Contents: 1. About this Document........................................................ 4 1.1. Goal and Target Audience of this Manual ................................... 4 1.2. Symbols and Typographic Conventions ...................................... 4 1.3. Other Applicable Documents ...................................................... 5 1.4. Downloading Manuals................................................................
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E 5.3.2. Operating Limits ....................................................................... 21 5.3.3. Specifications ........................................................................... 22 5.3.4. Pin Assignment......................................................................... 23 5.4. E-504 High-Power Piezo Amplifier, Energy Recovery ............... 24 5.4.1. Front Panel Elements .........................................
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E-500/E-501 Series PZT Servo Controllers 5.10. User Manual PZ 62E E-517 Computer Interface and Display Module ........................ 54 5.10.1. Front Panel Elements ............................................................... 54 5.10.2. Specifications ........................................................................... 55 5.10.3. Pin Assignment......................................................................... 56 5.11. 6. Dummy Modules ...........................................
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E-500/E-501 Series PZT Servo Controllers 1. 1.1. User Manual PZ 62E About this Document Goal and Target Audience of this Manual This manual contains information on the intended use of the E-500/E-501 series piezo control electronics (referred to as “E-500/E-501 system” in this manual). It assumes that the reader has a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures. The latest versions of the user manuals are available for download (p.
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E-500/E-501 Series PZT Servo Controllers 1.3. User Manual PZ 62E Other Applicable Documents Some of the devices which are mentioned in this documentation are described in detail in their own User Manuals or Technical Notes. The User Manuals and Technical Notes relevant for your configuration are included in delivery (see p. 14). For the latest versions of the User Manuals and Technical Notes contact our customer service department (see p. 6).
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E-500/E-501 Series PZT Servo Controllers 1.4. User Manual PZ 62E Downloading Manuals INFORMATION If a manual is missing on our website or if there are problems in downloading:  Contact our customer service department (info@pi.ws). The current versions of the manuals are found on our website. To download a manual, proceed as follows: 1. Open the website http://www.pi-portal.ws. 2. Click Downloads. 3. Click the corresponding category (e. g. E Piezo Drivers & Nanopositioning Controllers). 4.
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E-500/E-501 Series PZT Servo Controllers 2. 2.1. User Manual PZ 62E Safety Intended Use The E-500/E-501 system is a laboratory device according to DIN EN 61010. It is intended to be used in interior spaces and in an environment which is free of dirt, oil and lubricants. Corresponding to its design, the E-500/E-501 system is intended for driving capacitive loads (e. g. piezo ceramic actuators). The E-500/E-501 system must not be used for purposes other than those named in this user manual.
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E-500/E-501 Series PZT Servo Controllers 2.3. User Manual PZ 62E Organizational Measures User Manual  Always keep this user manual next to the E-500/E-501 system when using the E500/E-501 system. If the user manual is lost or damaged, contact our customer service department (info@pi.ws).  Add all information given by the manufacturer to the user manual, for example supplements or Technical Notes.
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E-500/E-501 Series PZT Servo Controllers 3. User Manual PZ 62E Introduction Fig. 1: Three-channel system: E-501 chassis with E-509 sensor / piezo servo-control module, E-503 piezo amplifier module and E-517 interface / display module 3.1. Model Survey Chassis The E-500 and E-501 chassis are based on an EMI-proven chassis with multi-function power supply and a backplane carrying all connectors to the system amplifiers, servo-controllers and interface modules.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Sensor and Controller Modules E-509.S1 Sensor / Piezo Servo-Control Module, SGS sensor, 1 channel E-509.S3 Sensor / Piezo Servo-Control Module, SGS sensors, 3 channels E-509.S31 Sensor / Piezo Servo-Control Module, SGS sensors, 3 channels, for NanoCube® stages E-509.C1A Sensor / Piezo Servo-Control Module, capacitive sensor, 1 channel E-509.C2A Sensor / Piezo Servo-Control Module, capacitive sensors, 2 channels E-509.
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E-500/E-501 Series PZT Servo Controllers 3.3. User Manual PZ 62E Compatibility Note NOTICE Overheating or malfunction with improper system configuration! In March 2011, the backplane of the chassis (E-500.00 or E-501.00) has been changed. The modules of the E-500/E-501 system have been adapted accordingly.
