User's Manual

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Brillian Network & Automation Integrated System Co., Ltd.
11 Periodical Maintenance
11.1 E-Rack Maintenance Table
11.2 Cleaning Plate
11.2.1 PurposeCleaning Plate Particle
MaterialNA
Manual toolCleanroom wiperDI Water
NoticeBefore action, please confirm whether the machine is down
PM StepCleanroom wiper cloth into the DI Water from inside to outside and from top to
clean the Plate surface.
Item Maintenance Content Cycle Result Remark
1 Clean Plate Three months □OK □NG
2 Reader Test Three months Put the POD on Plate use button Check Reader Function □OK □NG
Remark
Plate Clean
Use DI Water &Cleanroom wiper Clean Plate
Action
BR-E-Rack-0001 Maintenance Table
Machine Tool:
□ Three months
Date:
Operator: