Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Model 5850E Mass Flow Controller Model 5850E Mass Flow Controller with Card Edge Connector Model 5850E Mass Flow Controller with D-Connector
Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK
Contents Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Section 1 Introduction Paragraph Number Page 1-1 Purpose ............................................................................. 1-1 1-2 Description ........................................................................ 1-1 1-3 Specifications ....................................................................
Contents Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Section 5 Parts List 5-1 General ............................................................................. 5-1 Section A CE Certification CE Certification of Mass Flow Equipment ................................... A-1 Warranty, Sales/Service Contact Information ...................... Back Cover Figures Figure Number Page 1-1 Command Steps, Soft Start Disabled .................
Section 1 Introduction Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E 1-1 Purpose The Brooks® Model 5850E Flow Controller is a mass flow measurement device designed for accurately measuring and rapidly controlling flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5850E Mass Flow Controller.
Section 1 Introduction Brooks® Model 5850E Figure 1-1 Command Steps, Soft Start Disabled Figure 1-2 0 - 100% Command Step, Soft Start Enabled.
Section 1 Introduction Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Valve Off accessed via terminal J on the Card Edge or Pin 4 on the DConnector version. This feature allows the user to close the control valve independently of the command signal by supplying a TTL level low signal to the proper terminal. This function is useful when performing repetitive flow operations or as a safety shutdown. (Refer to Section 2-11.
Section 1 Introduction Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Power Requirements (NO Valve): +15 Vdc ±5%, 215 mA -15 Vdc ±5%, 180 mA 11.85 watts power consumption Ambient Temperature Limits: Operating: 40°F to 150°F (5°C to 65°C) Non-operating: -13°F to +212°F (-25°C to 100°C) Working Pressure: 1500 psi (10.342 mPa) maximum Differential Pressure: 5 to 50 psi (minimum pressure drop depends on gas and range).
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E 2-1 Receipt of Equipment When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should immediately be notified regarding his liability.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569). Brooks Instrument 407 W. Vine Street P.O.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E Figure 2-1 Model 5850E Dimensions Recommended installation procedures: a. The Model 5850E should be located in a clean, dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to the electrical components. c. Install in such a manner that permits easy removal if the instrument requires cleaning. d.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E Terminal Designation Unit UFC-1000 Tylan FC-280 Tylan FC-260 Brooks 5850E Card Edge Brooks 5850E Tylan FC-260 Tylan FC-280 Unit UFC-1000 Chassis Ground Chassis Ground Chassis Ground Chassis Ground 1 A Command Input Command Input Command Input Command Input Supply Common 0-5 Volt Signal Common 0-5 Volt Signal Common 0-5 Volt Signal Common 2 B Comma
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E Figure 2-3 Model 5850E Card Edge Connector Hookup Diagram PIN NO.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E e. When installing controllers with full scale flow rates of 10 slpm or greater, be aware that sharp, abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy. If possible, have at least ten pipe diameters of straight tubing upstream of the Model 5850E Mass Flow Controller.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E For installations which replace Unit Instruments UFC-1000's, (Card Edge version) Pin 10 is frequently grounded. In these situations the 5 Volt reference output must be disabled. Refer to Section 2-12.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E c. Isolating the valve override terminal returns the controller to normal operation. 1. Card Edge The valve override function can be accessed from Terminal 9. Refer to Figure 2-3. Note: For normal operation, Terminal 9 must be left open (floating). 2. D-Connector The valve override function is accessed from Terminal 12. Refer to Figure 2-4.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E 2-13 Five-Volt Reference Output/Valve Drive Configuration a. Card Edge Refer to Figures 2-3 and 3-3. Terminal 10 can be jumper selected as 5 Volt reference output, external valve return or “not used.” The 5 Volt reference output is required if a potentiometer is to be used to generate the command signal.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 2 Installation Brooks® Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-10
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AHG September, 2009 Brooks® Model 5850E 3-1 Theory of Operation The thermal mass flow sensing technique used in the Model 5850E works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube. Refer to Figure 3-1. At zero, or no flow conditions, the heat reaching each temperature sensor is equal.
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Figure 3-1 Flow Sensor Operational Diagram Precision 5 Volt Reference This allows direct connection of a command potentiometer to provide a 0-5 Volt command signal to the controller. A precision ten-turn 2K ohm potentiometer, with an integral turn counter, is recommended as this will permit repeatable adjustments of command to one part in 1,000.