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E-500/E-501 Series PZT Servo Controllers 3.4. User Manual PZ 62E Signal Path Diagram The modules of the E-500/E-501 system can be combined in several configurations in an E-500 or E-501 chassis (see Section 3.2 for an example). The signal path diagram below shows a usual configuration. Fig. 2: Interconnections between E-517 digital piezo controller operation module, amplifier module and E-509 servo module INFORMATION The backplane of the chassis (E-500.00 or E-501.
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E-500/E-501 Series PZT Servo Controllers 3.5. User Manual PZ 62E Maximum Ratings The E500/E-501 system is designed for the following operating data: Model Maximum Operating Voltage Operating Frequency Maximum Current Consumption System in E500.00 chassis 100 to 240 V~ 50-60 Hz 210 VA System in E501.00 chassis 100 to 120 V~ 50-60 Hz 90 VA 50-60 Hz 90 VA (fuses: 2 x T2AH, 250 V) (fuses: 2 x T2AH, 250 V 220 to 240 V~ (fuses: 2 x T1AL, 250 V) 3.6.
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E-500/E-501 Series PZT Servo Controllers 4. Handling 4.1. Unpacking Checklist User Manual PZ 62E The E-500/E-501 system was carefully inspected, both electrically and mechanically, before shipment. Upon receiving the device, unpack it and check for any obvious signs of physical damage that may have occurred during transit. Retain and use the original packing material in case reshipment is necessary. The following items are shipped with every E-500/E-501 system: • • • • Chassis with modules installed.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E High temperatures can overheat the E-500/E-501 system.  Install the E-500/E-501 system horizontally with 3 cm air circulation area.  Do not install the E-500/E-501 system vertically since this prevents internal convection.  Ensure sufficient ventilation at the installation site. The E-500.621 chassis uses the same main connectors as the E-500.00 and E-501.00, but has incompatible pinouts.
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E-500/E-501 Series PZT Servo Controllers 4.3. User Manual PZ 62E Power Connection The power connection is located on the rear panel of the chassis. Unless you request otherwise, the E-500/E-501 system will be set up for the line voltage we believe predominant in your country. How to adapt E-500/E-501 system to a different line voltage: 4.4.  If your system uses a 19” chassis (E-500.
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E-500/E-501 Series PZT Servo Controllers 4.6. Starting Operation 4.6.1. Analog Operation User Manual PZ 62E INFORMATION The external analog signal can be generated by a computer (e.g. from a data acquisition board). You can use the PI LabVIEW analog driver to generate the analog signal.  See the E500T0011 Technical Note for how to download the driver set from our website. 1. Turn all DC-OFFSET potentiometers CCW (zero offset). 2. Turn all SERVO switches to OFF (open-loop operation).
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E-500/E-501 Series PZT Servo Controllers 5. Module Description 5.1. E-500.00 19” Chassis with Power Supply 5.1.1. Specifications 5.1.2. User Manual PZ 62E Model E-500.00 Function 19"-Chassis for Piezo Controller System: Amplifier Modules, Sensor- / Servo-Control Modules, Interface / Display Modules Channels 1, 2, 3 (up to 3 amplifier modules) Dimensions 450 x 132 x 296 mm + handles +feet Operating Voltage 100 - 240 V~, 50 - 60 Hz Max.
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E-500/E-501 Series PZT Servo Controllers 5.2. E-501.00 9.5”Chassis with Power Supply 5.2.1. Specifications 5.2.2. User Manual PZ 62E Model E-501.00 Function 9.5”-Chassis for Piezo Controller System: Amplifier Modules, Sensor- / Servo-Control Modules, Interface / Display Modules Channels 1, 3 (1 amplifier module) Dimensions 236 x 132 x 296 mm + handles + feet Operating Voltage 100 - 120 / 220 - 240 V~, 50 - 60 Hz Max.
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E-500/E-501 Series PZT Servo Controllers 5.3. User Manual PZ 62E E-503 3-Channel Piezo Amplifier DANGER High Voltage! The E-503 amplifier can output up to 130 V. Touching this High Voltage can result in serious or even lethal injury due to electric shock. 5.3.1.  Only authorized and qualified personnel must install, operate, maintain and clean the E503 amplifier.  Operate a piezo actuator on a “PZT” socket only when it is connected to a protective earth conductor. Front Panel Elements Fig.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Labeling Type Function CONTROL INPUT BNC In analog operation, this control input voltage gives the target (either as voltage or position, depending on the servo mode). The input signal should always be in the range of 0 to 10 V (excursions to -2 or +12 V may cause overflow, especially with servo on, and reduce actuator lifetime). The control input range can be shifted using the “DC-OFFSET” potentiometer.
