Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Brooks® GF40/GF80/GF81 Series MultiFloTM Capable Digital Thermal Mass Flow Devices Brooks® GF40/GF80/GF81 Series available with RS485, DeviceNetTM, Profibus® or EtherCAT® I/O
Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Brooks® GF40/GF80/GF81 Devices THIS PAGE WAS INTENTIONALLY LEFT BLANK Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Paragraph Number Contents Brooks® GF40/GF80/GF81 Devices Page Number Section 1 Introduction 1-1 Introduction ................................................................................................................................... 1-1 1-2 How to Use This Manual ................................................................................................................
Contents Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Appendix A: GF40/GF80 Series Gas Table .............................................................................................A-1 Appendix B: GF40/GF80/GF81 Series Patents ...................................................................................... B-1 Appendix C: Essential Instructions .................................................................
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 1 Introduction Brooks® GF40/GF80/GF81 Devices 1-1 Introduction Based upon Brooks award-winning GF100 Series, the GF40/GF80/GF81 Series is a performance/value MFC platform designed for OEM applications, delivering the following class leading features: • MultiFlo™ process gas and flow range programmability, enabling customers to re-configure the MFC for new gases and full scale flow rates for unparal
Section 1 Introduction Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the GF40/GF80/ GF81 Series.
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 1-7 Industry Standard References Refer to Table 1-1. 1-8 GF40/GF80 Devices Gas Table Refer to Appendix A.
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table 1-2 Terms and Acronyms 1-4 Term or Acronym Definition CSR Customer Special Requirement. CVD Chemical Vapor Deposition. DSP Digital Signal Processor. EPI Epitaxy (EPI).
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 1-10 Description Control The GF40/GF80/GF81 Series brings together Brooks high-performance, patented ultra-fast T-rise flow sensor, high-speed ARM based digital architecture, and a fast-acting diaphragm-free solenoid valve to deliver: • Fast reproducible transitions between setpoints without overshoot or ringing • User-programmable ramp functions for pr
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and Adapter Cables *Software, MultiFlo Configurator A331710003 Cable Assembly 2.
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Enhanced Diagnostics and User Interface The mass flow controller is typically the most complex and critical component in a gas delivery system, When dealing with toxic or reactive gases, removing the MFC to access its functionality should be the last resort.
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices See Tables 1-3 thru 1-5 for specifications for the GF40/GF80/GF81 Series. See Figures 1-2 thru 1-5 for dimensions for the GF40/GF80/GF81 Series. Table 1-3 Specifications for Standard GF40/GF80 Series Performance GF40 GF80 Full Scale Flow Range (N 2 Eq.) Flow Accur acy Accuracy 3 sccm to 50 slm +1% S.P. 35-100%, +0.35% F.S.
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table 1-4 Specifications for Standard GF81 Series Performance Standar d Con figur ation Full Scale Standard Configur figuration t) Flow Range (N2equivlen equivlent) Flow Accur acy Accuracy Repeatability & Repr oducibility Reproducibility Linearity Response Time (Settling Time) Con tr ol Range Contr trol Valve Shut Down Zer eroo Stability GF81 51 - 300
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table 1-5 GF40/GF80/GF81 Electrical Specifications Communication Pr otocol Protocol Electrical Connection RS485 1 x 15-pin Male Sub-D, (A) Pr ofibus Profibus 1 x 15-pin Male Sub-D/ 1 x 9-pin Female Sub-D DeviceNet 1 x M12 with threaded coupling nut (B) EtherCA EtherCATT 5-pin M8 with threaded coupling nut/ 2 x RJ45 0-5 V, 0-10 V, 0-20 mA, 4-20 mA 0
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 1 Introduction Brooks® GF40/GF80/GF81 Devices Figure 1-2 Dimensions - GF40 Series 1-11
Section 1 Introduction Brooks® GF40/GF80/GF81 Devices 1-12 Figure 1-3 Dimensions - GF80 Series Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Section 1 Introduction Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Model GF81 RS485/Analog Model GF81 Profibus 3.67 93.1 1.13 28.6 5.71 145.1 5.84 148.3 1.48 37.6 .50 12.7 3.43 87.1 5.28 134.2 .50 12.7 1.17 29.7 .58 14.8 1.13 28.7 Figure 1-4 Dimensions - GF81 Series, RS485/Analog & Profibus 1.13 28.7 .58 14.
