User's Manual

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Brillian Network & Automation Integrated System Co., Ltd.
10 Periodical Maintenance
10.1 Cleaning Plate
10.1.1 Purpose：Cleaning Plate Particle
Material：NA
Manual tool：Cleanroom wiper、DI Water
Notice：Before action, please confirm whether the machine is down
PM Step：Cleanroom wiper cloth into the DI Water from inside to outside and from top to
clean the Plate surface.