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E-500/E-501 Series PZT Servo Controllers 5.3.3. User Manual PZ 62E Specifications E-503.00 E-503.
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E-500/E-501 Series PZT Servo Controllers 5.3.4.
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E-500/E-501 Series PZT Servo Controllers 5.4. User Manual PZ 62E E-504 High-Power Piezo Amplifier, Energy Recovery DANGER High Voltage! The E-504 amplifier can output up to 130 V. Touching this High Voltage can result in serious or even lethal injury due to electric shock. 5.4.1.  Only authorized and qualified personnel must install, operate, maintain and clean the E504 amplifier.  Operate the piezo actuator on the “PZT” socket only when it is connected to a protective earth conductor.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Labeling Type Function E-504.00F only: LEMO Output of the piezo voltage for the piezo actuator in the stage. Voltage in the range of -30 to 130 V. ERA.00.250.CTL PZT -30 to 130 V E-504.00S only: LEMO ERA.00.250.CTL Output of the piezo voltage for the piezo actuator in the stage. Fixed voltage of 100 V for piezo tip/tilt stages. PZT 100 V 5.4.2. Operating Limits Fig.
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E-500/E-501 Series PZT Servo Controllers 5.4.3. User Manual PZ 62E Specifications E-504.00F E-504.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E approx. 58 W will be allocated to the internal base load (1.5 μF), while approx. 42 W will be available for the external piezo load. With a small-signal capacitance of 1 μF, the piezo actuator would have a large-signal capacitance of 2 μF, and approx. 57 W would be available for it. 5.4.4. Pin Assignment 32 pin connector, DIN 41612, male Row PIN a 2 Power Fail 4 IN: ch1* 6 Piezo voltage GND 8 OUT: piezo voltage 10 n.c. 12 n.c.
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E-500/E-501 Series PZT Servo Controllers 5.5. User Manual PZ 62E E-505 High-Power Piezo Amplifier DANGER High Voltage! The E-505 amplifier can output up to 130 V. Touching this High Voltage can result in serious or even lethal injury due to electric shock. 5.5.1.  Only authorized and qualified personnel must install, operate, maintain and clean the E505 amplifier.  Operate the piezo actuator on the “PZT” socket only when it is connected to a protective earth conductor. Front Panel Elements Fig.
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E-500/E-501 Series PZT Servo Controllers Labeling Type E-505.00 and .10 only: LEMO ERA.00.250.CTL User Manual PZ 62E Function Output of the piezo voltage for the piezo actuator in the stage. Voltage in the range of -30 to 130 V. PZT -30 to 130 V E-505.00S only: LEMO ERA.00.250.CTL Output of the piezo voltage for the piezo actuator in the stage. Fixed voltage of 100 V for piezo tip/tilt stages. PZT 100 V 5.5.2. Operating Limits Fig.
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E-500/E-501 Series PZT Servo Controllers 5.5.3. User Manual PZ 62E Specifications E-505.00 E-505.10 E-505.
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E-500/E-501 Series PZT Servo Controllers 5.5.4. User Manual PZ 62E Pin Assignment 32 pin connector, DIN 41612, male Row PIN a 2 Power Fail 4 IN: ch1* 6 Piezo voltage GND 8 OUT: piezo voltage 10 n.c. 12 n.c. 14 internal use,Bus_A 16 internal use, Bus_Vcc 18 n.c. 20 n.c. 22 GND (measurement) 24 GND (power) 26 IN: +24 V to +27V 28 IN: -37 V 30 IN: +137 V 32 Protective earth (chassis) PIN c OUT: ch1 (BNC+Offset)* OUT: ch1 (monitor) Piezo voltage GND OUT: piezo voltage n.c. n.c.
