Manual
A-4
Brooks
®
GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Appendix A: GF40/GF80 Series Gas Table
Table A-4 GF40/GF80 Series Gas Table - Codes 108-5022, Bins SA44 to SA50
SA44 SA45 SA46 SA47 SA48 SA50
Gas Symbol
Gas
Code Gas Name Elastomer seal GF040 Low High Low High Low High Low High Low High Low High
SiCl4 108 Silicon Tetrachloride Kalrez 57 172 173 520 521 1320 1321 2751 x x x x
C3H9N 109 Trimethylamine Kalrez 79 240 241 720 721 1910 1911 4000 4001 8101 x x
SF6 110 Sulfur Hexafluoride Viton,EPDM 78 237 238 715 716 1900 1901 4000 4001 8000 8001 12101
C2F6 118 Hexafluoroethane (Freon-116) Viton,Buna 72 218 219 658 659 1750 1751 3700 3701 7401 x x
WF6 121 Tungsten Hexafluoride - 51 150 151 460 461 1200 1201 2500 2501 5001 x x
C3F8 128 Perfluoropropane Viton 51 154 155 465 466 1200 1201 2500 2501 5101 x x
C4F8 129 Octafluorocyclobutane Viton 51 154 155 465 466 1170 1171 2430 2431 4901 x x
C3F6 138 Hexafluoropropylene Viton,Buna 61 184 185 556 557 1470 1471 3050 3051 6111 x x
C2HF5 155 PENTAFLUOROETHANE (FREON-125) Viton 78 235 236 711 712 1900 1901 4000 4001 8001 x x
CH2F2 160 Difluoromethane Viton 175 533 534 1612 1613 4300 4301 9000 9001 18001 x x
CH6Si 185 Methylsilane (MONO) - 112 340 341 1050 1051 2800 2801 5900 5901 11601 x x
(CH3)3SiH 190 Trimethylsilane (TMSi) - 63 189 190 572 573 1530 1531 3200 x x x x
C5F8 266 Octafluorocyclopentene - 45 134 135 406 407 1050 1051 2200 2201 4501 x x
C4F6 270 Hexafluoro-2-butyne - 58 176 177 533 534 1400 1401 2900 x x x x
C4F6-q) 297 Hexafluoro Butadiene-1-3 - 53 160 161 500 501 1270 1271 2640 2641 5271 x x
C5F8O 354 Epoxyperfluorocyclopentene - 41 122 123 369 370 1000 1001 2100 2101 4201 x x
Si3H9N 368 Trisilylamine (TSA) - 61 181 182 560 561 1410 1411 3000 3001 6001 x x
10%GeH4/H2 509 10%Germane/Hydrogen MIX-Check components 261 800 801 2400 2401 7200 7201 15000 15001 30001 x x
10%PH3/H2 516 10%Phosphine/Hydrogen MIX-Check components 276 813 814 2500 2501 7600 7601 15500 15501 31001 x x
4.5%PH3/N2 528 4.5%Phosphine/Nitrogen MIX-Check components 281 880 881 2600 2601 7200 7201 15000 15001 30001 x x
20%O2/He 536 20%Oxygen/Helium MIX-Check components 361 1102 1103 3331 3332 10000 10001 21000 21001 42001 x x
5%H2/N2 542 5%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 31001 x x
1%B2H6/H2 557 1%Diborane Hydrogen MIX-Check components 271 850 851 2510 2511 7900 7901 16100 16101 33001 x x
1%PH3/H2 563 1%Phosphine/Hydrogen MIX-Check components 274 850 851 2531 2532 7800 7801 16000 16001 32001 x x
3%B2H6/N2 595 3%Diborane/Nitrogen MIX-Check components 271 850 851 2500 2501 7100 7101 14500 14501 29001 x x
3%H2/N2 597 3%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 30101 x x
30%He/O2 603 30%Helium/Oxygen MIX-Check components 302 950 951 2800 2801 8100 8101 17000 17001 34001 x x
30%O2/He 604 30%Oxygen/Helium MIX-Check components 346 1060 1061 3203 3204 9700 9701 20000 20001 40001 x x
4%H2/He 606 4%Hydrogen/Helium MIX-Check components 401 1200 1201 3600 3601 11000 11001 23000 23001 46001 x x
4%H2/N2 607 4%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 30101 x x
5%B2H6/Ar 615 5%Diborane/Argon MIX-Check components 354 1084 1085 3278 3279 8900 8901 18201 x x x x
