Manual

A-3
Brooks
®
GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Appendix A: GF40/GF80 Series Gas Table
Table A-3 GF40/GF80 Series Gas Table - Codes 1-99, Bins SA44 to SA50
For reference only, consult factory on the latest tables.
For gases not specified for SA50, contact Brooks Product Marketing.
SA44 SA45 SA46 SA47 SA48 SA50
Gas Symbol
Gas
Code Gas Name Elastomer seal GF040 Low High Low High Low High Low High Low High Low High
He 1 Helium Viton 401 1194 1195 3609 3610 11100 11101 23100 23101 47000 47001 90900
Ne 2 Neon Viton 401 1207 1208 3650 3651 10700 10701 22100 x x x x
Ar 4 Argon Viton 401 1214 1215 3671 3672 10000 10001 20200 20201 41000 41001 50001
Kr 5 Krypton Viton 301 930 931 2800 2801 7160 7161 14901 x x x x
Xe 6 Xenon Viton 179 546 547 1651 1652 4210 4211 8761 x x x x
H2 7 Hydrogen Viton 281 860 861 2600 2601 8000 8001 16400 16401 33000 33001 66301
Air 8 Air Viton 281 860 861 2600 2601 7400 7401 15000 15001 30001 x x
CO 9 Carbon Monoxide Viton 281 860 861 2600 2601 7300 7301 15000 15001 30001 x x
HBr 10 Hydrogen Bromide Viton 236 723 724 2187 2188 5610 5611 11701 x x x x
HCl 11 Hydrogen Chloride EPDM 281 860 861 2600 2601 6900 6901 14200 14201 29001 x x
N2 13 Nitrogen Viton 281 860 861 2600 2601 7200 7201 15000 15001 30000 30001 50001
D2 14 Deuterium Viton 281 880 881 2600 2601 8100 8101 16500 16501 33001 x x
O2 15 Oxygen Viton 281 860 861 2600 2601 7200 7201 15000 15001 30000 30001 50001
NO 16 Nitric Oxide Viton,Kalrez 281 860 861 2600 2601 7200 7201 15000 15001 30001 x x
HI 17 Hydrogen Iodide Kalrez 142 432 433 1305 1306 3340 3341 6960 6961 13901 x x
F2 18 Fluorine - 255 780 781 2358 2359 6700 6701 14000 14001 28001 x x
Cl2 19 Chlorine Viton 174 531 532 1604 1605 4850 4851 10100 10101 20201 x x
H2S 22 Hydrogen Sulfide Kalrez 233 713 714 2155 2156 5900 5901 12100 12101 24101 x x
H2Se 23 Hydrogen Selenide Kalrez 203 620 621 1874 1875 4770 4771 10000 10001 20001 x x
CO2 25 Carbon Dioxide Buna 210 642 643 1942 1943 5300 5301 11000 11001 22000 22001 35401
N2O 27 Nitrous Oxide Viton,Buna 201 611 612 1849 1850 5100 5101 10400 10401 21000 21001 33601
CH4 28 Methane Viton,Buna 216 660 661 2000 2001 5800 5801 12000 12001 24000 24001 41801
NH3 29 Ammonia Neoprene,EPDM 224 685 686 2072 2073 6000 6001 12200 12201 25000 25001 41801
PH3 31 Phosphine Kalrez 206 629 630 1901 1902 5200 5201 10700 10701 21301 x x
SO2 32 Sulfur Dioxide EPDM 158 483 484 1459 1460 3800 3801 7920 7921 15801 x x
CH3F 33 Methyl Fluoride Viton 205 625 626 1890 1891 5200 5201 10600 10601 21201 x x
COS 34 Carbonyl Sulfide Viton 184 562 563 1700 1701 4500 4501 9400 9401 18301 x x
AsH3 35 Arsine Kalrez 171 510 511 1550 1551 4000 4001 8500 8501 17001 x x
ClCN 37 Cyanogen Chloride Kalrez 143 435 436 1320 1321 3400 3401 7060 7061 14101 x x
C2H4 38 Ethylene Viton 164 501 502 1516 1517 4400 4401 9300 9301 18201 x x
SiH4 39 Silane Kalrez 171 523 524 1581 1582 4400 4401 9300 9301 18201 x x
C2H2 42 Acetylene Viton 171 530 531 1600 1601 4400 4401 9300 9301 18201 x x
GeH4 43 Germane - 162 495 496 1500 1501 4000 4001 8400 8401 16401 x x
COF2 46 Carbonyl Fluoride Viton 161 500 501 1500 1501 4000 4001 8400 8401 16500 16501 19001
BF3 48 Boron Trifluoride Kalrez 151 457 458 1381 1382 3800 3801 7900 7901 15501 x x
CHF3 49 Fluoroform (Freon-23) Viton,Kalrez 146 445 446 1344 1345 3600 3601 7600 7601 15000 15001 23601
NF3 53 Nitrogen Trifluoride Teflon 141 430 431 1300 1301 3600 3601 7500 7501 15000 15001 23601
B2H6 58 Diborane Kalrez 117 358 359 1082 1083 3100 3101 6400 6401 12601 x x
COCl2 60 Phosgene Kalrez 107 325 326 1000 1001 2520 2521 5250 5251 10501 x x
PF3 62 Phosphorus Trifluoride - 130 400 401 1200 1201 3200 3201 6800 6801 13301 x x
CF4 63 Carbon Tetrafluoride (Freon-14) Viton 122 372 373 1123 1124 3010 3011 6400 6401 12600 12601 20001
SiH2Cl2 67 Dichlorosilane Kalrez 90 273 274 824 825 2140 2141 4450 4451 8901 x x
C3H6-b) 69 Propylene Viton 111 338 339 1022 1023 2800 2801 5900 5901 11701 x x
BCl3 70 Boron Trichloride Kalrez 95 289 290 874 875 2230 2231 4650 4651 9301 x x
ClO3F 72 Perchloryl Fluoride - 115 350 351 1060 1061 2800 2801 5800 5801 11501 x x
ClF3 77 Chlorine Trifluoride Kalrez 108 327 328 1000 1001 2560 2561 5340 5341 10701 x x
C2H7N 85 Dimethylamine Viton,Kalrez 102 310 311 960 961 2530 2531 5400 5401 10601 x x
SiF4 88 Silicon Tetrafluoride - 104 316 317 1000 1001 2600 2601 5400 5401 10601 x x
C3H8 89 Propane Viton 101 300 301 910 911 2420 2421 5100 5101 10101 x x
C2F4 94 Tetrafluoroethylene Viton,Buna 101 300 301 900 901 2300 2301 4900 4901 9801 x x
Si2H6 97 DISILANE - 93 282 283 853 854 2300 2301 4900 4901 9801 x x
GeF4 99 Germanium Tetrafluoride - 93 282 283 860 861 2200 2201 4700 4701 9401 x x