Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Brooks® CMC Series Brooks® CMC Series Capacitance Manometers CMC Series Sub D 9-Pin Capacitance Manometer
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Brooks® CMC Series Essential Instructions Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Brooks® CMC Series Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Brooks® CMC Series THIS PAGE WAS INTENTIONALLY LEFT BLANK
_CONTENTS _1.0 INTRODUCTION 1 _2.0 INSTALLATION 2 _2.1 MECHANICAL INSTALLATION 2 _2.2 ELECTRICAL INSTALLATION 3 _3.0 OPERATION 6 _3.1 OPERATING SPECIFICATIONS 7 _3.2 CHECKING AND ZERO ADJUSTMENT 7 _3.3 SPAN (FULL SCALE) ADJUST & CALIBRATE 7 _3.4 CALIBRATION SERVICES 7 _4.0 MAINTENANCE AND TROUBLESHOOTING 8 _4.1 RETURNING THE CMX/CMC SERIES FOR REPAIR 8 _4.2 RETURN INSTRUCTIONS 8 _5.0 ESSENTIAL INSTRUCTIONS WARRANTY SALES/SERVICE 9 Back Cover p.
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_INTRODUCTION 1.0 1.0 INTRODUCTION The Brooks CMC Series Capacitance Manometer is a temperature compensated, absolute pressure transducer designed for accurate and repeatable vacuum measurements. Various full scale ranges are available from 10 Torr up to 1000 Torr. The units of measurement may be specified in Torr (mmHg), mBar, or kPa. The CMC Series operates from a 12-30 VDC power supply and provides a 0 to 10 VDC signal output that is linear with pressure and independent of gas composition.
_INSTALLATION 2.0 2.0 INSTALLATION 2.1 Mechanical Installation Remove all packaging material, the protective flange cover and visually check the CMC Series. If the CMC Series appears damaged, notify Brooks Instrument immediately. Retain packaging materials for inspection. Do not use if damaged. If the CMC Series is not going to be used immediately, then replace the protective flange cover and store in an area where the temperature range is controlled between -50°C to +125°C.
_INSTALLATION 2.0 Ø1.50" [Ø38.10mm] Ø 38.10 mm [Ø 1.50"] SPAN ZERO mm [in] PIN 1 17.53mm [0.69"] MATING CONNECTOR Fitting Type 52.58 mm [2.42"] 52.37 mm [2.06"] Dim A Code Dim A 0.5" OD Tube 0 23.95 mm [0.94"] KF-16 Flange 2 27.68 mm [1.09"] KF-25 Flange 3 27.68 mm [1.09"] 8 VCR® Female 4 42.82 mm [1.69"] Figure 2: CMC Series 5-Pin Terminal Strip Dimensions 2.2 Electrical Installation CMC Series operates from a 12-30 VDC regulated power supply.
_INSTALLATION 2.0 TERMINAL STRIP Ø1.50" [Ø38.10mm] 0.120" [3.05mm] SPAN ZERO PIN 1 Pin Function 1 Power Supply Common 2 Signal Output Common 3 + Signal Output 4 Case Ground 5 Power Supply + VDC Figure 4: Terminal Strip Pinout Ø 38.10 mm [Ø 1.50"] SPAN ZERO 152.4mm [6.0"] Pin 5 - Power Return Pin 2 - Pressure Output mm [in] Pin 7 - +12 to 30 Vdc Supply Pin 1 Pin 12 - Signal Common Pin 15 - Case Ground 52.37 mm [2.06"] Fitting Type Code Dim A 0.5" OD Tube 0 23.95 mm [0.
_OPERATION 3.0 3.0 OPERATION For most accurate pressure measurement, allow the CMC Series to warm up for at least 15 minutes. After installation, periodically check the zero output reading to verify correct output. Adjust the zero potentiometer, if incorrect (See Calibration and Adjustment Section for Zero adjustment instructions). Table 1 indicates the lowest pressures available for reading and pressure control for each range of the CMC Series.
_OPERATION 3.0 3.1 Operating Specifications Full Scale Ranges 10, 20, 100, 200, and 1000 Torr Performance Accuracy1 Resolution2 0.5% of Reading 0.01% of Full Scale Temperature Affect to Zero 0.005% Full Scale/Degree C Temperature Affect to Span 0.027% Full Scale/Degree C Response Time 20 msec Mechanical Exposed Materials3 Over-pressure Limit Weight Inconel® 45 psia 0.
_MAINTENANCE & TROUBLESHOOTING 4.0 4.0 MAINTENANCE AND TROUBLESHOOTING There are no general maintenance requirements for the CMC Series other than periodic Zero adjustment. If the unit fails to operate when received or if the unit appears damaged, notify Brooks immediately. Retain packaging materials for inspection. Do not use if damaged. If the CMC Series is not going to be used immediately, then replace the protective flange cover and store in suitable conditions.
_MAINTENANCE & TROUBLESHOOTING 4.0 To assure prompt handling, please supply the following information and include it inside the package of returned material: • Omission of pertinent information may result in a delay in processing your order. • Omission of the Contamination Disclosure Form may result in either a delay or rejection of your service request. .
