Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Model 5850i Mass Flow Controller Brooks® Model 5850i
Brooks® Model 5850i Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i THIS PAGE WAS INTENTIONALLY LEFT BLANK
Contents Installation and Operation Manual X -TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Section 1 Introduction Paragraph Number Page Number 1-1 1-2 1-3 Purpose ............................................................................. 1-1 Description ........................................................................ 1-1 Specifications ....................................................................
Contents Installation and Operation Manual X -TMF-5850i-MFC-eng Part Number:541B108AAG December, 2008 Brooks® Model 5850i Figures Figure Page Number Number 1-1 Command Steps, Soft Start Disabled ................................ 1-2 1-2 0-100% Command Step, Soft Start Enabled ..................... 1-2 2-1 2-2 2-3 2-4 2-5 2-6 Model 5850i Dimensions ................................................... 2-3 "D" Type Connector Pin Arrangement ...............................
Section 1 Introduction Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 1-1 Purpose The Brooks® Model 5850i Mass Flow Controller is a mass flow measurement device designed for accurately measuring and rapidly controlling flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5850i Mass Flow Controller.
Section 1 Introduction Brooks® Model 5850i Figure 1-1 Command Steps, Soft Start Disabled 1-2 Figure 1-2 0 - 100% Command Step, Soft Start Enabled Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008
Section 1 Introduction Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 1-3 Specifications Standard Ranges 3 sccm to slpm* (nitrogen equivalent) Accuracy ±1% full scale including linearity at calibrated conditions ±1.5% full scale including linearity for flow ranges greater than 20 slpm. Repeatability 0.25% of rate Response Time Less than 6 seconds to within 2% of full scale final value with a 0 to 100% command step.
Section 1 Introduction Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Temperature Sensitivity Zero: Less than ±0.075% full scale per degree C. Span: Less than ±1.0% full scale shift over 10-50°C range. Mounting Attitude Sensitivity ±0.5% maximum full scale deviation after re-zeroing. Command Input Jumper Selectable: 0-5 Vdc, Input resistance 200k ohm or 4-20 mAdc, Input resistance 75 ohm. Leak Integrity 1 x 10-9 Atm.
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 2-1 Receipt of Equipment When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the Product Service Department, Brooks Instrument, Hatfield, Pennsylvania 19440-0903.
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569). Brooks Instrument 407 W. Vine Street P.O.
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Connection "X"Dim. 1/8"Compression Fitting 4.84 122.9 1/4"Compression Fitting 5.02 127.5 1/4" Tube VCO 4.56 115.8 1/4" Tube VCR 4.88 124.0 3/8"Compression Fitting 5.14 130.5 Figure 2-1 Model 5850i Dimensions 2-5 Installation (Refer to Figures 2-1 through 2-4) Recommended installation procedures: a.
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 1 SETPOINT RETURN 9 2 VOLTAGE SIGNAL OUTPUT 10 SIGNAL OUTPUT RETURN SUPPLY COMMON 3 NOT USED 11 5V REFERENCE OUTPUT 4 CURRENT SIGNAL OUTPUT 12 VALVE OVERRIDE INPUT 5 +15 TO +28 Vdc SUPPLY 13 NOT USED 6 NOT USED 14 CHASSIS GROUND 7 CURRENT SETPOINT INPUT 15 NOT USED 8 VOLTAGE SETPOINT INPUT *JUMPER SELECTABLE NOTE: Cable shield tied to chassis grou
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Figure 2-3 Maximum Allowable Loop Resistance 2-7 Electrical Interfacing To insure proper operation, the 5850i must be connected per Figures 2-2, 2-3 and 2-4 and configured according to Section 2-7. As a minimum, the following connections must be made for new installations: Function Chassis Ground Signal Output Return Voltage or Current Signal Output 22.
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Signal Output The flow signal output can be measured as a voltage and a current simultaneously on two different pins of the D-connector. Pin 2 indicates the flowrate with a 0-5 Vdc signal proportional to the mass flow rate.
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Chassis Ground Connect earth ground to pin 14 of the D-connector. Valve Override (connection optional) The valve override function allows full opening and closing of the valve independent of the setpoint: To open the valve, apply +15 to +28 Vdc to pin 12 To close the valve, connect pin 12 to ground.
