Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Model 5851E Mass Flow Meter Model 5851E Mass Flow Controller with Card Edge Connector Model 5851E Mass Flow Controller with D-Connector
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Section 1 Introduction Paragraph Number Page Number Purpose ............................................................................................ 1-1 Description ........................................................................................ 1-1 Specifications....................................................................................
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Figure Number Page Number 1-1 1-2 Command Steps, Soft Start Disabled ............................ 1-2 100% Command Step, Soft Start Enabled ..................... 1-2 2-1 2-2 2-3 2-4 Model 5851E Dimensions .............................................. 2-3 Model 5851E Card Edge Connector Comparison Guide 2-4 Model 5851E Card Edge Connector Hookup Diagram .. 2-5 D-Connector Pin Arrangement ..
Section 1 Introduction Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 1-1 Purpose The Brooks® Model 5851E Flow Controller is a mass flow measurement device designed for accurately measuring and rapidly controlling flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Model 5851E Mass Flow Controller.
Section 1 Introduction Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Figure 1-1 Command Steps, Soft Start Disabled Figure 1-2 0 — 100% Command Step, Soft Start Enabled -VALVE TEST POINT accessed via Terminal D on the Card Edge or Pin 7 on the D-Connector version. This feature allows the user to monitor the control valve voltage during operation. Refer to Section 2-10.
Section 1 Introduction Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 1-33 Specifications WARNING Do not operate this instrument in excess of the specifications listed below. Failure to heed this warning can result in serious personal injury and/or damage to the equipment. Standard Ranges Any full scale flowrate from 10 slpm to 100 slpm* (Nitrogen equivalent), up to 200 slpm Hydrogen.
Section 1 Introduction Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Mounting Attitude Sensitivity ±0.5% maximum full scale deviation after re-zeroing Command Input 0-5 Vdc. Input resistance 200 k ohm Leak Integrity 1 x 10-9 Atm. scc/sec Helium Control Range 50 to 1 Mechanical Connection Refer to Figure 2-1 Electrical Connection Card Edge, 20 terminals, gold over low stress nickel plated copper.
Section 2 Installation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 2-1 Receipt of Equipment When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the Product Service Department, Brooks Instrument, Hatfield, Pennsylvania 19440-0903.
Section 2 Installation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569). Brooks Instrument 407 W. Vine Street P.O.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 2 Installation Brooks® Model 5851E Recommended installation procedures: a. The Model 5850E should be located in a clean dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to the electrical components. c. Install in such a manner that permits easy removal if the instrument requires cleaning. d. The Model 5850E Mass Flow Controller can be installed in any position.
Section 2 Installation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 2-6 In-Line Filter It is recommended that an in-line filter be installed upstream from the controller to prevent the possibility of any foreign material entering the flow sensor or control valve. The filtering element should be periodically replaced or ultrasonically cleaned.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 2 Installation Brooks® Model 5851E Inches/ Millimeters Figure 2-1 Model 5851E Dimensions 2-5
Section 2 Installation Brooks® Model 5851E 2-6 Figure 2-2 Model 5851E Card Edge Connector Comparison Guide Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008
Section 2 Installation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Figure 2-3 Model 5851E Card Edge Connector Hookup Diagram PIN NO. FUNCTION 1 Cmd. Common (Command Pot "CCW") 2 0-5 Volt Signal Output 3 N/C 4 Valve Off 5 +15 Vdc Supply 6 -15 Vdc Supply 7 Valve Test Point 8 Cmd. Input or Cmd.
Section 2 Installation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 2-7 Soft Start Refer to Figures 3-3, 3-4. To enable soft start, place the jumper on the controller printed circuit board at J2 in the right hand (ss) position. To disable soft start, place the jumper on the controller printed circuit board at J2 in the left hand (n) position.
Section 2 Installation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E desired set point. The control circuitry is reverse acting, e.g. for an increase in transducer output the flow will correspondingly be decreased. 2-11 Valve Test Point Refer to Figures 2-2, 2-3, and 2-4. The valve voltage can be monitored on Pin D of the Card Edge version and Pin 7 of the D-Connector version.
Section 2 Installation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-10
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 3-1 Theory of Operation The thermal mass flow sensing technique used in the Model 5851E works as follows:A precision power supply provides a constant power heat input (P) to the heater, which is located at the midpoint of the sensor tube. Refer to Figure 3-1. At zero, or no flow conditions the heat reaching each temperature sensor is equal.
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Figure 3-1 Flow Sensor Operational Diagram • Soft Start Enabled by moving a jumper on the PC board. Provides a slow injection of gas as a protection to the process, particularly those using a volatile or reactive gas. Full gas flow is achieved in approximately 15 seconds. Refer to Section 2-6.
