Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Model 5860E Mass Flow Meter Brooks® Model 5860E
Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E THIS PAGE WAS INTENTIONALLY LEFT BLANK
Contents Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Section 1 Introduction Paragraph Page Number Number 1-1 Purpose ............................................................................. 1-1 1-2 Description ........................................................................ 1-1 1-3 Specifications .................................................................... 1-2 2-1 Receipt of Equipment ....................
Contents Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Figures Figure Page Number Number 1-1 Typical Response to Flow Step Changes ........................... 1-2 2-1 Model 5860E Dimensions .................................................. 2-3 2-2 "D" Type Connector Pin Arrangement ................................ 2-3 3-1 Flow Sensor Operational Diagram .....................................
Section 1 Introduction Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 1-1 Purpose The Brooks® Model 5860E Flow Meter is a mass flow measurement device designed for accurately measuring flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5860E Mass Flow Meter.
Section 1 Introduction Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Figure 1-1 Typical Response to Flow Step Changes 1-3 Specifications Flow Ranges Any full scale flowrate from 3 sccm to 30 slpm, N2 *Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials Institute) standard: 0° C and 101.3 kPa (760 Torr). Ratings Maximum Operating pressure: 4500 psi (31.
Section 1 Introduction Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Response Time Less than 3 seconds response to within 2% of full scale final value for a 0 to 100% command step. Control / Usable Range 50 to 1 Sensitivity to Mounting Attitude ±0.5% F.S. maximum deviation from specified accuracy after re-zeroing under 200 psig. Temperature Sensitivity Zero: Less than ±0.075% F.S. per degree C Span: Less than ±1.0% F.S.
Section 1 Introduction Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E THIS PAGE WAS INTENTIONALLY LEFT BLANK 1-4
Section 2 Installation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 2-1 Receipt of Equipment When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the Product Service Department, Brooks Instrument, Hatfield, Pennsylvania 19440-0903.
Section 2 Installation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569). Brooks Instrument 407 W. Vine Street P.O.
Section 2 Installation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E INCHES/MILLIMETERS Connection "X"Dim. 1/4"Compression Fitting 4.32 109.7 1/4" Tube VCO 3.86 98.0 1/4" Tube VCR 4.18 106.2 3/8"Compression Fitting 4.44 112.8 Figure 2-1 Model 5860E Dimensions PIN NO. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 FUNCTION Cmd.
Section 2 Installation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Recommended installation procedures: a. The Model 5860E should be located in a clean dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to the electrical components. c. Install in such a manner that permits easy removal if the instrument requires cleaning.
Section 2 Installation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 2-7 Electrical Interfacing To insure proper operation, the Model 5860E must be connected per Figure 2-2. Note: There are several functions on the printed circuit board which are not used by the Model 5860E. Avoid making connections marked in Figure 2-2 which are marked •.
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Section 3 Operation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 3-1 Theory of Operation The thermal mass flow sensing technique used in the 5860E works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube.
Section 3 Operation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Figure 3-1 Flow Sensor Operational Diagram 3-2 Operating Procedure a. Apply power to the flowmeter and allow approximately 45 minutes for the instrument to warm-up and stabilize its temperature. b. Turn on the gas supply. c. Shut-off flow to the meter and observe the flowmeter's output signal.
Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Section 3 Operation Brooks® Model 5860E 3-4 Calibration Procedure NOTE 1: Calibration of the Model 5860E mass flowmeter requires the use of a digital voltmeter (DVM) a flow control valve or mass flow controller to set the flow rate and a precision flow standard calibrator such as the Brooks Vol-U-Meter®. It is recommended that the calibration be performed only by trained and qualified service personnel.
Section 3 Operation Brooks® Model 5860E Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Figure 3-2 Model 5860E Calibration Connections Figure 3-3 Adjustment Potentiometer Location 3-4 Figure 3-4 Fast Response Adjustment
Section 3 Operation Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Example: What is the percent of full scale error when full scale is equal to 100 sccm? Measured flow rate = 50.0 sccm Indicated flow rate = 48.5 sccm h. Calculate the TP2 correction voltage: (error recorded in step g) x 0.450 volts Example: Error = -1.5% TP2 correction voltage = -1.5 x 0.450 = -0.675 volts New TP2 voltage = 0 volts + (-0.675) = -0.675 volts i.