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E-500/E-501 Series PZT Servo Controllers 5.6. User Manual PZ 62E E-506 Linearized Piezo Amplifier, Charge Control DANGER High Voltage! The E-506 amplifier can output up to 130 V. Touching this High Voltage can result in serious or even lethal injury due to electric shock.  Only authorized and qualified personnel must install, operate, maintain and clean the E506 amplifier.  Operate the piezo actuator on the “PZT” socket only when it is connected to a protective earth conductor.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Labeling Type Function CONTROL INPUT BNC In analog operation, this control input voltage gives the target (either as voltage or position, depending on the servo mode). The input signal should always be in the range of 0 to 10 V (excursions to -2 or +12 V may cause overflow, especially with servo on, and reduce actuator lifetime). The control input range can be shifted using the “DC-OFFSET” potentiometer.
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E-500/E-501 Series PZT Servo Controllers 5.6.3. User Manual PZ 62E Specifications E-506.10 Function Linearized amplifier module, chargecontrolled Channels 1 Tolerance Amplifier Input voltage -2 to +12 V Output voltage* -30 to 130 V Peak output power, < 2.5 ms 280 W max. Average output power 30 W max. Peak current, < 2.5 ms 2A Average current 250 mA Current limitation Short-circuit-proof Ripple, noise 0 to 100 kHz <0.
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E-500/E-501 Series PZT Servo Controllers 5.6.4. User Manual PZ 62E Pin Assignment PZT High Voltage Top pin: Plus Bottom pin: Return conductor (minus; the actuator connected must have a floating-ground construction!) Housing: Protective earth PT1000 Temperature sensor Schematic circuit diagram of temperature sensor LEMO EPL.OS.303.
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E-500/E-501 Series PZT Servo Controllers 5.7. User Manual PZ 62E E-508 High-Power Piezo Amplifier with 1100 V Output Voltage DANGER High Voltage! The E-508 amplifier can output up to 1100 V. Touching this High Voltage can result in serious or even lethal injury due to electric shock. 5.7.1.  Only authorized and qualified personnel must install, operate, maintain and clean the E508 amplifier.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Labeling Type Function CONTROL INPUT E-508.00: BNC In analog operation, this control input voltage gives the target (either as voltage or position, depending on the servo mode). Input voltage range: E-508.OE: SMB  Servo off: ±1/100 of selected output range  Servo on: 0 to 10 V With E-508.00, the control input range can be shifted using the “DC-OFFSET” potentiometer.
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E-500/E-501 Series PZT Servo Controllers 5.7.3. User Manual PZ 62E Specifications Function E-508.00 E-508.
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E-500/E-501 Series PZT Servo Controllers 5.7.4. User Manual PZ 62E High-Voltage Actuator Types and Terminology If you order the actuator and controller together, and/or provide PI with sufficient information about your application, then the actuator connector, output voltage range and gain polarity will be set up as required. If you are connecting other actuators or wiring your own connector, read the discussion of actuator type carefully and any documentation that came with the actuator.
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E-500/E-501 Series PZT Servo Controllers 5.7.6. User Manual PZ 62E E-508.00 Gain Polarity and Output Range Settings NOTICE Damage from electrostatics! The E-500/E-501 system contains electrostatic sensitive devices (EGB) and can be damaged if handled improperly.  Avoid touching components, pins and PCB tracks.  Before touching an electronic component, discharge yourself of any electric charges: − While working, wear an antistatic wrist strap or − Briefly touch a conducting, grounded object.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E For example, in open-loop operation, the output range +3 to +1100 V and gain +100 yield a Control In range of 0 to +11 V. Setting the Output Range Jumper Ranges E +3 to +1100 V (factory setting) D -260 to +780 V C -550 to +550 V B -780 to +260 V A -1100 to -3 V To change setting, remove red cap (shown in Range E position) and replace over pins corresponding to desired range. Release 2.15.1 www.pi.
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E-500/E-501 Series PZT Servo Controllers 5.8. User Manual PZ 62E E-509 Signal Conditioner / Servo-Controller Module INFORMATION 5.8.1.  See the E-509 User Manual (PZ77) for a detailed description.  See also the User Manuals for the E-802 servo-controller submodule (with all E-509 versions) and the E-801 sensor submodule (only with LVDT and strain gauge sensor versions). Front Panel Elements of Modules for Dual-Electrode Capacitive Sensors Fig. 20: E-509.C2A sensor / servo controller Fig.
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E-500/E-501 Series PZT Servo Controllers Labeling Type User Manual PZ 62E Function SERVO x ON/OFF Toggle switch Switch for the servo mode selection of the corresponding channel: x stands for the channel number   ON: Servo mode is switched on (closed-loop operation) OFF: Servo mode is switched off (open-loop operation) See also “Starting Operation” on p. 17. SENSOR MONITOR LEMO Output of the monitor signal(s) for the sensor channel(s). EGG.0B.306.CLL Pinout on p. 48. 5.8.2.
