Manual

ii
Brooks
®
Digital MFC's & MFM's
Contents Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Section 4 Maintenance & Troubleshooting
4-1 Maintenance and Troubleshooting .............................................................................................4-1
4-1-1 Troubleshooting Analog or DeviceNet version ........................................................................... 4-2
4-1-2 System Checks ..........................................................................................................................4-4
4-1-3 Cleaning Procedures.................................................................................................................. 4-6
4-1-4 Calibration Procedure ................................................................................................................4-6
Section A Essential Instructions ............................................................................................................ A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
Figures
Figure Page
Number Number
1-1 Open Collector Alarm Output. ....................................................................................................1-6
1-2 General Wiring ........................................................................................................................... 1-6
1-3 Response Performance of Brooks Digital MFC ......................................................................... 1-7
1-4 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to
0.5% Per Second Setpoint Change............................................................................................ 1-7
1-5 Model SLA5850D Digital I/O DeviceNet MFC ........................................................................... 1-11
1-6 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Connections ................. 1-11
1-7 Model SLA5850F Digital I/O FOUNDATION Fieldbus MFC with Coplanar Valve .......................... 1-12
1-8 Model SLA5851D Digital I/O FOUNDATION Fieldbus MFC ..........................................................1-12
1-9 Model SLA5853F Digital I/O DeviceNet MFC and Flanged Connections .................................. 1-13
1-10 Model SLA5853 Analog I/O MFC with Flanged Connections ....................................................1-13
1-11 Model SLA5860S Analog I/O MFM with RS-485 ........................................................................ 1-14
1-12 Model SLA5861F Digital I/O FOUNDATION Fieldbus MFM........................................................... 1-14
1-13 Model SLA5863D Digital I/O DeviceNet MFM............................................................................ 1-15
1-14 Model SLA5863 Analog I/O MFM with Flanges.......................................................................... 1-15
2-1 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version .......................................... 2-6
2-2 Common Electrical Hookups, Voltage I/O Version ......................................................................2-6
2-3 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ............ 2-7
2-4 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) ....................2-7
2-5 RS-485 Multidrop Interconnection TMFs and PC ....................................................................... 2-8
3-1 Flow Sensor Operational Diagram (VCR
TM
End Connections Shown) ........................................3-3
3-2 Externally Accessible Adjustment for all Meters/Controllers ....................................................... 3-3
4-1 Bench Troubleshooting Circuit ....................................................................................................4-2
Tables
Table Page
Number Number
1-1 Flow Ranges and Pressure Ratings...........................................................................................1-3
1-2 Calibration Select Signal ............................................................................................................1-8
1-3 Analog I/O Pin Connections .......................................................................................................1-8
2-1 Recommended Filter Size ..........................................................................................................2-3
3-1 Typical Resistor Values for Calibration Selection .......................................................................3-5
4-1 Sensor Troubleshooting ............................................................................................................. 4-4
4-2 Troubleshooting.......................................................................................................................... 4-7