Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s Brooks® Flomega, Liquid MFC’s/MFM’s Model 5881/5891 and 5882/5892 1
Installation and Operation Manual Flomega, Liquid MFC’s/MFM’s X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 WARNING ! This publication must be read in its entirety before performing any operation. Failure to understand and follow these instructions could result in serious personal injury and/or damage to the equipment. Should this equipment require repair or adjustment, contact the nearest Brooks Sales & Repair Office. It is important that servicing is performed by trained and qualified personnel only.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s CAUTION This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling: procedures must be observed during the removal, installation or other handling of internal circuit boards or devices. Handling procedure: 1. Power to unit must be removed. 2.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Contents Flomega, Liquid MFC’s/MFM’s Paragraph Number Page Number Section 1 1-1 1-2 1-3 Introduction ............................................................................................................... 7 Purpose ............................................................................................................... 7 Description .............................................................................
Contents Installation and Operation Manual Flomega, Liquid MFC’s/MFM’s Figure Number X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Page Number 1-1 2-1 2-2 2-3 2-4 3-1 3-2 3-3 3-4 3-5 5-1 Dimensions .................................................................................................................................... Standard and EEx nA execution .................................................................................................... Pin Function ................................
Installation and Operation Manual Section 1 Introduction X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 1-1 Flomega, Liquid MFC’s/MFM’s Purpose The Brooks models 5881/5882 Flow Controllers are a mass flow measurement devices designed for accu rately measuring and controlling flows of liquids. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5881/5882 Mass Flow Controllers and 5891/5892 Flow Meters.
Section 1 Introduction Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s Specification Flowranges Brooks FLOMEGA TM Models * ** Min. full scale Flowrate* Max. full scale Flowrate* Units PED Module Category 5881/91 15** 100 gr/hour S.E.P. 5882/92 200 1000 gr/hour S.E.P. To be specified at ordering (factory selectable) (water equivalent flowranges) Down to 15 gr/hour minimum full scale is possible @ ± 1% f.s. accuracy and ± 0,4% f.s.
Installation and Operation Manual Section 1 Introduction X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s When EEx d IIB T4...T6 required, please contact factory for detailed dimensional drawing.
Section 2 Installation Installation and Operation Manual Flomega, Liquid MFC’s/MFM’s 2-1 X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 General This section contains the procedures for the receipt and installation of the instrument. See Section 1 for dimensional and connection requirements. Do not attempt to start the system until the instrument has been permanently installed. It is important that the start-up procedures be followed in the exact sequence presented.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 2-4 Section 2 Installation Flomega, Liquid MFC’s/MFM’s Return Shipment Prior to returning any instrument to the factory visit the Brooks website www.BrooksInstrument.com for a Return Materials Authorization Number (RMA#), or contact one of the following locations: Brooks Instrument 407 W. Vine Street P.O.
Section 2 Installation Installation and Operation Manual Flomega, Liquid MFC’s/MFM’s 2-7 X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 In-line Filter An in-line type 40 micron filter has been installed upstream from the flow sensor to prevent the possibility of any foreign material entering the flow sensor or control valve. 2-8 Connections Standard, the Flomega models are supplied with adapters. Inlet and outlet thread size is 5/16”-24 UNF. Optional adapters can be supplied.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 2 Installation Flomega, Liquid MFC’s/MFM’s Pin Function 1 Command Common 2 Signal output voltage 3 Valve Common 4 Current output 5 +15 Vdc to +24 Vdc supply 6 7 Valve voltage tp. 8 Command 9 Supply common 10 Signal common 11 Ref. output 12 Valve override Figure 2-1 Standard and EEx nA execution Figure 2-2 Figure 2-3, EEx d.
Installation and Operation Manual Section 2 Installation Flomega, Liquid MFC’s/MFM’s 2-12 X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Installation The Brooks (electrical/electronic) equipment bearing the CE mark has been succesfully tested to the regulations of the Electro Magnetic Compatability (EMC directive 89/336/EEC). Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 2 Installation Flomega, Liquid MFC’s/MFM’s Note: The control valve in the 5881/5882 provides precision control. If positive shut-off is required, it is recommended a separate shut-off valve be installed in-line. f. The controller body is machined to accept 5/16”-24, threaded inlet and outlet fittings. Make sure that the proper o-ring size (902) and material is used when securing the fittings.
Section 3 Theory of Operation Flomega, Liquid MFC’s/MFM’s 3-1 Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Theory of Operation (refer to figures 3-1 and 3-2) Figure 3-1 Measurement Principle 5891 FLOMEGA A new thermal measurement principle is used in our Flomega. The patented thru-flow sensor is especially designed for liquids and is different from the traditional Brooks 5850 series “thermal” mass flow meters for gases.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 3 Theory of Operation Flomega, Liquid MFC’s/MFM’s As with relative high flows more heat-current is involved, the thermal “lag”of the fluidum increases. Also the decreasing operation of the guideline reduces the outstanding performance of the device. For flows up to 1000 g/h, the design has been changed to overcome above mentioned problems. The guideline is left out to reduce the thermal lag effects.
Section 3 Theory of Operation Flomega, Liquid MFC’s/MFM’s Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Figure 3-3 Principle Mass Flow Controller MODEL 5881/91 ELECTRONIC FEATURES (see figure 3-4) The Flomega model 5881 liquid mass flow controller and model 5891 liquid mass flow meter has a number of features which are customer selectable (by jumper setting) or adjustable (by potentiometer). These are: a. Voltage or current setpoint This is jumper selectable.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 3 Theory of Operation Flomega, Liquid MFC’s/MFM’s MODEL 5882/92 (see figure 3-5) ELECTRONIC FEATURES The Flomega model 5882 liquid mass flow controller and model 5892 liquid mass flow meter has a number of features which are customer selectable (by jumper setting) or adjustable (by potentiometer). These are: a. Voltage or current setpoint This is jumper selectable.
Section 3 Theory of Operation Flomega, Liquid MFC’s/MFM’s Figure 3-4 Jumper Settings for Flomega Figure 3-5 Jumper Settings for Flomega 20 Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 3-2 Section 3 Theory of Operation Flomega, Liquid MFC’s/MFM’s Calibration Procedure Note: Calibration of the Flomega models requires the use of the digital voltmeter (DVM), and an accurate calibration standard. It is recommended that calibration be performed only by trained and qualified service personnel. a. Install the Flomega in the flow calibration system.
Section 4 Maintenance Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s 4-1 General No routine maintenance is required to be performed on the models 5881/5892 other than occasional cleaning. It is recommended a non-residual solvent be used for cleaning the flow sensor and control valve. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 d. 1. 2. 3. 4. 5. 4-3 Section 4 Maintenance Flomega, Liquid MFC’s/MFM’s Orifice disassembly Use a screwdriver to remove the orifice through the process connection from the outlet body. Take care of the o-ring. Apply Nitrogen gas flow at 2 bar inlet pressure. Screw the orifice in the outlet body and adjust till 0% output signal has been reached again. Check if value opens at 5-7 Vdc.
Section 4 Maintenance Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s SYMPTOM POSSIBLE CAUSE REMEDY Output signal 4a) VOR input at +5V to +15V Determine cause of this undesirable input 4b) Flow too high because Clean orifice or valve.
Section 5 Parts List Installation and Operation Manual Section 5 Spare Parts X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 5-1 Flomega, Liquid MFC’s/MFM’s General Refer to figure 5-1 and table 5-1 to order replacement parts. Ref. Quant. No. Req. Description Part No.
Section 5 Spare Parts Flomega, Liquid MFC’s/MFM’s Figure 5-1 Flomega spare parts 5-2 Service Tools - Slotted head screwdriver - Tweeker - Allen head key wrench - Syringe with silicon - Torque wrench (3.5 N.m.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 6 Modellist Flomega, Liquid MFC’s/MFM’s FLOMEGA 5881/91 - 5882/92 BASE MODEL NUMBER 5881/D 5891/D 5882/D 5892/D DESCRIPTION MASS FLOW CONTROLLER (MAX. 100 GRAMS/HOUR WATER EQUIVALENT) MASS FLOW METER (MAX. 100 GRAMS/HOUR) MASS FLOW CONTROLLER (MAX. 1000 GRAMS/HOUR WATER EQUIVALENT) MASS FLOW METER (MAX. 1000 GRAMS/HOUR) 1A 1B 1C 1D 1E 1F 9Z MATERIALS OF CONSTRUCTION ST ST./VITON ST.ST/BUNA ST.
