User Manual

4-9
Brooks
®
Model 5850i
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5850i-MFC-eng
Part Number: 541B108AAG
December, 2008
10.Unplug the sensor connector from the PC Board. Remove the two
screws securing the bracket (24) and PC Board (15). Remove the
bracket and PC Board.
11.Remove the two screws (18) and washers (19) securing the sensor
assembly (16). Remove the sensor assembly.
Note: Do not attempt to disassemble the sensor assembly.
12.Remove the sensor assembly O-rings (17) from the flow controller body
(14). Using the Brooks O-ring removal tool will help prevent scratching
the sealing surface.
13.Remove the adapter fittings (27) from the flow controller body (14).
14.Remove the restrictor assembly (21) from the inlet side of the flow
controller body (14) using the restrictor tool (part of service tool kit listed
in Section 5, Table 5-2).
B. ASSEMBLY (Normally Closed)
Note: It is recommended that all O-rings be replaced during controller
assembly. All O-rings should be lightly lubricated with Halocarbon lubricant
(part of O-ring kit, Section 5) prior to their installation.
1. Examine all parts for signs of wear or damage, replace as necessary.
2. Place the restrictor O-ring (22) on the restrictor assembly. Screw the
restrictor assembly (21) into the inlet side of the flow controller body
using the restrictor tool, tighten hand tight.
3. Press the lubricated sensor O-rings (17) into the flow controller body
(14). Install the sensor assembly and secure with two screws (18) and
washers (19) tightened to 15 in/lbs.
4. Install the orifice (12) and its O-ring (13), using a 3/8 nut driver. Insure
that the orifice is fully seated but do not overtighten.
5. Insert the valve preload spacers (10)(NC Valve) or (33)(NO Valve), if
used, into the valve cavity in the flow controller body (14). Use care to
preserve the correct order.
6. Place the spacers (9) and spring (8) on the valve seat (11) in the same
order as noted in step 8 of the disassembly. Screw the valve seat (11)
into the plunger assembly (7)(NC Valve) or (35,31,32)(NO Valve).