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Bulgarian Ɉɫɧɨɜɧɢ ɢɧɫɬɪɭɤɰɢɢ ɉɪɨɱɟɬɟɬɟ ɩɪɟɞɢ ɪɚɛɨɬɚ! Brooks Instrument ɩɪɨɟɤɬɢɪɚ, ɩɪɨɢɡɜɟɠɞɚ ɢ ɬɟɫɬɜɚ ɩɪɨɞɭɤɬɢɬɟ ɫɢ ɩɨ ɬɚɤɴɜ ɧɚɱɢɧ, ɱɟ ɬɟ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ ɦɧɨɝɨɛɪɨɣɧɢ ɧɚɰɢɨɧɚɥɧɢ ɢ ɦɟɠɞɭɧɚɪɨɞɧɢ ɫɬɚɧɞɚɪɬɢ. Ɍɟɡɢ ɨɛɨɪɭɞɜɚɧɢɹ ɬɪɹɛɜɚ ɩɪɚɜɢɥɧɨ ɞɚ ɫɟ ɢɧɫɬɚɥɢɪɚɬ, ɟɤɫɩɥɨɚɬɢɪɚɬ ɢ ɩɨɞɞɴɪɠɚɬ ɡɚ ɞɚ ɫɟ ɝɚɪɚɧɬɢɪɚ, ɱɟ ɳɟ ɦɨɝɚɬ ɞɚ ɪɚɛɨɬɹɬ ɫɴɨɬɜɟɬɧɨ ɧɚ ɬɟɯɧɢɬɟ ɧɨɪɦɚɥɧɢ ɫɩɟɰɢɮɢɤɚɰɢɢ.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Czech Základní instrukce PĜed instalací si pĜeþtČte následující instrukce! Spoleþnost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standardĤ. PĜístroje musí být ĜádnČ nainstalovány, používány a udržovány tak, aby byl zajištČn jejich nepĜetržitý provoz v rámci normálních technických specifikací.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Dutch Essentiële instructies Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Estonian Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames.
Section 5 - Essential Instructions Brooks® CMC Series Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Finnish Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series French Instructions essentielles A lire avant de commencer ! Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series German Wichtige Anweisungen Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Greek ǺĮıȚțȑȢ ȠįȘȖȓİȢ ǻȚĮȕȐıIJİ ʌȡȚȞ ıȣȞİȤȓıİIJİ! Ǿ Brooks Instrument ıȤİįȚȐȗİȚ, ʌĮȡȐȖİȚ țĮȚ įȠțȚȝȐȗİȚ IJĮ ʌȡȠȧȩȞIJĮ IJȘȢ ıİ ıȣȝȝȩȡijȦıȘ ȝİ ʌȜȒșȠȢ İșȞȚțȫȞ țĮȚ įȚİșȞȫȞ ʌȡȠIJȪʌȦȞ. Ǿ ıȦıIJȒ İȖțĮIJȐıIJĮıȘ, ȤȡȒıȘ țĮȚ ıȣȞIJȒȡȘıȒ IJȠȣȢ ĮʌȠIJİȜİȓ ĮʌĮȡĮȓIJȘIJȘ ʌȡȠȨʌȩșİıȘ IJȘȢ ȜİȚIJȠȣȡȖȓĮȢ İȞIJȩȢ IJȦȞ țĮȞȠȞȚțȫȞ ȠȡȓȦȞ.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Hungarian AlapvetĘ utasítások ElĘször olvassa el ezeket! A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelelĘen kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál mĦködési tartományuknak megfelelĘen üzemelhessenek.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Italian Istruzioni fondamentali Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Latvian SvarƯga instrukcija Pirms turpinƗt izlasiet! „Brooks Instrument” projektƝ, ražo un pƗrbauda savus ražojumus atbilstoši daudziem nacionƗlajiem un starptautiskajiem standartiem. Lai nodrošinƗtu šo izstrƗdƗjumu turpmƗku darbƯbu atbilstoši noteiktajiem parametriem, tie ir pareizi jƗuzstƗda, jƗlieto un jƗapkopj.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Lithuanian Pagrindinơs instrukcijos Perskaitykite prieš tĊsdami! „Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitiktǐ Ƴvairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi bnjti tinkamai montuojami, eksploatuojami ir prižinjrimi, kad ir toliau veiktǐ pagal jiems bnjdingus techninius parametrus.
Section 5 - Essential Instructions Brooks® CMC Series Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Polish Zalecenia wstĊpne Prosimy przeczytaü przed rozpoczĊciem uĪytkowania! Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby speániaáy wymagania licznych norm krajowych i miĊdzynarodowych. Te produkty muszą byü poprawnie instalowane, obsáugiwane oraz konserwowane, aby zapewniü ich prawidáowe dziaáanie zgodnie ze specyfikacją techniczną.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Portuguese Instruções Básicas Antes de proceder, leia-as! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a que os mesmos satisfaçam numerosas normas nacionais e internacionais. Os equipamentos devem ser instalados, explorados e mantidos de maneira adequada, e devem funcionar de acordo com a sua gama de utilização.
Section 5 - Essential Instructions Brooks® CMC Series Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Romanian IndicaĠii de referinĠă CitiĠi-le întâi pe acestea! Brooks Instrument îúi proiectează, produce úi testează produsele într-un mod ce respectă un mare număr de standarde autohtone úi internaĠionale. Aceste instalaĠii trebuie amplasate, exploatate úi întreĠinute corespunzător, pentru ca în toate situaĠiile, domeniul lor de lucru să corespundă operării normale.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Slovak Základné príkazy PreþítaĢ pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalovaĢ, prevádzkovaĢ a udržiavaĢ, na zabezpeþenie ich spoĐahlivej a normálnej prevádzky v celom pracovnom rozsahu.
Section 5 - Essential Instructions Brooks® CMC Series Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim domaþim in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podroþju funkcioniranja.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Section 5 - Essential Instructions Brooks® CMC Series Spanish Instrucciones básicas ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
Section 5 - Essential Instructions Brooks® CMC Series Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Swedish Väsentliga anvisningar. Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation.
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Brooks® CMC Series THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-VAC-CMC-eng Part Number: 541B153AAG November, 2011 Brooks® CMC Series LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