Section 7 CE Certification Installation and Operation Manual Flomega, Liquid MFC’s/MFM’s X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Dansk Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 7 CE Certification Flomega, Liquid MFC’s/MFM’s Español Los equipos de Brooks (eléctricos/electrónicos) en relación con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro magnetica (EMC directiva 89/336/EEC).
Section 7 CE Certification Flomega, Liquid MFC’s/MFM’s Greek 30 Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 7 CE Certification Flomega, Liquid MFC’s/MFM’s Italiano Questa strumentazione (elettrica ed elettronica) prodotta da Brooks Instrument, soggetta a marcatura CE, ha superato con successo le prove richieste dalla direttiva per la Compatibilità Elettomagnetica (Direttiva EMC 89/336/EEC). E’ richiesta comunque una speciale attenzione nella scelta dei cavi di segnale da usarsi con la strumentazione soggetta a marchio CE.
Section 7 CE Certification Flomega, Liquid MFC’s/MFM’s Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Português O equipamento (eléctrico/electrónico) Brooks com a marca CE foi testado com êxito nos termos do regulamento da Compatibilidade Electromagnética (directiva CEM 89/336/EEC). Todavia, ao seleccionar-se o cabo de sinal a utilizar com equipamento contendo a marca CE, será necessário ter uma atenção especial.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 8 Safety Instructions Flomega, Liquid MFC’s/MFM’s ENGLISH IMPORTANT SAFETY INSTRUCTIONS This appendix contains important safety and operating instructions for use with the Thermal Mass Flow Meter / Controller Series. The instrument complies to the (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Consult local authorities as to national and/or local safety codes and any additional installation requirements.
Section 8 Safety Instructions Installation and Operation Manual Flomega, Liquid MFC’s/MFM’s X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 DUTCH BELANGRIJKE VEILIGHEIDSINSTRUCTIES! Deze appendix bevat belangrijke veiligheidsinstructies voor het gebruik van de Thermal Mass Flow Meter/ Controller Series. Deze instrumenten voldoen aan de (PED) Pressure Equipment CE Directive 97/23/EC (wet op het vervaardigen en distribueren van drukvaten binnen de Europese lidstaten).
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 8 Safety Instructions Flomega, Liquid MFC’s/MFM’s GERMAN WICHTIGE SICHERHEITSHINWEISE Dieser Anhang enthält wichtige Hinweise für einen sicheren Betrieb des Ganzmetall-Schwebekörperdurchflussmessers der Baureihe Thermal Mass Flow Meter / Controller Series von Brooks Instrument. Das Gerät entspricht den gültigen PEDRichtlinien (PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC).
Section 8 Safety Instructions Installation and Operation Manual Flomega, Liquid MFC’s/MFM’s X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 NORSK VIKTIG SIKKERHETS INSTRUKS Dette tillegget inneholder viktige sikkerhets og drifts instruksjoner for bruk av Brooks metall rør mengde måler Thermal Mass Flow Meter / Controller Series. Instrumentet tilfredstiller (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC. Kontakt lokale myndigheter for nasjonale eller lokale sikkerhetskoder og andre installasjonskrav.
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Section 8 Safety Instructions Flomega, Liquid MFC’s/MFM’s SWEDISH VIKTIG SÄKERHETSINFORMATION Denna bilaga innehåller viktig information om säkerhet och handhavande vid installation och användande av Brooks Flödesmätare i Thermal Mass Flow Meter / Controller Series. Instrumentet är i överensstämmande med (PED) PRESSURE EQUIPMENT CE DIRECTIVE 97/23/EC.
Appendix A ATEX Certification Flomega, Liquid MFC’s/MFM’s 38 Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Appendix A ATEX Certification Flomega, Liquid MFC’s/MFM’s 39
Installation and Operation Manual X-TMF-FM-MFC-eng PN 541-C-007-AAG April, 2008 Flomega, Liquid MFC’s/MFM’s LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