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AHG September, 2009 Brooks® Model 5850E Figure 3-2 Flow Control System Block Diagram the control valve voltage during operation, also grounding this terminal will cause the control valve to open independent of the command signal. Refer to Section 2-11. Remote Transducer Input Accessed via terminal 5 on the Card Edge or Pin 15 on the D-Connector version.
Section 3 Operation Brooks® Model 5850E 3-4 Figure 3-3 Card Edge PC Board Jumper Location and Function Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AHG September, 2009 Figure 3-4 D-Connector PC Board Jumper Location and Function Section 3 Operation Brooks® Model 5850E 3-5
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Figure 3-5 Model 5850E Calibration Connections factory setting. This is primarily caused by changes in temperature between the calibration laboratory and the final installation. The zero flow reading can also be affected, to a small degree, by changes in line pressure and mounting attitude.
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AHG September, 2009 Brooks® Model 5850E orifice for actual operating conditions. Note 4: If Brooks’ secondary electronics are being used as a power supply during the calibration, the 5 Volt reference must be enabled on the Card Edge version for proper operation (see Section 2-13).
Section 3 Operation Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Adjust the span potentiometer until the voltage at TP1 is equal to the value calculated above. Recheck the flow rate after the flow is stable (at least two minutes). Repeat this check and adjustment procedure until the measured flow rate is within 1% of the desired flow rate.
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AHG September, 2009 Brooks® Model 5850E Figure 3-6 Adjustment Potentiometer Location Example: Controller error = 0.7% Measured TP2 voltage = -0.567 Volts TP2 correction = 0.7 x 0.450 = 0.315 Volts New TP2 correction = 0.315 + (-0.567) = -0.252 Volts Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat Steps “f,” “g” and “h.
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E 3-5 Response Fast Response Adjustment Two methods of adjusting the step response of the Model 5850E mass flow controllers can be used. No. 1 describes a method that will get the step response close to optimum quickly and without any flow measuring equipment.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AHG September, 2009 Section 3 Operation Brooks® Model 5850E Figure 3-7 Fast Response Adjustment a storage oscilloscope or recorder. a. Make a step change in command to the controller from zero to 100% of full scale flow and record the output signal of the fast response flowmeter. b. If this signal shows more than 4% overshoot, adjust the anticipate potentiometer one-half to one turn counterclockwise.
Section 3 Operation Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-12
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5850E 4-1 General No routine maintenance is required on the Model 5850E. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned.
Section 4 Maitenance & Troubleshooting Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 4-2 Troubleshooting A. System Checks The Model 5850E is generally used as a component in gas handling systems which can be quite complex. This can make the task of isolating a malfunction in the system a difficult one. An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5850E Observe the output signal and, if necessary, perform the zero adjustment procedure (Section 3-3). If the output signal will not zero properly, refer to the sensor troubleshooting section and check the sensor. If the sensor is electrically functional, the printed circuit board is defective and will require replacement. 2.
Section 4 Maitenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Actual flow overshoots setpoint by more than 5% full scale. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5 . Output stays at 0 Volts regardless of command and there is no flow through the controller. Clogged Sensor.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5850E Table 4-2 Sensor Troubleshooting 5. Deposits of silicon dioxide may be removed by soaking the internal parts in solution of 5% hydrofluoric acid (5 parts hydrofluoric acid and 95 parts water (H2O)) followed by Freon TF. 6. Sintered type restrictor elements should be replaced as it is not possible to adequately remove deposits from them.
Section 4 Maitenance & Troubleshooting Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 4-3 Sensor Tube The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range. The sensor assembly may be removed or replaced by referring to Section 4-4, Disassembly and Assembly. If the sensor assembly is cleaned and reinstalled, a calibration check should be performed. Refer to Section 3-4.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5850E 6. Remove and note the position of the valve spring spacers (10), which may be located above and/or below the lower guide spring (8). Remove the preload spacer spring (33)(NO Valve). 7. Unscrew the orifice (12) from the flow controller body(14). 8.