Section 1 Introduction Brooks® GF40/GF80/GF81 Devices Model GF81 DeviceNet Figure 1-5 Dimensions - GF81 Series, DeviceNet 1-14 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 2-1 General This section provides installation instructions for the Brooks GF40/GF80/ GF81 Series Thermal Mass Flow Devices. The installation process consists of purging the gas supply line prior to installation, unpacking and inspecting the device, connecting the device to the gas supply line and testing for leaks.
Section 2 Installation Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Remove the envelope containing the packing list. Outside of your clean area, carefully remove the equipment from the packing case. Make sure spare parts are not discarded with the packing material. Inspect the contents for damaged or missing parts.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 2 Installation Brooks® GF40/GF80/GF81 Devices a pneumatic pressure test in accordance with applicable vessel codes. To maintain a device's clean integrity, this service should be performed by the factory or one of the certified service centers. 2-7 Gas Connections Prior to installation, ensure that all piping is clean and free from obstructions.
Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 2-10 Flow Controller Installation Arrangement Typical gas supply arrangements are shown in Figure 2-1. GF40s/GF80s/ GF81s are often arranged inside a gas panel. Configure standard configurations ("SAs") or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo technology enables the user to reduce unique inventory requirements.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 2 Installation Brooks® GF40/GF80/GF81 Devices 2-11 Purge the Gas Supply Line Before GF40/GF80/GF81 Series Installation Before operating the GF40/GF80/GF81 Series, the gas supply line must be completely purged with nitrogen or argon to ensure the line is free from toxic or flammable gases, contaminants, moisture, and oxygen. The purge gas must be free of moisture and oxygen to less than 100 ppb.
Section 2 Installation Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 2-12 Position and Mount the GF40/GF80/GF81 Series It is recommended that the MFC is re-zeroed with process gas following the recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for futher information). If your GF80 Series is configured with downported fittings, follow Steps 1 through 4 below.
Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 3 1 4 2 Figure 2-2 GF80 Series Mounted to K1 Series Substrate Blocks Table 2-1 K1 Substrate Torque Data Connection Torque Pattern GF80 to Subtstrate Use a square pattern as shown in Figure 2-3. Start at 25 inch-pounds and increase in increments of 10 inch-pounds until proper Torque (Inch-Pounds) K1S K1R2 K1H 45 45 45 value is obtained.
Section 2 Installation Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 2-13 Perform a Leak Test It is critical to leak test the gas supply lines and GF40/GF80/GF81 Series connections before turning on the process gas supply after any new installation. Check for leaks using a helium leak detector or any other appropriate leak test method. Follow leak test specifications as defined by integrator.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 2 Installation Brooks® GF40/GF80/GF81 Devices 6. Close the GF40/GF80/GF81 Series and wait two minutes. 7. Read the output signal of the GF40/GF80/GF81 Series in percent of full scale. This output signal is the initial flow. The output signal should be 0.0 (± 0.1%). If the output signal is too high, re-zero the GF40/GF80/GF81 Series as described in Section 2-16. 2-16 Zeroing the GF40/GF80 Series 1.
Section 2 Installation Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 2-18 Using the MultiFloTM Configurator The MutliFlo Configurator application is used to configure the gas and range of the GF40/GF80 Series devices. The MultiFlo Configurator application allows communication to GF40/GF80 Series devices through personal computer with serial COM Port and a Windows XP or Windows 7 operating system.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 2 Installation Brooks® GF40/GF80/GF81 Devices 778Z011ZZZ Basic MultiFlo Configurator Kit w/Power Supply and Adapter Cables A331710003 Cable Assembly 2.5mm A332300001 Converter 232/485 Connect the MultiFlo cable adapter 2.5-mm jack to the diagnostic port on the top of the device. See Figure 2-7. Connect the RS485 end of the converter to the 15-pin RS485 end of the MultiFlo Cable Adapter.