Section 2 Installation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Figure 2-6 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) 2-8 Configuring the PC Board NOTE: To obtain access to the jumpers, the electronics cover can must be removed. Disconnect the power to the mass flow controller and any cables to the D-connector and the valve coil connector.
Section 3 Operation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 3-1 Theory of Operation The thermal mass flow sensing technique used in the 5850i works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube.
Section 3 Operation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Figure 3-1 Flow Sensor Operational Diagram Soft Start enabled by moving a jumper on the PC Board. This circuit provides a slow injection of the gas as a protection to the process, particularly those using a volatile or reactive gas. Full gas flow is achieved in approximately 20 seconds. Refer to Section 2-7.
Section 3 Operation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Figure 3-2 Flow Control System Block Diagram 3-3 Zero Adjustment Each 5850i is factory adjusted to provide a zero ±10 mVdc signal or a 4 mAdc ±0.05 mAdc signal at zero flow. The adjustment is made in our calibration laboratory which is temperature controlled to 21.1°C (70°F ±2°F).
Section 3 Operation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 3-4 Calibration Procedure NOTE 1: If the valve has been disassembled and any of the following parts have been replaced, the control valve adjusting procedure in Section 4-4c must be performed before the Model 5850i is calibrated.
Section 3 Operation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i f. Connect the DVM positive lead to TP1 (100x sensor voltage) and the negative lead to TP4 (circuit common). The setpoint should still be set at 100% flow (5.000V). Measure the flow rate using suitable volumetric calibration equipment.
Section 3 Operation Brooks® Model 5850i Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Figure 3-3 Model 5850i Calibration Connections Figure 3-4 Adjustment Potentiometer Location 3-6
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Section 3 Operation Brooks® Model 5850i Figure 3-5 PC Board Jumper Location & Function 3-7
Section 3 Operation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 2. If the error is greater than 0.5% set the command potentiometer for 100% (5.000V). Connect the DVM positive lead to TP2 (linearity voltage) and the negative lead to TP4 (circuit common). Calculate a new TP2 voltage as follows: Example: Controller error = 0.7% Measured TP2 voltage = -0.567 volts TP2 correction = 0.7 x 0.450 = 0.315 volts New TP2 correction = 0.315 + (-0.
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Section 3 Operation Brooks® Model 5850i Figure 3-6 Fast Response Adjustment and 0% flow indicates the adjustment required of the anticipate potentiometer. Refer to Figure 3-6. 1. If the flow signal measured on pin 2 decays to -0.05 to -0.5V, then rises to 0V, the anticipate potentiometer is properly adjusted. 2. If the flow signal decays rapidly and goes below -0.
Section 3 Operation Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-10
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 4-1 General No routine maintenance is required on the Model 5850i other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 4-2 Troubleshooting A. System Checks The 5850i is generally used as a component in gas handling systems which can be quite complex.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Actual flow overshoots setpoint by more than 5% full scale. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-5 . Output stays at zero regardless of setpoint and there is no flow through the controller. Output signal stays at +6.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Figure 4-1 Torque Sequence for the Valve Retainer Plate Sensor Troubleshooting If it is believed the sensor coils are either open or shorted, troubleshoot using Table 4-2. If any of the steps do not produce the expected results, the sensor assembly is defective and must be replaced.
Section 4 Maintenance Brooks® Model 5850i Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Table 4-2 Sensor Troubleshooting 4. Inspect the orifice for clogging by holding it in front of a light source and looking for light through the bore. Clean by soaking in a suitable non-residuous solvent and directing a stream of compressed dry nitrogen through the bore. 5.
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Figure 4-2a Valve Adjusting Spacer Locations (Normally Closed Valve N.C.
