User Manual

Brooks

Model 5850i

Contents

Installation and Operation Manual

X -TMF-5850i-MFC-eng

Part Number: 541B108AAG

December, 2008

Section 1

Introduction

Paragraph Page

Number Number

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-3

Section 2

Installation

2-1 Receipt of Equipment ........................................................ 2-1

2-2 Recommended Storage Practice ...................................... 2-1

2-3 Return Shipment ............................................................... 2-2

2-4 Gas Connections............................................................... 2-2

2-5 Installation ......................................................................... 2-3

2-6 In-Line Filter ...................................................................... 2-4

2-7 Electrical Interfacing .......................................................... 2-5

2-8 Configuring the PC Board ................................................. 2-8

Section 3

Operation

3-1 Theory of Operation .......................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-3

3-4 Calibration Procedure........................................................ 3-4

3-5 Response .......................................................................... 3-8

Section 4

Maintenance

4-1 General ............................................................................. 4-1

4-2 Troubleshooting ................................................................. 4-1

4-3 Sensor Tube ...................................................................... 4-6

4-4 Disassembly and Assembly............................................... 4-6

4-5 Use of the Conversion Tables .......................................... 4-10

4-6 Use of Orifice Sizing Nomograph ..................................... 4-11

4-7 Restrictor Sizing ............................................................... 4-15

Section 5

Parts List

5-1 General ............................................................................. 5-1

Section A

CE Certification

CE Certification of Mass Flow Equipment ......................... A-1