Section 2 Installation Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Diagnostic Port Figure 2-7 Diagnostic Port 2-19 Electrical Connections 2-19-1 DeviceNet Connections DeviceNet is a 5 wire local network connection that employs a command response communication protocol for communicating between a master and slave.
Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 2-19-2 Analog/RS485 Connections The GF40/GF80/GF81 Series devices are available with the Analog/RS485 15-Pin D-Connector shown in Figure 2-9. It is recommended that when using -15 Vdc & 0, the wiring hook-up should be: -15V is connected to Pin 9 (POWER COMMON) and 0 is connected to Pin 5 (POWER SUPPLY(+12 to +24 VDC)).
Section 2 Installation Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 2-19-3 Profibus Connections The GF40/GF80/GF81 Series devices are available with the Profibus connections as shown in Figure 2-10. Profibus Connectors Figure 2-10 GF40/GF80/GF81 Series Profibus Connections and Pinouts 2-19-4 EtherCAT Connections The GF40/GF80 Series devices are available with the EtherCAT connections as shown in Figure 2-11.
Section 2 Installation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 2-19-5 Alarm Output (Analog I/O versions only) The Alarm Output is an open collector or "contact" type that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicaqte any one of various conditions.
Section 2 Installation Brooks® GF40/GF80/GF81 Devices THIS PAGE WAS INTENTIONALLY LEFT BLANK 2-16 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Section 3 Operation Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 3-1 General After the device has been properly installed in the process, it is ready for operation. When initiating flow, slowly open any upstream shutoff valve to avoid a flow surge. A bypass is helpful in bringing the flow on smoothly. Avoid starting a pump to supply the device without the use of a valve upstream of the device.
Section 3 Operation Brooks® GF40/GF80/GF81 Devices Figure 3-1 GF40/GF80/GF81 Series Operating Principles 3-2 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 4 Maintenance & Troubleshooting Brooks® GF40/GF80/GF81 Devices 4-1 Overview No routine maintenance is required on the Brooks GF40/GF80/GF81 Series devices. If an in-line filter is used, the filtering elements should be periodically replaced or cleaned. Any precision unit such as a flow controller requires occasional servicing, especially if it has been operating for an extended period of time.
Section 4 Maintenance & Troubleshooting Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 4-3 Troubleshooting This section includes a Troubleshooting Checklist and a GF40/GF80/GF81 Series Troubleshooting Guide that identifies symptoms, possible causes, and corrective actions.
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 4-4 Troubleshooting Checklist 1. Check environmental factors that could affect changes to GF40/GF80/ GF81 Series performance. The most common environmental factors are listed in Table 4-1. 2. Check supply voltage and check for a consistent ground. 3. Insure OEM tool setpoint matches the setpoint at the GF40/GF80/GF81 Series.
Section 4 Maintenance & Troubleshooting Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 4-5 GF40/GF80/GF81 Series Troubleshooting Guide Table 4-2 GF40/GF80/GF81 Series Troubleshooting Guide Symptoms & Possible Causes Corrective Action 1. No gas flow. Is the gas supply turned on? Check shut-off valve and pressure readout. Open the gas supply.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 4 Maintenance & Troubleshooting Brooks® GF40/GF80/GF81 Devices Table 4-2 GF40/GF80/GF81 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 2. Flow out of range (Continuted). Is the device zero correct? Zero the device according to zeroing procedure in Section 2-16. Verify leak check rates are OK. 3. No gas control; flow is at or above maximum.
Section 4 Maintenance & Troubleshooting Brooks® GF40/GF80/GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Table 4-2 GF40/GF80/GF81 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 5. No gas flow below some setpoint. NOTE: When the setpoint is decreased below this point, the GF40/GF80/GF81 Series signal remains at some value higher than the setpoint.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section 4 Maintenance & Troubleshooting Brooks® GF40/GF80/GF81 Devices Table 4-2 GF40/GF80/GF81 Series Troubleshooting Guide (Continued) Symptoms & Possible Causes Corrective Action 7. OEM tool does not read correct GF40/GF80/GF81 Series zero reading. Is the differential pressure across the GF40/GF80/GF81 Series valve leakage. GF40/GF80/GF81 Series really zero? Incorrect MFC zero.