Section 3 Operation Brooks® Model 5860E Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 3-5 Response (Flow Output Signal) To achieve the proper response characteristics the response compensation circuit must be adjusted. This adjustment is performed by observing the output signal of the meter when the flow is suddenly stopped. Place a metering valve upstream of the Model 5860E to control the flow rate.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 4-1 General No routine maintenance is required on the Model 5860E other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 4-2 Troubleshooting A. System Checks The Model 5860E is generally used as a component in gas handling systems which can be quite complex.
Section 4 Maintenance Brooks® Model 5860E Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Output stays at 0 Volts regardless of flow. Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-4. Output signal stays at +6.8V and there is no flow through the meter. Defective PC Board. Replace PC Board. Refer to Section 4-4. Defective Sensor.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Table 4-1 lists possible malfunctions which may be encountered during bench troubleshooting. C. Sensor Troubleshooting If it is believed the sensor coils are either open or shorted, troubleshoot using Table 4-2. If any of the steps do not produce the expected results the sensor assembly is defective and must be replaced.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 4-3 Sensor Tube The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range. The sensor assembly may be removed or replaced by referring to Section 4-4, Disassembly and Assembly. If the sensor assembly is cleaned and reinstalled, a calibration check should be performed. Refer to Section 3-4.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E B. Assembly Note: It is recommended that all O-rings be replaced during flowmeter assembly. All O-rings should be lightly lubricated with Halocarbon lubricant (part of O-ring kit, Section 5) prior to their installation. 1. Examine all parts for signs of wear or damage, replace as necessary. 2. Place the restrictor O-ring on the restrictor assembly.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 4-5 Use of the Conversion Tables If a mass flowmeter is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relationship between the output signal and the mass flow rate. This is due to the difference in heat capacities between the two gases.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Table 4-3 Conversion Factors (Nitrogen Base) Ref. No. J836D508.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Table 4-3 Conversion Factors (Nitrogen Base) Ref. No. J836D508 Continued.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 4-6 Restrictor Sizing The restrictor assembly is a ranging device for the sensor portion of the flowmeter. It creates a pressure drop which is linear with flow rate. This diverts a sample quantity of the process gas flow through the sensor. Each restrictor maintains the ratio of sensor flow to restrictor flow, however the total flow through each restrictor is different.
Section 4 Maintenance Brooks® Model 5860E Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Example: The desired gas is Silane (SiH4). The desired full scale flow rate is 200 sccm. Sensor conversion factor is 0.68 from Table 4-3. Air equivalent flow = 200/0.68 = 294.1 sccm air. In the example above a size P restrictor would be selected. Both the sintered metal and ACLFE are available for this size.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Table 4-4 Model 5860E Standard Restrictors Size D E F G H J K L M N P Q R S T U V W X Y 1 2 3 4 Range sccm Air Equivalent Flow Low High 8.022 11.36 11.23 15.90 15.72 22.26 22.01 31.17 30.82 43.64 43.14 61.09 60.40 85.53 84.56 119.7 118.4 167.6 165.7 234.7 232.0 328.6 324.8 460.0 454.8 644.0 636.7 901.6 891.4 1262. 1248. 1767. 1747. 2474. 2446. 3464. 3424. 4849. 4794.
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Section 5 Parts List Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E 5-1 General When ordering parts, please specify: Brooks Serial Number Model Number Part Description Part Number Quantity (Refer to Figure 5-1 and Tables 5-1 and 5-2).
Section 5 Parts List Brooks® Model 5860E 5-2 Figure 5-1 Model 5860E Parts Drawing Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008
Section 5 Parts List Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E Table 5-1 Model 5860E Replacement Parts List Item No. 1 2 3 4 5 6 7 8 9 Qty.
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Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Section A CE Certification Brooks® Model 5860E Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A CE Certification Brooks® Model 5860E Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Section A CE Certification Brooks® Model 5860E Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A CE Certification Brooks® Model 5860E Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Section A CE Certification Brooks® Model 5860E Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A CE Certification Brooks® Model 5860E Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
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Installation and Operation Manual X-TMF-5860E-MFM-eng Part Number: 541B106AAG November, 2008 Brooks® Model 5860E LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
