Owner's manual

Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013 Brooks
®
Digital MFC's and MFM's
TRADEMARKS
Brooks .......................................................... Brooks Instrument, LLC
Brooks Service Suite ................................... Brooks Instrument, LLC
Brooks Service Tool..................................... Brooks Instrument, LLC
DeltaV ............................................................... Emerson Electric Co.
DeviceNet ...................... Open DeviceNet Vendors Association, Inc.
FOUNDATION Fieldbus ......................................... Fieldbus FOUNDATION
HART ......................................... HART Communications Foundation
ITK ..................................................................... Fieldbus FOUNDATION
Kalrez............................................. DuPont Performance Elastomers
ODVA............................. Open DeviceNet Vendors Association, Inc.
PlantWeb .......................................................... Emerson Electric Co.
Teflon .................................................E.I. DuPont de Nemours & Co.
VCO ..................................................................................... Cajon Co.
VCR ..................................................................................... Cajon Co.
Viton............................................... DuPont Performance Elastomers