Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Mass Flowmeter Model 5861E
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Paragraph Number Contents Model 5861E Page Number Section 1 Introduction 1-1 Purpose ...................................................................................................................................... 1-1 1-2 Description ................................................................................................................................. 1-1 1-3 Specifications ......................
Contents Model 5861E Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Figures Figure Page Number Number 2-1 Model 5861E Dimensions ........................................................................................................... 2-3 2-2 "D" Type Connector Pin Arrangement ......................................................................................... 2-3 3-1 Flow Sensor Operational Diagram .....................................................
Section 1 Introduction Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E 1-1 Purpose The Brooks® Model 5861E Flowmeter is a mass flow measurement device designed for accurately measuring flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5861E Mass Flowmeter.
Section 1 Introduction Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Control / Usable Range 50 to 1 Sensitivity to Mounting Attitude ±0.5% F.S. maximum deviation from specified accuracy after rezeroing under 200 psig Temperature Sensitivity Zero: Less than ±0.075% F.S. per degree C Span: Less than ±1.0% F.S. shift from original calibration over 10-50°C range Pressure Sensitivity 0.03% per PSI up to 200 PSIG Power Supply Sensitivity ±0.
Installation and Operation Manual Section 2 Installation X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E 2-1 Receipt of Equipment When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the Product Service Department, Brooks Instrument, Hatfield, Pennsylvania 19440-0903.
Installation and Operation Manual Section 2 Installation X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569). Brooks Instrument 407 W. Vine Street P.O.
Installation and Operation Manual Section 2 Installation X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Figure 2-1 Model 5861E Dimensions PIN NO. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 FUNCTION Cmd. Common (Command Pot "CCW") • 0-5 Volt Signal Output Supply Common Valve Off • +15 Vdc Supply -15 Vdc Supply Valve Test Point/Purge • Cmd. Input or Cmd.
Installation and Operation Manual Section 2 Installation X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Recommended installation procedures: a. The Model 5861E should be located in a clean dry atmosphere relatively free from shock and vibration. b. Leave sufficient room for access to the electrical components. c. Install in such a manner that permits easy removal if the instrument requires cleaning.
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Section 2 Installation Model 5861E 2-7 Electrical Interfacing To insure proper operation the Model 5861E must be connected as shown in Figure 2-2. Note: There are several functions on the printed circuit board which are not used by the Model 5861E. Avoid making connections marked in Figure 2-2 which are marked •.
Installation and Operation Manual Section 2 Installation X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-6
Installation and Operation Manual Section 3 Operation X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E 3-1 Theory of Operation The thermal mass flow sensing technique used in the 5861E works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube.
Section 3 Operation Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Figure 3-1 Flow Sensor Operational Diagram 3-2 Operating Procedure a. Apply power to the flowmeter and allow approximately 45 minutes for the instrument to warm-up and stabilize its temperature. b. Turn on the gas supply. c. Shut-off flow to the meter and observe the flowmeter's output signal.
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Section 3 Operation Model 5861E To check zero always mount the controller in its final configuration and allow a minimum of 20 minutes for the temperature of the controller and its environment to stabilize. Using a suitable voltmeter check the controller output signal. If it differs from the factory setting adjust it by removing the lower pot hold plug, which is located closest to the controller body.
Section 3 Operation Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Figure 3-2 Model 5861E Calibration Connections * *Note: Not used for a 5861E Figure 3-3 Adjustment Potentiometer Location 3-4 Figure 3-4 Fast Response Adjustment
Installation and Operation Manual Section 3 Operation X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E f. Shut off the flow. Connect the DVM positive lead to flow signal output (pin 2 D-connector) and the negative lead to TP4. Readjust the zero potentiometer for an output of 0mV±2mV as necessary. g. Adjust flow rate for a flow signal output of 50% (2.500V) and measure the flow rate. Calculate the error as a percentage of full scale.
Section 3 Operation Model 5861E Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 3. Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat step k. Note: The voltage at TP2 can range from -10 to +3 volts, however, it is recommended that this voltage stay between -2.5 and +2.5 volts for proper operation. If the recommended voltage range is exceeded the desired accuracy and/or signal stability may not be achieved.
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Section 4 Maintenance Model 5861E 4-1 General No routine maintenance is required on the Model 5861E other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 2. Connect the instrument to a source of the same gas used for it's original calibration.
Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Output stays at 0 Volts regardless of flow. Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-4. Output signal stays at +6.8V and there is no flow through the meter. Defective PC Board. Replace PC Board. Refer to Section 4-4. Defective Sensor. Replace Sensor Assembly.