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E-500/E-501 Series PZT Servo Controllers Labeling Type With E-509.E3 ony: LED Yellow/off OFL User Manual PZ 62E Function Overflow state:  Yellow: Overflow condition, i.e. the amplifier is near its range limit.  Off: No overflow condition When the OFL LED comes on, a zero-point adjustment of the sensor can be necessary. See p. 17 and the E-509 User Manual (PZ77E) for details.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Labeling Type Function OFL LED Overflow state: Yellow/off  Yellow: Overflow condition, i.e. the amplifier is near its range limit.  Off: No overflow condition When the OFL LED comes on, a zero-point adjustment of the sensor can be necessary. See p. 17 and the E-509 User Manual (PZ77E) for details.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E E-509.C1A / E-509.C2A / E-509.C3A E-509.S1 / E-509.S3 / E-509.S31 Interfaces and operation Sensor connection LEMO EPL.00.250.NTD LEMO ERA.0S.304.CLL Sensor monitor output 0 to 10 V (±5 V) 0 to 10 V (±5 V) Sensor monitor socket LEMO 6-pin FGG.0B.306.CLAD56 BNC (1-ch.) / 3-pin. LEMO ERA.0S.303.CLL (3-ch.) Display Overflow LED Overflow LED Operating temperature range +5 to +50°C +5 to +50°C Dimensions 7HP/3U 7HP/3U Mass 0.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E E-509.E03 E-509.E3 Operating temperature range +5°C to +40 °C +5°C to +40 °C Dimensions 7HP/3U 7HP/3U Target ground connector 3 × banana socket 3 × banana socket Operating voltage E-500/E-501 system E-500/E-501 system Miscellaneous *Extension factors to multiply by the nominal measurement range of the selected sensor head D-510, to be specified with order 5.8.5. Pin Assignment SENSOR socket of E-509.S3 and E-509.S1 Fig.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E SENSOR MONITOR socket of E-509.S3 LEMO socket ERA.0S.303.CLL The SENSOR MONITOR socket carries the signals from all three channels. Each E-509.S3 comes with the E-808.90 sensormonitor cable. The purpose of this cable is simply to split up the signals of the SENSOR MONITOR socket for the three channels. Fig.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E E-509.S1 32-pin connector, DIN 41612, male Pin No. Function Pin No.
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E-500/E-501 Series PZT Servo Controllers 5.9. E-515 Display Modules 5.9.1. Front Panel Elements Fig. 29: E-515.03 display module User Manual PZ 62E Fig. 30: E-515.01 display module INFORMATION In the labeling of E-515.01 and E-515.03 display modules, X stands for the supported number of channels. Labeling Type Function MICRONS / VOLTS Toggle switch Switch for selection of the signal to be displayed for the channel: Display with 3 ½ digits - 5.9.2.
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E-500/E-501 Series PZT Servo Controllers 5.9.3. User Manual PZ 62E Pin Assignment E-515.01 and E-515.03 32-pin connector, DIN 41612, male Release 2.15.1 www.pi.ws Page 51 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.
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E-500/E-501 Series PZT Servo Controllers 5.9.4. User Manual PZ 62E Display Adjustment NOTICE Damage from electrostatics! The E-500/E-501 system contains electrostatic sensitive devices (EGB) and can be damaged if handled improperly.  Avoid touching components, pins and PCB tracks.  Before touching an electronic component, discharge yourself of any electric charges: − While working, wear an antistatic wrist strap or − Briefly touch a conducting, grounded object.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Fig. 31: Location of display adjustment elements on the E-515.0x display module Potentiometers: DIP Switch Settings Reading adjustments: Setting the decimal point: V1–V3: M1–M3 S1–S3: S4: S5–S7: S8: S9–S11: S12: Voltage channels 1–3 Microns channels 1–3 Release 2.15.1 www.pi.ws Micron channel 3 Volt channel 3 Micron channel 2 Volt channel 2 Micron channel 1 Volt channel 1 Page 53 Artisan Technology Group - Quality Instrumentation ...