Section 4 Maintenance & Troubleshooting Brooks® GF40/GF80/GF81 Devices THIS PAGE WAS INTENTIONALLY LEFT BLANK 4-8 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Section 5 Product Description Code Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices 5 Product Description Code Table 5-1 GF40/GF80 Series Product Description Code Table Code Description I. Base Model Code Code Option Option Description GF040 Elastomer / Range Flow (0-50 slpm) GF080 Metal / Range Flow (0-50 slpm) II. Configurability C X III. Special Application XX Standard IV V..
Section 5 Product Description Code Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table 5-1 GF40/GF80 Series Product Description Code Table (Continued) Code Description IX. Communications / Connector X. Customer Special Request XI. Auto Shut-Off XXXX XII. Auto Zero XIII.
Section 5 Product Description Code Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table 5-2 GF81 Series Product Description Code Table Code Description I. Base Model Code Code Option Option Description GF081 Metal/Hi-flow (51-300 slpm N2 Eq) II. Configurability X Specific Gas & Range Required III. Special Application XX Standard IV V.. Valve Configuration C M Normally Closed Valve Meter (No Valve) V.
Section 5 Product Description Code Brooks® GF40/GF80/GF81 Devices THIS PAGE WAS INTENTIONALLY LEFT BLANK 5-4 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices A GF40/GF80 Series Gas Table Table A-1 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA40 to SA43 Min inlet pressure for vac.
Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table A-2 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA40 to SA43 Min inlet pressure for vac. exhaust (PSIA) Gas Symbol SiCl4 C3H9N SF6 C2F6 WF6 C3F8 C4F8 C3F6 C2HF5 CH2F2 CH6Si (CH3)3SiH C5F8 C4F6 C4F6-q) C5F8O Si3H9N 10%GeH4/H2 10%PH3/H2 4.
Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50 SA44 Gas Symbol He Ne Ar Kr Xe H2 Air CO HBr HCl N2 D2 O2 NO HI F2 Cl2 H2S H2Se CO2 N2O CH4 NH3 PH3 SO2 CH3F COS AsH3 ClCN C2H4 SiH4 C2H2 GeH4 COF2 BF3 CHF3 NF3 B2H6 COCl2 PF3 CF4 SiH2Cl2 C3H6-b) BCl3 ClO3F ClF3 C2H7N SiF4 C3H8 C2F4 Si2H6 GeF4 Gas Code 1 2 4 5 6 7 8 9
Appendix A: GF40/GF80 Series Gas Table Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Table A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50 SA44 Gas Symbol Gas Code SA46 SA47 SA48 SA50 Gas Name Elastomer seal GF040 Low High Low High Low High Low High Low High Low High SiCl4 C3H9N SF6 C2F6 WF6 C3F8 C4F8 C3F6 C2HF5 CH2F2 CH6Si (CH3)3SiH C5F8 C4F6 C4F6-q) C5F8O Si3H9N 10%GeH4/H2 10%PH3/H
Appendix B: GF40/GF80GF81 Series Patents Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices B GF40/GF80/GF81 Series Patents The GF40/GF80/GF81 Series may be protected by the following US patents and their international filings. Table B-1 GF40/GF80/GF81 Series Patents Patent/Pub. No.
