User's Manual
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Brillian Network & Automation Integrated System Co., Ltd.
11 Periodical Maintenance
11.1 E-Rack Maintenance Table
11.2 Cleaning Plate
11.2.1 Purpose:Cleaning Plate Particle
Material:NA
Manual tool:Cleanroom wiper、DI Water
Notice:Before action, please confirm whether the machine is down
PM Step:Cleanroom wiper cloth into the DI Water from inside to outside and from top to
clean the Plate surface.
Item Maintenance Content Cycle Result Remark
1 Clean Plate Three months □OK □NG
2 Reader Test Three months Put the POD on Plate use button Check Reader Function □OK □NG
Remark:
Plate Clean
Use DI Water &Cleanroom wiper Clean Plate
Action
BR-E-Rack-0001 Maintenance Table
Machine Tool:
□ Three months
Date:
Operator: