Installation and Operation Manual X -TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Brooks® 4800 Series 4850 Mass Flow Controller 4860 Mass Flow Meter Model 4850/4860 with Compression Fittings Model 4850/4860 with Local Operator Interface
Brooks® 4800 Series Installation and Operation Manual X -TMF-4800-MFC-eng Part Number:541B072AAG September, 2013
Installation and Operation Manual X -TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X -TMF-4800-MFC-eng Part Number:541B072AAG September, 2013 Brooks® 4800 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Paragraph Number Contents Brooks® 4800 Series Page Number Section 1 Introduction 1-1 How to Use This Manual ............................................................................................................ 1-1 1-2 Description ................................................................................................................................. 1-1 1-3 Specifications .........................
Contents Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B0072AG September, 2013 Figures Figure Page Number Number 1-1 Dimensions for Model 4850/4860 with Standard Process Connections ..................................... 1-4 1-2 Dimensions for Model 4850/4860 with Downport Connections .................................................. 1-4 1-3 Dimensions for the 4800 Series Local Operator Interface (LOI) ................................................
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series 1-1 How to Use This Manual This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 4800 Series Products. This manual is organized into the following sections: Section 1. Introduction Section 2. Installation Section 3. Operation Section 4. Maintenance and Troubleshooting Section A.
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series ! WARNING Do not operate on gases other than those listed in this specification. Failure to heed this warning can result in serious personal injury and/or damage to the equipment. Operating Limits Pressure: 0 – 10 barg Temperature: 0 - 50°C at 10 barg Operating Humidity: 5 to 95% R.H. (ambient) Pressure Differential Range (Controllers) Minimum: 0.
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Digital Input/Output RS232 (standard) Valve Override Signal Valve controller: Input Open Valve closed: <0.3 V; Valve open: >4.8 V Calibration Curve Selection Select one of nine gases via the LOI or RS232. Optional software tool for ease of RS232 connection is available on the brooks Instrument website.
Section 1 Introduction Brooks® 4800 Series Figure 1-1 Dimensions for Model 4850/4860 with Standard Process Connections 1-4 Figure 1-2 Dimensions for Model 4850/4860 with Downport Connections Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Certifications: These certifications cover the 4800 Series mass flow devices as well as the local operator interface (LOI).
Section 1 Introduction Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series 1-4 Specifications for Local Operator Interface (LOI) For detailed instructions refer to the Brooks document X-SE-4800-LOI-eng.
Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series 2-1 General This section contains the procedures for the receipt and installation of the instrument. See Section 1 for dimensional and connection requirements. Do not attempt to start the system until the instrument has been permanently installed. It is important that the start-up procedures be followed in the exact sequence presented.
Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series 2-4 Return Shipment Prior to returning any instrument to the factory, contact your nearest Brooks location for a Return Materials Authorization Number (RMA#). This can be obtained from one of the following locations: Brooks Instrument 407 W. Vine Street P.O.
Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series 2-7 Mechanical Connections If mechanical connections were ordered from Brooks Instrument, an integrated filter of 40 microns is already installed in the upstream fitting. This is to prevent the possibility of any foreign material entering the flow sensor or control valve (for MFC).
Section 2 Installation Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 2-8 Electrical Connections The setpoint signal is supplied as a 0 to 5 Vdc or 4 to 20 mA analog signal. All signals are supplied via the 15-pin D-Connector. There is also an optional local operator interface (LOI). When the LOI is used the setpoint signal is provided by the LOI.
Section 2 Installation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Analog I/O Versions • Signal Common • Signal Output (Voltage or Current) • Nominal +15 Vdc or +24 Vdc • Setpoint Input (Voltage or Current) • Setpoint Common • Supply Common • Chassis Ground (via unit body) Refer to Table 1-1 for pin connections Local Operator Interface (LOI) Versions For description and specifications for the local operator interface refer to Section 1-4
Section 2 Installation Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 h. Check the analog output signal. The output signal should match the setpoint signal in accordance with the accuracy specifications provided in Section 1 of this document. i. If flow output signal does not match the setpoint, and pressure settings are correct, this could indicate a problem in the MFC. A secondary issue could be the gas type.
Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series 3-1 Operating Procedure After the MFC/MFM has been properly installed in the process, it is ready for operation. When initiating flow, slowly open the valve to avoid a flow surge. Bypass is a help in bringing the flow on smoothly. Avoid starting a pump to supply the flowmeter without the use of a valve upstream of the flowmeter.
Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series temperature difference measured by the two temperature sensors to increase with increasing flow. The temperature difference is then converted into a flow signal based on the factory calibration. There is one major difference between a traditional thermal mass flow sensor and the MEMS based sensor. A traditional thermal mass flow sensor makes use of a Cp transfer function.
Section 3 Operation Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Setpoint Signal Type Full Scale Zero Signal 0 to 5 Vdc 5 Vdc 0V 4 to 20 mA 20 mA 4 mA Flow Signal Output This output is used to indicate the flow signal. Several flow signal types are available: Flow Signal Type Full Scale Zero Signal Maximum Signal 0 to 5 Vdc 5 Vdc 0 V 5.5 Vdc = 110% 4 to 20 mA 20 mA 4 mA 21.
Section 3 Operation Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 3-5 PC-Based Support Tools A basic PC-based service tool for re-zeroing, gas selection, valve override and monitoring of the 4800 Series instruments is available on the Brooks Instrument website. To access this software, type in the following link into a web browser: www.BrooksInstrument.com/4800software.html. Then follow the instructions on the screen.
Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Section 4 Maintenance and Troubleshooting Brooks® 4800 Series 4-1 Overview No routine maintenance is required on the 4800 Series devices. However, if an in-line filter is used, the filtering elements should be periodically replaced.
Section 4 Maintenance and Troubleshooting Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 ! CAUTION This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during the removal, installation, or other handling of internal circuit boards or devices.
Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Section 4 Maintenance and Troubleshooting Brooks® 4800 Series 4-2-2 Frequently Asked Questions Q: Where is the zero button? A: There is no zero button on the 4800 Series devices.The re-zeroing function is handled via a PC-based software tool. Refer to "Zeroing the MFC (Self-Zero)" in Section 3-4 for instructions on how to obtain the software.
Section 4 Maintenance and Troubleshooting Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 3. If the Mass Flow Controller appears to be functioning but cannot achieve Setpoint, verify that there is sufficient inlet pressure and pressure drop at the controller to provide the required flow. Bench Troubleshooting 1. Establish a proper connection between the Brooks 4800 Series Mass Flow Meter or Controller (using Figure 4-1 as a reference).
Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Section 4 Maintenance and Troubleshooting Brooks® 4800 Series Figure 4-1 Bench Troubleshooting Circuit 4-2-4 Calibration Procedure The calibration of Brooks 4800 Series Mass Flow devices is not described in this manual. Such calibration requires accurate and traceable calibration equipment. To re-calibrate a device contact the Brooks factory.
Section 4 Maintenance and Troubleshooting Brooks® 4800 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-6 Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Bulgarian Ɉɫɧɨɜɧɢ ɢɧɫɬɪɭɤɰɢɢ ɉɪɨɱɟɬɟɬɟ ɩɪɟɞɢ ɪɚɛɨɬɚ! Brooks Instrument ɩɪɨɟɤɬɢɪɚ, ɩɪɨɢɡɜɟɠɞɚ ɢ ɬɟɫɬɜɚ ɩɪɨɞɭɤɬɢɬɟ ɫɢ ɩɨ ɬɚɤɴɜ ɧɚɱɢɧ, ɱɟ ɬɟ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ ɦɧɨɝɨɛɪɨɣɧɢ ɧɚɰɢɨɧɚɥɧɢ ɢ ɦɟɠɞɭɧɚɪɨɞɧɢ ɫɬɚɧɞɚɪɬɢ.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Czech Základní instrukce PĜed instalací si pĜeþtČte následující instrukce! Spoleþnost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standardĤ. PĜístroje musí být ĜádnČ nainstalovány, používány a udržovány tak, aby byl zajištČn jejich nepĜetržitý provoz v rámci normálních technických specifikací.
Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Section A Essential Instructions Brooks® 4800 Series Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Dutch Essentiële instructies Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Estonian Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames.
Section A Essential Instructions Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Finnish Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series French Instructions essentielles A lire avant de commencer ! Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series German Wichtige Anweisungen Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt.
Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Section A Essential Instructions Brooks® 4800 Series Greek ǺĮıȚțȑȢ ȠįȘȖȓİȢ ǻȚĮȕȐıIJİ ʌȡȚȞ ıȣȞİȤȓıİIJİ! Ǿ Brooks Instrument ıȤİįȚȐȗİȚ, ʌĮȡȐȖİȚ țĮȚ įȠțȚȝȐȗİȚ IJĮ ʌȡȠȧȩȞIJĮ IJȘȢ ıİ ıȣȝȝȩȡijȦıȘ ȝİ ʌȜȒșȠȢ İșȞȚțȫȞ țĮȚ įȚİșȞȫȞ ʌȡȠIJȪʌȦȞ. Ǿ ıȦıIJȒ İȖțĮIJȐıIJĮıȘ, ȤȡȒıȘ țĮȚ ıȣȞIJȒȡȘıȒ IJȠȣȢ ĮʌȠIJİȜİȓ ĮʌĮȡĮȓIJȘIJȘ ʌȡȠȨʌȩșİıȘ IJȘȢ ȜİȚIJȠȣȡȖȓĮȢ İȞIJȩȢ IJȦȞ țĮȞȠȞȚțȫȞ ȠȡȓȦȞ.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Hungarian AlapvetĘ utasítások ElĘször olvassa el ezeket! A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelelĘen kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál mĦködési tartományuknak megfelelĘen üzemelhessenek.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Italian Istruzioni fondamentali Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Latvian SvarƯga instrukcija Pirms turpinƗt izlasiet! „Brooks Instrument” projektƝ, ražo un pƗrbauda savus ražojumus atbilstoši daudziem nacionƗlajiem un starptautiskajiem standartiem. Lai nodrošinƗtu šo izstrƗdƗjumu turpmƗku darbƯbu atbilstoši noteiktajiem parametriem, tie ir pareizi jƗuzstƗda, jƗlieto un jƗapkopj.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Lithuanian Pagrindinơs instrukcijos Perskaitykite prieš tĊsdami! „Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitiktǐ Ƴvairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi bnjti tinkamai montuojami, eksploatuojami ir prižinjrimi, kad ir toliau veiktǐ pagal jiems bnjdingus techninius parametrus.
Section A Essential Instructions Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Polish Zalecenia wstĊpne Prosimy przeczytaü przed rozpoczĊciem uĪytkowania! Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby speániaáy wymagania licznych norm krajowych i miĊdzynarodowych. Te produkty muszą byü poprawnie instalowane, obsáugiwane oraz konserwowane, aby zapewniü ich prawidáowe dziaáanie zgodnie ze specyfikacją techniczną.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Portuguese Instruções Básicas Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Romanian IndicaĠii de referinĠă CitiĠi-le întâi pe acestea! Brooks Instrument îúi proiectează, produce úi testează produsele într-un mod ce respectă un mare număr de standarde autohtone úi internaĠionale.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Slovak Základné príkazy PreþítaĢ pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalovaĢ, prevádzkovaĢ a udržiavaĢ, na zabezpeþenie ich spoĐahlivej a normálnej prevádzky v celom pracovnom rozsahu.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim domaþim in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podroþju funkcioniranja.
Section A Essential Instructions Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series Spanish Instrucciones básicas ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales.
Section A Essential Instructions Brooks® 4800 Series Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Swedish Väsentliga anvisningar. Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation.
Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 Brooks® 4800 Series THIS PAGE WAS INTENTIONALLY LEFT BLANK
Brooks® Series 4800 Installation and Operation Manual X-TMF-4800-MFC-eng Part Number: 541B072AAG September, 2013 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