Appendix B: GF40/GF80/GF81 Series Patents Brooks® GF40/GF80/GF81 Devices THIS PAGE WAS INTENTIONALLY LEFT BLANK B-2 Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Bulgarian Ɉɫɧɨɜɧɢ ɢɧɫɬɪɭɤɰɢɢ ɉɪɨɱɟɬɟɬɟ ɩɪɟɞɢ ɪɚɛɨɬɚ! Brooks Instrument ɩɪɨɟɤɬɢɪɚ, ɩɪɨɢɡɜɟɠɞɚ ɢ ɬɟɫɬɜɚ ɩɪɨɞɭɤɬɢɬɟ ɫɢ ɩɨ ɬɚɤɴɜ ɧɚɱɢɧ, ɱɟ ɬɟ ɞɚ ɨɬɝɨɜɚɪɹɬ ɧɚ ɦɧɨɝɨɛɪɨɣɧɢ ɧɚɰɢɨɧɚɥɧɢ ɢ ɦɟɠɞɭɧɚɪɨɞɧɢ ɫɬɚɧɞɚɪɬɢ.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Czech Základní instrukce PĜed instalací si pĜeþtČte následující instrukce! Spoleþnost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standardĤ.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Dutch Essentiële instructies Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Estonian Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Finnish Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices French Instructions essentielles A lire avant de commencer ! Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 German Wichtige Anweisungen Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Greek ǺĮıȚțȑȢ ȠįȘȖȓİȢ ǻȚĮȕȐıIJİ ʌȡȚȞ ıȣȞİȤȓıİIJİ! Ǿ Brooks Instrument ıȤİįȚȐȗİȚ, ʌĮȡȐȖİȚ țĮȚ įȠțȚȝȐȗİȚ IJĮ ʌȡȠȧȩȞIJĮ IJȘȢ ıİ ıȣȝȝȩȡijȦıȘ ȝİ ʌȜȒșȠȢ İșȞȚțȫȞ țĮȚ įȚİșȞȫȞ ʌȡȠIJȪʌȦȞ. Ǿ ıȦıIJȒ İȖțĮIJȐıIJĮıȘ, ȤȡȒıȘ țĮȚ ıȣȞIJȒȡȘıȒ IJȠȣȢ ĮʌȠIJİȜİȓ ĮʌĮȡĮȓIJȘIJȘ ʌȡȠȨʌȩșİıȘ IJȘȢ ȜİȚIJȠȣȡȖȓĮȢ İȞIJȩȢ IJȦȞ țĮȞȠȞȚțȫȞ ȠȡȓȦȞ.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Hungarian AlapvetĘ utasítások ElĘször olvassa el ezeket! A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Italian Istruzioni fondamentali Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Latvian SvarƯga instrukcija Pirms turpinƗt izlasiet! „Brooks Instrument” projektƝ, ražo un pƗrbauda savus ražojumus atbilstoši daudziem nacionƗlajiem un starptautiskajiem standartiem. Lai nodrošinƗtu šo izstrƗdƗjumu turpmƗku darbƯbu atbilstoši noteiktajiem parametriem, tie ir pareizi jƗuzstƗda, jƗlieto un jƗapkopj.
Section C Essential Instructions Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices Lithuanian Pagrindinơs instrukcijos Perskaitykite prieš tĊsdami! „Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitiktǐ Ƴvairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi bnjti tinkamai montuojami, eksploatuojami ir prižinjrimi, kad ir toliau veiktǐ pagal jiems bnjdingus techninius parametrus.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Polish Zalecenia wstĊpne Prosimy przeczytaü przed rozpoczĊciem uĪytkowania! Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby speániaáy wymagania licznych norm krajowych i miĊdzynarodowych.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Portuguese Instruções Básicas Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Romanian IndicaĠii de referinĠă CitiĠi-le întâi pe acestea! Brooks Instrument îúi proiectează, produce úi testează produsele într-un mod ce respectă un mare număr de standarde autohtone úi internaĠionale.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Slovak Základné príkazy PreþítaĢ pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim domaþim in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podroþju funkcioniranja.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Section C Essential Instructions Brooks® GF40/GF80/GF81 Devices Spanish Instrucciones básicas ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales.
Section C Essential Instructions Brooks® GF40/GF80GF81 Devices Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Swedish Väsentliga anvisningar. Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder.
Installation and Operation Manual X-TMF-GF40-GF80-Series-MFC-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-GF40-GF80-Series-eng Part Number: 541B161AAG June, 2013 Brooks® GF40/GF80/GF81 Devices LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment