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Section 4 Maintenance Model 5861E A. System Checks The Model 5861E is generally used as a component in gas handling systems which can be quite complex. This can make the task of isolating a malfunction in the system a difficult one. An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime.
Section 4 Maintenance Model 5861E Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 sensor assembly is defective and must be replaced. Refer to Section 4-4 for the disassembly and assembly procedures to use when replacing the sensor. Note: Do not attempt to disassemble the sensor. Cleaning Procedures Should the Model 5861E Mass Flowmeter require cleaning due to deposition, use the following procedures: 1. Remove the unit from the system. 2.
Installation and Operation Manual Section 4 Maintenance X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E 4-4 Disassembly and Assembly The Model 5861E Mass Flowmeter may be disassembled in the field by user for cleaning, re-ranging or servicing. Disassemble and assemble the meter as fllows: Note: the model 5861E Mass Flowmeter should be disassembled and assembled in a clean enviromentto prevent particulate contamination. A.
Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E B. Assembly Note: It is recommended that all O-rings be replaced during meter assembly. All O-rings should be lightly lubricated with Fomblin grease, (part of O-ring kit, Section 5) prior to their installation. 1. Examine all parts for signs of wear or damage, replace as necessary. 2. Place the restrictor O-ring(35) onto the Header plate of the restrictor assembly (37). 3.
Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E 4-5 Use of the Conversion Tables If a mass flowmeter is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relationship between the output signal and the mass flow rate. This is due to the difference in heat capacities between the two gases.
Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME 4-8 FORMULA SENSOR FACTOR ORIFICE FACTOR DENSITY (kg/m3) Acetylene Air Allene Ammonia Argon Arsine C2H2 Mixture C3H4 NH3 Ar AsH3 0.615 0.998 0.478 0.786 1.395 0.754 0.970 1.018 1.199 0.781 1.195 1.661 1.173 1.293 1.787 0.771 1.784 3.
Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Table 4-3 Conversion Factors (Nitrogen Base) Continued GAS NAME FORMULA Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide Iodine Pentafluoride Isobutane Isobutene Isopentane Krypton Methane Methylacetylene Methyl Bromide 3-Methyl-1-butene Methyl Chloride Methyl Fluoride Methyl Mercaptan Methyl Silan
Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E It is generally accepted that the mass flow rate derived from this equation is only accurate to ±5%. The sensor conversion factors given in Table 4-3 are calculated based on a gas temperature of 21°C and a pressure of one atmosphere.
Installation and Operation Manual Section 4 Maintenance X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Example: The desired gas is cyanogen The desired full scale flow rate is 30 slpm. Sensor conversion factor is 0.498 from Table 4-3. Nitrogen equivalent flow = 30/0.498 = 60.24 sccm Table 4-4 Restrictor Selection Guide Based on 00C Standard Reference Temperature **For Hydrogen from 130slpm to 200 slpm use 3-60 micron restrictor elements.
Section 4 Maintenance Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Figure 4-1 Restrictor Element Assembly 4-12 Figure 4-2 Restrictor Element Orientation in Meter Body
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Section 5 Parts List Model 5861E 5-1 General When ordering parts, please specify: Brooks Serial Number Model Number Part Description Part Number Quantity (Refer to Figure 5-1 and Tables 5-1 and 5-2).
Section 5 Parts List Model 5861E Figure 5-1 Model 5861E Parts Drawing 5-2 Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008
Section 5 Parts List Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E Table 5-1 Model 5861E Replacement Parts List Item No. 1 3 5 6 7 8 9 10 11 19 26 27 28 35 Qty. 1 1 Description Body and Stud Weldment Endblock and Screen Weldment Part Number S-854-Z-165-BMA S-079-Z-200-AAA 4 1 1 1 1 Soc. Hd.
Section 5 Parts List Model 5861E Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Table 5-2 Tool and Spare Part Kits for Model 5861E 5850 Series Service Tool Kit P/N S-778-D-017-AAA 5850/5860 Series Break Out Board Assembly P/N S-273-Z-668-AAA for D Connector version Permits the complete disassembly of the Model 5861E for servicing. Installs directly between mass flow sensor/ controller and interconnecting cable.
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Section A CE Certification Model 5861E Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A CE Certification Model 5861E Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Section A CE Certification Model 5861E Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A CE Certification Model 5861E Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual Section A CE Certification X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A CE Certification Model 5861E Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
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Installation and Operation Manual X-TMF-5861E-MFM-eng Part Number: 541B107AAG November, 2008 Model 5861E LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