50%PH3/SiH4 632 50%Phosphine/Silane MIX-Check components 191 580 581 1730 1731 4800 4801 10000 10001 20001 x x
10%O2/He 649 10%Oxygen/Helium MIX-Check components 381 1150 1151 3500 3501 10500 10501 22000 22001 44001 x x
2%SiH4/N2 653 2%SILANE/NITROGEN MIX-Check components 281 870 871 2600 2601 7300 7301 15000 15001 30001 x x
5%B2H6/N2 654 5%Diborane/Nitrogen MIX-Check components 263 804 805 2500 2501 7000 7001 14100 14101 28101 x x
.8%B2H6/N2 662 .8%Diborane/Nitrogen MIX-Check components 281 870 871 2600 2601 7300 7301 15000 15001 30001 x x
10%PH3/He 674 10%Phosphine/Helium MIX-Check components 371 1100 1101 3400 3401 10000 10001 21000 21001 43001 x x
2%B2H6/N2 695 2%Diborane/Nitrogen MIX-Check components 281 870 871 2600 2601 7200 7201 15000 15001 30001 x x
10%GeH4/Ar 698 10%Germane/Argon MIX-Check components 351 1070 1071 3300 3301 8700 8701 18000 18001 36001 x x
5%H2/He 762 5%Hydrogen/Helium MIX-Check components 401 1200 1201 3600 3601 11000 11001 23000 23001 46001 x x
5%B2H6/He 766 5%Diborane/Helium MIX-Check components 351 1100 1101 3300 3301 10000 10001 21000 21001 42001 x x
15%B2H6/H2 820 15%Diborane/Hydrogen MIX-Check components 231 710 711 2120 2121 6500 6501 13300 13301 27001 x x
3%C2H4/He 878 3%Ethylene/Helium MIX-Check components 376 1150 1151 3500 3501 10700 10701 22100 22101 45001 x x
10%B2H6/Ar 881 5%Diborane/Argon MIX-Check components 321 1000 1001 3000 3001 8100 8101 17000 17001 34001 x x
2.7%C2H4/He 897 2.7%Ethylene/Helium MIX-Check components 378 1158 1159 3502 3503 10700 10701 22200 22201 45001 x x
1%GeH4/H2 898 1%Germane/Hydrogen MIX-Check components 276 850 851 2530 2531 8000 8001 16200 16201 33001 x x
.5%GeH4/H2 910 0.5%Germane/Hydrogen MIX-Check components 281 860 861 2600 2601 8000 8001 16300 16301 33001 x x
2%PH3/H2 916 2%Phosphine/Hydrogen MIX-Check components 276 850 851 2530 2531 8000 8001 16200 16201 33001 x x
3.9%H2/N2 930 3.9%Hydrogen/Nitrogen MIX-Check components 281 860 861 2600 2601 7400 7401 15100 15101 30101 x x
10%B2H6/He 939 10%Diborane/Helium MIX-Check components 315 965 966 2918 2919 9000 9001 18400 18401 37001 x x
30%C2H4/He 946 30%Ethylene/Helium MIX-Check components 276 850 851 2551 2552 7800 7801 16000 16001 32001 x x
10%H2/He 950 10%Hydrogen/Helium MIX-Check components 381 1200 1201 3500 3501 10700 10701 22200 22201 45001 x x
15%H2/B2H6 953 15%Hydrogen/Diborane MIX-Check components 131 400 401 1200 1201 3400 3401 7100 7101 14001 x x
17%CH4/CO2 958 17%Methane/Carbon Dioxide MIX-Check components 211 650 651 2000 2001 5400 5401 11000 11001 22001 x x
20%CH6Si/H2 962 20%Methylsilane (MONO)/Hydrogen MIX-Check components 213 660 661 2000 2001 5900 5901 12000 12001 24001 x x
50%CH3SiHCl2/H2 965 50%Dichloromethylsilane/Hydrogen MIX-Check components 131 400 401 1200 1201 3100 3101 6600 6601 13001 x x
20%GeH4/H2 978 20%Germane/Hydrogen MIX-Check components 242 750 751 2240 2241 6600 6601 13500 13501 27001 x x
0.5%B2H6/He 979 0.5%Diborane/Helium MIX-Check components 401 1200 1201 3700 3701 11000 11001 23000 23001 47001 x x
COS-Special 5022 Carbonyl Sulfide (Special) - 184 562 563 1700 1701 4500 4501 9400 9401 18301 x x
For reference only, consult factory on the latest tables.
For gases not specified for SA50, contact Brooks Product Marketing.