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Figure 3-2 Flow Control System Block Diagram • Remote Transducer Input Accessed via Terminal 5 on the Card Edge or Pin 15 on the D-Connector version. This feature allows the use of the integral control electronics and valve with the signal from an external 0-5 Vdc signal. The mass flow signal from the Model 5851E is still available for process monitoring.
Section 3 Operation Brooks® Model 5851E Figure 3-3 Card Edge PC Board Jumper Location & Function 3-4 Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 3 Operation Brooks® Model 5851E Figure 3-4 D-Connector PC Board Jumper Location & Function 3-5
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E To check zero always mount the controller in its final configuration and allow a minimum of 20 minutes for the temperature of the controller and its environment to stabilize. Using a suitable voltmeter check the controller output signal. If it differs from the factory setting adjust it by removing the lower pot hold plug, which is located closest to the controller body.
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Figure 3-5 Model 5851E Calibration Connections c. Connect the DVM positive lead to the 0-5 V signal output (Terminal 3 Card Edge, Pin 2 D-Connector) and the negative lead to signal common (TP4). Adjust the zero potentiometer for an output of 0 mV ±2 mV. d. Apply pressure to the system and insure that the zero signal repeats within 2 mV of the voltage set in Step c above.
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E TP4 Figure 3-6 Adjustment Potentiometer Location Adjust the span potentiometer until the voltage at TP1 is equal to the value calculated above. Recheck the flow rate after the flow is stable (at least 2 minutes). Repeat this check and adjustment procedure until the measured flow rate is within 1% of the desired flow rate.
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Example; What is the percent of full scale error when full scale is equal to 100 slpm? Measured flow rate = 48.5 slpm Desired flow rate = 50.0 slpm (48.5 - 50) Full scale error = 100 = -1.5% 100 i. Calculate the TP2 correction voltage: (error recorded in Step h) x 0.450 Volts Example: Error = -1.5% TP2 correction voltage = -1.5 x 0.450 = -0.
Section 3 Operation Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 flow controller is not critical to overall system performance. No. 2 describes a method that will allow adjustment of your Model 5851E mass flow controller to optimum step response performance. This method is the preferred way to adjust the step response. Adjustment of the fast response circuit will not affect the accuracy of the flow controller as adjusted in Section 3-4.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 3 Operation Brooks® Model 5851E Figure 3-7 Fast Response Adjustment 3-11
Section 3 Operation Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK 3-12
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 4 Maintenance Brooks® Model 5851E 4-1 General No routine maintenance is required on the Model 5851E. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 4-2 Troubleshooting CAUTION The end block screws (31) and the valve screws (3) are not interchangeable. The end block screws are stronger and are needed to achieve the pressure rating.
Section 4 Maintenance Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 2. Verify that the process gas connections have been correctly terminated and leak-checked. 3. If the mass flow controller appears to be functioning but cannot achieve setpoint, verify that sufficient inlet pressure and pressure drop are available at the controller to provide the required flow. 4.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 4 Maintenance Brooks® Model 5851E Table 4-1 Bench Troubleshooting Note: Do not attempt to disassemble the sensor. D. Cleaning No routine external cleaning is required for Brooks Thermal Mass Flow Controller. Should the Model 5851E require cleaning due to deposition, use the following procedures: 1. Remove the unit from the system. 2. Refer to Section 4-4 to disassemble the controller.
Section 4 Maintenance Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Table 4-2 Sensor Troubleshooting CAUTION Do not ground Terminal 10 when 5 Volt reference output is enabled. Irreparable damage to the PC Board may result. 3. Use a hemostat or tweezers to push a 0.007" dia. piano wire through the flow sensor tube to remove any contamination.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 4 Maintenance Brooks® Model 5851E 4. Inspect the orifice for clogging by holding it in front of a light source and looking for light through the bore. Clean by soaking in a suitable nonresiduous solvent and directing a stream of compressed clean, dry Nitrogen through the bore. 5.
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E CAUTION When performing the following procedure the valve stem must be removed without cocking it to prevent damage to the valve spring. 4. Carefully remove the valve stem assembly (6). 5. Remove the plunger assembly (7, 8, 9, 11). 6. Remove and note the position of the valve spring spacers (10), which may be located above and/or below the lower valve spring (8). 7.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 4 Maintenance Brooks® Model 5851E Figure 4-1 Torque Sequence for the Valve Retainer Plate Note: It is recommended that all O-rings be replaced during controller assembly. All O-rings should be lightly lubricated with Halocarbon lubricant (part of O-ring kit, Section 5) prior to their installation. 1. Examine all parts for signs of wear or damage, replace as necessary. 2.
