Manual

2-1
Brooks
®
GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Section 2 Installation
2-1 General
This section provides installation instructions for the Brooks GF40/GF80/
GF81 Series Thermal Mass Flow Devices. The installation process consists
of purging the gas supply line prior to installation, unpacking and inspecting
the device, connecting the device to the gas supply line and testing for
leaks.
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be checked
for damage incurred during shipment. If the packing case is damaged, the local
carrier should be notified at once regarding their liability. A report should be
submitted to your nearest Product Service Department.
Americas: Asia, Japan:
Brooks Instrument Brooks Instrument
407 W. Vine Street 1-4-4 Kitsuna, Koto-ku
P.O. Box 903 Tokyo 136-0073
Hatfield, PA 19440 USA Japan
Toll Free (888) 554 FLOW (3569) Tel [phone]
Tel [phone]
Fax [phone] Brooks Instrument Korea, Ltd.
E-mail: [e-mail] D-406 Bundang Techno Park 151
www.BrooksInstrument.com Sungnam, Kyungki-do, 463-070
Korea
Europe, Middle East, Africa: Tel [phone]
Brooks Instrument B.V.
Neonstraat 3, P.O. Box 428 Brooks Instrument (Shanghai) Co. LTD
6710 BX Ede RM 203, Bldg 6
Netherlands NO 1888 Xin Jin Qiao Rd
Tel [phone] or Jinqiao E.P.Z. Pudong
[phone] Shanghai 201206
E-mail: service.coordinator@Brooks Instrument.com China
Tel [phone]
Brooks Instrument GmbH
Zur Wetterwarte 50 Haus 377/B,
01109 Dresden
Germany
Tel [phone]
E-mail: service.coordinatorDD@Brooks Instrument.com
In case you need technical assistance:
USA 888 275 8946 Korea [phone]
Netherlands [phone] Taiwan [phone]
Germany [phone] China [phone]
Japan [phone] Singapore [phone]