Specifications

13
F500 Operation Manual/INTRODUCTION
Using This Manual
INTRODUCTION
Processing Item Selection Guide
INTRODUCTION
Measurement Items
 Positioning (Measurement Objects Not On An Angle)
How is the mark?
How is the mark?
What kind of line?
How many
measuring points?
Which mark is used
for positioning?
Loss of lines
Extra lines in surrounding
area
EC Positioning
Edge Position_1
Edge Position_8
Horizontal/vertical
One
Multiple
Diagonal
Box
Cross point
of lines
Circle
Other
Processing Items
EC Positioning
Gravity and Area
Relative Search
ECM Search
Gray Search
Precise Search
What position is
measured?
Position of
one object
Relative
position of
two objects
Is the entire mark
clearly seen?
Entire mark
is clear
How about
inspection
accuracy?
Sometimes
partially hidden
In units of
pixels
In units of
sub-pixels
Slight shape change
No shape change
Excessive shape change
Flexible Search
T-Edge Position
No loss of lines
No extra lines in
surrounding area
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