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E 9. Install the coil assembly (2) over the valve stem assembly (6) and secure with jam nut (1). 10.Install the printed circuit (PC) board (15), secure with the bracket (24) and two screws. Plug the connector from the sensor assembly onto the PC Board. The flow arrow on the connector should be pointing toward the valve assembly. 11.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Figure 4-2 Valve Adjusting Spacer Locations Section 4 Maintenance Brooks® Model 5851E 4-9
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E d. e. f. g. h. Section 4-4A. Note the number, locations and thickness of all spacers (9 and 10). Decrease the preload of the valve by 0.005 inches by either removing a 0.005 inches small preload spacer or by adding a 0.005 inches large preload spacer. Refer to Figure 4-2. Reassemble the valve following the assembly procedure in Section 4-4A.
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Note: Due to possible heat capacity and density differences between the test gas and actual process gas for which the MFC was sized, it may be necessary to increase the inlet pressure to obtain proper control at 100% flow. i. Measure the valve voltage by connecting a voltmeter between Test Point 3 (TP3) and Test Point 4 (TP4). Refer to Figure 4-3. Valve Voltage = 1.
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME 4-12 Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f-13B1 1,3-Butadiene Butane 1-Butene CIS-2-Butene Trans-2-Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetraflu
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Table 4-3 Conversion Factors (Nitrogen Base) (continued) GAS NAME Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide Iodine Pentafluoride Isobutane Isobutene Isopentane Krypton Methane Methylacetylene Methyl Bromide 3-Methyl-1-butene Methyl Chloride Methyl Fluoride Methyl Mercaptan Methyl Silan
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume. The desired full scale flow rate of the mixture is 20 slpm. Sensor conversion factor for the mixture is: Mixture Factor = 100 = 0.945 20 80 + 1.386 0.876 Nitrogen equivalent flow = 20/.945 = 21.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 4 Maintenance Brooks® Model 5851E Table 4-4 Orifice Sizing Nomograph 4-15
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Where: QNITROGEN = Nitrogen equivalent flow rate (sccm) QGAS = Desired flow rate of the gas (sccm) NITROGEN = Density of Nitrogen at 70°F GAS = Density of the gas (taken at customer temperature) SGGAS = Specific gravity of the gas (taken at customer temperature) Refer to Table 4-3 for densities. Example: Qgas = 2,000 sccm gas .
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Outlet Pressure — 30 psig + 14.7 = 44.7 psia Inlet Pressure — 50 psig + 14.7 = 64.7 psia 3.
Section 4 Maintenance Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 5. Locate the Nitrogen equivalent flow rate (sccm Nitrogen) on the vertical line marked "QNitrogen" (Point B). 6. Draw a line connecting Δp and QNitrogen and extend it to the baseline. Mark this point (Point C). 7. Locate inlet pressure (psia) on the vertical line marked "Pin" (Point D). 8.
Section 4 Maintenance Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Example: The desired gas is Silane (SiH4) The desired full scale flow rate is 200 sccm. Sensor conversion factor is 0.625 from Table 4-3. Nitrogen equivalent flow = 200/0.625 = 320 sccm Nitrogen In the example above, the restrictor should be sized for a 320 sccm flow rate.
Section 4 Maintenance Brooks® Model 5851E Figure 4-5 Restrictor Element Assembly Figure 4-6 Restrictor Element Orientation in Controller Body 4-20 Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section 5 Parts List Brooks® Model 5851E 4-1 General When ordering parts, please specify: Brooks serial number, model number, part description, part number, and quantity. (Refer to Figure 5-1 and Table 5-1 and 5-2).
Section 5 Parts List Brooks® Model 5851E 5-2 Figure 5-1 Model 5851E Parts Drawing Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008
Section 5 Parts List Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Table 5-1 Model 5851E Replacement Parts List Item Qty. Description No. 1 1 Jam Nut 2 1 Coil Assembly 3 4 Screw, Valve 4 1 Retaining Plate 5 1 O-ring, Valve Stem, Size 016 6 1 Valve Stem, High Flow 6A 1 Valve Plug 6B 1 Valve Ring 6C 1 Valve O-ring 7 1 Valve Plunger Assy., High Flow 8 1 Lower Guide Spring 9 AR Small Valve Spacer, 0.005" Thick 9 AR Small Valve Spacer, 0.
Section 5 Parts List Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E Table 5-1 Model 5851E Replacement Parts List (Continued) Item Qty. Description No.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section A CE Certification Brooks® Model 5851E Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A CE Certification Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section A CE Certification Brooks® Model 5851E Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A CE Certification Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Section A CE Certification Brooks® Model 5851E Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A CE Certification Brooks® Model 5851E Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5851E-MFC-eng Part Number: 541B104AAG November, 2008 Brooks® Model 5851E LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