Section 4 Maintenance Brooks® Model 5850i 4-6 Figure 4-2b Valve Adjusting Spacer Locations (Normally Open Valve N.O.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 4-3 Sensor Tube The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range. The sensor assembly may be removed or replaced by referring to Section 4-4, Disassembly and Assembly. If the sensor assembly is cleaned and reinstalled, a calibration check should be performed. Refer to Section 3-4.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Figure 4-3 Voltmeter Connections for Valve Adjustment 6. Remove and note the position of the valve spring spacers (10), which may be located above and/or below the lower guide spring (8). Remove the preload spacer spring (33)(NO Valve). 7. Unscrew the orifice (12) from the flow controller body(14). 8.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 10.Unplug the sensor connector from the PC Board. Remove the two screws securing the bracket (24) and PC Board (15). Remove the bracket and PC Board. 11.Remove the two screws (18) and washers (19) securing the sensor assembly (16). Remove the sensor assembly. Note: Do not attempt to disassemble the sensor assembly. 12.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Tighten the assembly until there is no looseness, but do not overtighten. 7. Install the valve plunger assembly (7, 8, 9 and 11)(NC Valve) or (35,31,32,8,9,11)(NO Valve) on the preload spacers (10). Install air gap spacers (10), if used on top of the valve spring. 8.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i and the total travel of the valve. If the air gap is too small, the plunger travel may be insufficient to fully open the valve. Also, the magnetic force may be too high for a given valve coil voltage. If the air gap is too large, the magnetic force will be insufficient to raise the plunger and the valve will not open.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 4-5 Use of the Conversion Tables If a mass flow controller is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relation between the output signal and the mass flow rate. This is due to the difference in heat capacities between the two gases.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME FORMULA Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f-13B1 1,3-Butadiene Butane 1-Butene CIS-2-Butene Trans-2-Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetr
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Table 4-3 Conversion Factors (Nitrogen Base) Continued.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 4-6 Use of Orifice Sizing Nomograph The Orifice and Restrictor Sizes for 5850i should be sized using the "Brooks Thermal Mass Flowmeter Sizing Selection Program" Revision 8.6 or later. A copy can be requested through your local Brooks Sales Representive or through the Brooks Customer Service Department.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Example: What is the air equivalent flow rate of 2000 sccm Hydrogen? In order to calculate the orifice conversion factor when using a gas mixture, the following formula must be used: Where P1 = percentage by volume of gas 1 P2 = percentage by volume of gas 2 Pn = percentage by volume of gas n Example: Find the Air equivalent flow for 20 slpm of a 20% Helium and
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Section 4 Maintenance Brooks® Model 5850i Table 4-4 Model 5850i Orifice Sizing Nomograph 4-17
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Figure 4-4 Example Nomograph If these conditions do not exist, pressure drop equals the inlet pressure minus the outlet pressure. Then Δp = 64.7 - 44.7 = 20 psi Using the nomograph, locate the pressure drop (psi) on the vertical line marked "Δp" (Point A). 4-18 4. Using the nomograph, locate the pressure drop (psi) on the vertical line marked "Dp" (Point A). 5.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i conditions. If this point is between two orifice sizes, select the next largest size orifice to ensure adequate flow. If the orifice selected falls below .0013, choose .0013 size orifice. For this example the .007 size orifice would be selected. 4-7 Restrictor Sizing The restrictor assembly is a ranging device for the sensor portion of the controller.
Section 4 Maintenance Brooks® Model 5850i Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Table 4-5 Model 5850i Standard Restrictors Example: The desired gas is Silane (SiH4). The desired full scale flow rate is 200 sccm Sensor conversion factor is 0.68 from Table 4-3. Air equivalent flow = 200/0.68 = 294.1 sccm air. In the example above, a size P restrictor would be selected.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Sensor conversion factor for the mixture is: Air equivalent flow = 20/.903 = 22.15 slpm air. In this example, a size 4 wire mesh assembly would be selected.
Section 4 Maintenance Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-22
Section 5 Parts List Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i 5-1 General When ordering parts, please specify: Brooks Serial Number Model Number Part Description Part Number Quantity (Refer to Figure 5-1 and Tables 5-1 and 5-2).
Section 5 Parts List Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Table 5-1 Model 5850i Replacement Parts List Item No. 1 2 3 4 5 6 Qty.
Section 5 Parts List Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i Table 5-1 Model 5850i Replacement Parts List (continued) Item No.
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Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Section A CE Certifiction Brooks® Model 5850i Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A CE Certifiction Brooks® Model 5850i Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Section A CE Certifiction Brooks® Model 5850i Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A CE Certifiction Brooks® Model 5850i Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Section A CE Certifiction Brooks® Model 5850i Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A CE Certifiction Brooks® Model 5850i Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5850i-MFC-eng Part Number: 541B108AAG December, 2008 Brooks® Model 5850i LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