Section 4 Maitenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Note: Do not attempt to disassemble the sensor assembly. 12.Remove the sensor assembly O-rings (17) from the flow controller body (14). Using the Brooks O-ring removal tool will help prevent scratching the sealing surface. 13.Remove the adapter fittings (27) from the flow controller body (14). 14.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E the screws securing the valve retaining plate in diagonal pattern (Refer to Figure 4-1) to 17 in/lbs. 9. Install the coil assembly (2) over the valve stem assembly (6)(NC Valve) or (34)(NO Valve) install extension spacer nut (3)(NO Valve) and secure with jam nut (1). 10.
Section 4 Maitenance & Troubleshooting Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 The preload determines the initial force that is required to raise the valve seat off the orifice and start gas flow. If the preload is insufficient, the valve will not fully close and gas will leak through.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5850E Figure 4-2a Valve Adjusting Spacer Locations (Normally Closed valve N.C.
Section 4 Maitenance & Troubleshooting Brooks® Model 5850E Figure 4-2b Valve Adjusting Spacer Locations (Normally Open valve N.O.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E j2. If the flow controller output signal is 100% (5.0V) and the valve voltage is greater than 11.5 Volts, decrease the air gap with a small 0.005 inch air gap spacer. Refer to Figure 4-2. Repeat Steps h and i. j3. If the flow controller output signal is less than 100% (5.0V) and the valve voltage is greater than 11.5V.
Section 4 Maitenance & Troubleshooting Brooks® Model 5850E Figure 4-3 Voltmeter Connections for Valve Adjustment 4-14 Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME FORMULA Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f-13B1 1,3-Butadiene Butane 1-Butene CIS-2-Butene Trans-2-Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrac
Section 4 Maitenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Table 4-3 Conversion Factors (Nitrogen Base) Continued 4-16 GAS NAME FORMULA Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide Iodine Pentafluoride Isobutane Isobutene Isopentane Krypton Methane Methylacetylene Methyl Bromide 3-Methyl-1-butene Methyl Chloride Methyl Fluori
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Mixture Factor = 100 = 0.945 20 80 + 1.386 0.876 Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen It is generally accepted that the mass flow rate derived from this equation is only accurate to ±5%. The sensor conversion factors given in Table 4-4 are calculated based on a gas temperature of 21°C and a pressure of one atmosphere.
Section 4 Maitenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E QGAS = Desired flow rate of the gas (sccm) PNITROGEN = Density of Nitrogen at 70°F PGAS = Density of the gas (taken at customer temperature) SGGAS = Specific gravity of the gas (taken at customer temperature) Refer to Table 4-4 for specific gravities. Example: Qgas = SGgas = SGNitrogen 2,000 sccm .269 QNitrogen = QGAS x = 2,000 x .
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5850E Table 4-4 Model 5850E Orifice Sizing Nomograph 4-19
Section 4 Maitenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Figure 4-4 Example Nomograph 2. If inlet and outlet pressures are given in gauge pressure (psig) add 14.7 to convert to absolute pressure (psia). Outlet Pressure — 30 psig + 14.7 = 44.7 psia Inlet Pressure — 50 psig + 14.7 = 64.7 psia 3.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section 4 Maintenance & Troubleshooting Brooks® Model 5850E Then Dp = 64.7 - 44.7 = 20psi 4. Using the nomograph, locate the pressure drop (psi) on the vertical line marked "Dp" (Point A). 5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical line marked "QNitrogen" (Point B). 6. Draw a line connecting Dp and QNitrogen and extend it to the baseline. Mark this point (Point C). 7.
Section 4 Maitenance & Troubleshooting Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Restrictors The Model 5850E Series Mass Flow Controllers use three types of restrictor assemblies depending on full scale flowrate and expected service conditions. 1. Porous sintered metal for air equivalent flow rates up to and including 9.5 slpm. The porosity ranges from 1-40 microns.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E Mixture Factor = 100 = 0.945 20 80 + 1.386 0.876 Nitrogen equivalent flow = 20/.945 = 21.16 slpm Nitrogen. In this example a Size 4 Wire Mesh Assembly would be selected.
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Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section A CE Certification Brooks® Model 5850E Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A CE Certification Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section A CE Certification Brooks® Model 5850E Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A CE Certification Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Section A CE Certification Brooks® Model 5850E Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A CE Certification Brooks® Model 5850E Installation and Operation Manual X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B102AAG September, 2009 Brooks® Model 5850E THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual Brooks® Model 5850E X-TMF-5850E-MFC-eng Part Number: 541B102AAG September, 2009 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.