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E-500/E-501 Series PZT Servo Controllers 5.10. User Manual PZ 62E E-517 Computer Interface and Display Module INFORMATION  See the E-517 User Manual (PZ214E) for a detailed description. 5.10.1. Front Panel Elements Fig. 32: E-517.i3 interface / display module, singlechannel E-517.i1 models have identical front panels but show only one channel in the display Labeling Fig. 33: E-517.i30 interface / display module, singlechannel E-517.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E 5.10.2. Specifications E-517.i1, E-517.i10 E-517.i3, E-517.i30 Function Digital operation module Digital operation module Channels 1 3 Processor DSP 60 MHz DSP 60 MHz Sampling rate, sensor 25 kHz, 8-times oversampling 25 kHz, 8-times oversampling Thermal drift Stability: 0.2 mV Stability: 0.2 mV Linearity @ nominal range 0.01% 0.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E 5.10.3.
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E-500/E-501 Series PZT Servo Controllers 5.11. User Manual PZ 62E Dummy Modules Your E-500/E-501 system may be equipped with one or more dummy modules: E-595.00 E-596.00 E-596.10 Replaces E-509.
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E-500/E-501 Series PZT Servo Controllers 6. Integrating Modules in Third-Party Systems 6.1.1. Safety Measures for Integration in Third-Party Systems User Manual PZ 62E DANGER High Voltage!  Only authorized and qualified personnel must install, operate, maintain and clean the modules of the E-500/E-501 series.  Remove the third-party system from the power source before integrating modules of the E-500/E-501 series.
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E-500/E-501 Series PZT Servo Controllers 6.1.2. User Manual PZ 62E Supply Power for the Modules The supply power must be stable within a range of 2 % of the nominal value. For stable supply power with dynamic operation of high piezo loads, the power supply must be equipped with a sufficiently dimensioned buffer capacitor. The required capacitance of the buffer can be approximated as follows: Buffer capacitance = 10 × piezo load 6.1.3.
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E-500/E-501 Series PZT Servo Controllers 7. Maintenance 7.1. Cleaning User Manual PZ 62E NOTICE Short circuits or flashovers! The E500/E-501 system contains electrostatic sensitive devices that can be damaged by short circuits or flashovers when cleaning fluids enter the case.  Before cleaning, remove the E500/E-501 system from the power source by pulling the power plug.  Prevent cleaning fluid from entering the case.
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E-500/E-501 Series PZT Servo Controllers 4 User Manual PZ 62E Be sure to replace both fuses with fuses of the suitable type: Model Line voltage ranges and fuse values E-500.00 100 to 240 V~ 2 x IEC T2AH, 250 V E-501.
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E-500/E-501 Series PZT Servo Controllers 8. User Manual PZ 62E Customer Service For inquiries and orders, contact your PI sales engineer or send us an e-mail (mailto:info@pi.ws).
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E-500/E-501 Series PZT Servo Controllers 9. User Manual PZ 62E Old Equipment Disposal In accordance with the applicable EU law, electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU. When disposing of your old equipment, observe the international, national and local rules and regulations. To meet the manufacturer’s product responsibility with regard to this product, Physik Instrumente (PI) GmbH & Co.
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E-500/E-501 Series PZT Servo Controllers 10. Appendix 10.1. Lifetime of PICMA® Actuators User Manual PZ 62E The following factors which can have an impact on the actuator lifetime must be taken into consideration: Applied voltage, temperature and relative humidity. The effect of each individual factor on the lifetime can be read off the diagrams shown below. The lifetime calculated in hours simply results as the product of all three values read off the diagrams.
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E Fig. 36: Interdependency between the mean MTTF of a PICMA® actuator and the relative humidity Example The simple formula MTTF = AU * AT * AF provides a quick estimate of the reliability in hours. In concrete terms: The values for 75% RH ( AF=14), 100 VDC (AU=75) and 45 °C (AT=100) result in an approximate MTTF of 105,000 h, i.e. more than 11 years (see markings on the diagrams).
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E-500/E-501 Series PZT Servo Controllers User Manual PZ 62E an amplifier switching frequency of 100 kHz, the sampling rate must be 200 kHz or higher. If the sampling rate provided by your oscilloscope is not high enough, use a low-pass filter at the oscilloscope input to eliminate frequencies above 100 kHz. Alternatively, you can use an analog oscilloscope or perform high-resolution measurements in the lower frequency range. When following those instructions, you will obtain valid measurement results.
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