Owner manual

Brooks
®
Model 5851E
5-3
Section 5 Parts List
Installation and Operation Manual
X-TMF-5851E-MFC-eng
Part Number: 541B104AAG
November, 2008
Item Qty. Description Part Number
No.
1 1 Jam Nut 573B027ACK
2 1 Coil Assembly S185Z271AAA
3 4 Screw, Valve 751C322AWA
4 1 Retaining Plate 715Z169CZ%
5 1 O-ring, Valve Stem, Size 016 375B016***
6 1 Valve Stem, High Flow S949Z203QOA
6A 1 Valve Plug 953Z068BMT
6B 1 Valve Ring 763Z064***
6C 1 Valve O-ring 375B016***
7 1 Valve Plunger Assy., High Flow S622Z165AAA
8 1 Lower Guide Spring 820Z083BMA
9 AR Small Valve Spacer, 0.005" Thick 810A362BMA
9 AR Small Valve Spacer, 0.010" Thick 810A363BMA
10 AR Large Valve Spacer, 0.005" Thick 810A368BMA
10 AR Large Valve Spacer, 0.010" Thick 810A361BMA
Valve Seat with Viton Insert S715Z051AAG
11 1 Valve Seat with Buna Insert S715Z050AAG
Valve Seat with Kalrez Insert S715Z163AAA
Valve Seat Solid 316 Stainless Steel 715Z181BNT
Stainless
ID 0.0040 577Z275BMT
ID 0.0067 577Z277BMT
ID 0.0091 577Z280BMT
ID 0.0120 577Z283BMT
ID 0.0160 577Z286BMT
ID 0.0210 577Z289BMT
12 1 Orifice ID 0.0260 577Z293BMT
ID 0.0310 577Z296BMT
ID 0.0360 577Z300BMT
ID 0.0410 577Z305BMT
ID 0.0465 577Z308BMT
ID 0.0550 577Z310BMT
(Refer to Section 4-6 ID 0.0635 577Z312BMT
for sizing) ID 0.0700 577Z314BMT
ID 0.0760 577Z316BMT
ID 0.0820 577Z319BMT
ID 0.0935 577Z322BMT
ID 0.1065 577Z328BMT
ID 0.1200 577Z333BMT
ID 0.1405 577C336BMT
13 1 O-ring, Orifice, Size 011 375B011***
14 1 Controller Body w/ Weld Studs S854Z157BMA
15 1 PC Board Assembly (Card Edge) S097Y824AAA
(D-Connector) S097Y847AAA
16 1 Sensor Assembly S774Z607AAA
17 2 O-ring, Sensor, Size 004 375B004***
18 2 Allen Nut, Sensor-Body 573Q103ACZ
19 2 Lock Washer, Sensor 962D005AWA
20 5 Screw, Sensor-PC Board-Cover 753L056AWZ
21 1 Restrictor Assembly and Components
(Refer to Section 4-7 for sizing)
22 1 O-ring, Restrictor, Size 026 375B026***
23 1 Electronics Cover Can (Card Edge) 219Z389EA%
(D-Connector) 219Z390EA%
23A 1 Cover Plate (D-Con. Version Only) 852Z209EA%
24 1 PC Board Mounting Bracket 079Z135EAA
25 1 Centrating Ring (Card Edge Only) 106D073MDQ
106D072MDQ
26 2 Pot Hole Plug 620Z434SXA
***QTA = Viton, SUA = Buna, TTA = Kalrez, AR = As Required, NS = Not Shown
Table 5-1 Model 5851E Replacement Parts List