Installation and Operation Manual X-VAC-CMX-eng Part Number: 541B154AAG January, 2011 Brooks® CMX Series 5 Brooks®CMX Series Heated Digital Capacitance Manometers Brooks® CMX Series Heated Digital Capacitance Manometer
Installation and Operation Manual X-VAC-CMX-eng Part Number: 541B154AAG January, 2011 Brooks® CMX Series Essential Instructions Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-VAC-CMX-eng Part Number: 541B154AAG January, 2011 Brooks® CMX Series Dear Customer, We appreciate this opportunity to service your measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-VAC-CMX-eng Part Number: 541B154AAG January, 2011 Brooks® CMX Series THIS PAGE WAS INTENTIONALLY LEFT BLANK
_CONTENTS CONTENTS _1.0 SAFETY NOTICES _1.1 SAFETY SYMBOLS _1.2 GROUNDING _1.3 EXPLOSIVE ATMOSPHERE _1.4 PART SUBSTITUTIONS AND MODIFICATIONS _1.5 GENERAL SAFETY GUIDELINES _1.5.1Unsafe acts _1.5.2Recommended practices _2.0 DESCRIPTION _2.1 BASIC DESIGN _2.2 HISTORICAL DESIGN _2.3 BROOKS CMX DESIGN _2.4 DESIGN OVERVIEW _2.5 RELAYS _2.6 ZERO OUTPUT BIAS CONTROL _2.7 CMX OPERATING TEMPERATURES _2.8 PRESSURE RANGE SELECTION CRITERIA _2.9 PRODUCT SPECIFICATIONS _2.10 ORDERING SPECIFICATIONS _3.
_CONTENTS _6.0 MODELS WITH DEVICENET 30 _6.1 DeviceNet Power Up Sequence _6.2 DEVICENET AND NETWORKING ISSUES AND SOLUTIONS _6.2.1Power-up LED Sequence Fails _6.2.2Sequence Passes, Module LED Turns Red _6.2.3Sequence Passes, Module LED is Green, Net LED is Red _6.2.4Sequence Passes, Module LED is Green, Net LED is Off _6.2.5Sequence Passes, Module LED is Green, Net LED is Flashing Green 30 30 31 31 31 31 _7.0 CMX MODELS WITH EXTENDED RANGE CAPABILITY 32 _7.1 CMX WITH EXTENDED RANGE _7.
_INTRODUCTION 1.0 1.0 SAFETY NOTICES This manual provides information for the installation and operation of the Brooks CMX Series Heated Digital Capacitance Manometers (CMs). It is imperative that this manual be reviewed prior to installation and operation of the device. Failure to comply with the warnings, cautions, and hazard notes will void the product’s warranty.
_INTRODUCTION 1.0 They are not, however, a substitute for determining your own internal safety procedures. ! CAUTION ! Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in exposure to potential hazards. Always follow established industrial safety practices when operating production equipment. 1.5.
_DESCRIPTION 2.0 2.0 DESCRIPTION NOTICE! From this point forward, the CMX Series Heated Digital Capacitance Manometers will be referred to in general terms as the CMX or CM. 2.1 BASIC DESIGN The CMX (also referred to as a capacitance manometer (CM)) is a pressure measuring instrument that senses a change in process pressure. It does this by measuring the change in capacitance caused by a change in deflection of a tensioned diaphragm. The basic design of the CMX sensor is shown in Figure 1.
_DESCRIPTION 2.0 2.2 HISTORICAL DESIGN Unfortunately the simple sensor design described previously, has a number of drawbacks. • The single large diaphragm is more sensitive to shock and vibration. • A single electrode cannot distinguish between a true pressure change and capacitance change due to thermal expansion or contraction of the sensor housing.
_DESCRIPTION 2.0 they can deposit onto the diaphragm. This shield also protects the diaphragm from thermal radiation. 4. Brooks uses a Guard Volume, which is an annular vacuum surrounding the sensor. This acts as a thermal insulator shielding the sensor from ambient temperature variations and also as a “trash collector” for condensable and deposited process residual matter. 5. Electrodes can behave as antennae for RF radiation and strong magnetic fields.
_DESCRIPTION 2.0 2.5 RELAYS Two electromechanical relays are provided in CMX configured with the 15-Pin D-Sub connector option (see Ordering Code on page 11). The relays are UL recognized components rated for 100,000 cycles at 1A, 30V DC, Resistive. Associated LED indicators located on top of the device illuminate when the coil of the associated relay is energized. Each relay has a normally open (NO) and a normally closed (NC) contact with a common connection (Single Pole Double Throw).
_DESCRIPTION 2.0 Programming is accomplished through a separate control and monitoring device plugged into the RS-485/2.5 mm serial Diagnostics port (DIAG) connection located on the top of the CMX (See Figure 6). The 2.5 mm serial port connection communicates through a proprietary Brooks communication protocol at 9600 baud.
_DESCRIPTION 2.0 zero adjust operation will fail anyway. If the chamber pressure is within the adjustment range, the CMX will zero to that pressure, which is not the actual pressure in the chamber. That is, the CMX will output a zero signal at a non-zero chamber pressure.) 4. Connect CMX GUI to CMX and verify communication. (Refer to the CMX User Software manual, page 37.) Set Bias Adjust Control value, in units of mV, to achieve the desired analog output voltage.
_DESCRIPTION 2.0 Table 2: CMX Model Application MODEL APPLICATION Etch CVD PROCESS CMX45 CMX100 CMX160 Metal NR R OK Oxide R OK OK Silicon/ Polysilicon R OK OK Dielectric OK R NR Photoresist R OK OK Metal NR OK R Oxide OK R OK Silicon/Polysilicon OK R OK Dielectric NR OK R R OK PVD R = RECOMMEND NR OK = ACCEPTABLE NR = NOT RECOMMENDED 2.
_DESCRIPTION 2.0 2.9 PRODUCT SPECIFICATIONS Table 3: Digital CM Specifications GAUGE OPERATING TEMPERATURE 45°C Range 100°C 160°C 0.1, 1, 2, 10, 100, 1000 Torr 1, 2, 10, 100, 1000 ± 0.25% of reading ± 0.15% of reading ± 0.15% of reading ± 0.15% of reading ± 0.15% of reading ± 0.15% of reading ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.25% of reading ± 0.35% of reading ± 0.
_DESCRIPTION 2.0 2.10 ORDERING SPECIFICATIONS C M X 4 5 6 7 8 9 10 12 Reserved for Brooks Use Operating Temperature 1 = CMX45 (45°C) 2 = CMX100 (100°C) Calibration Orientation 3 = CMX160 (160°C) Range 100 m Torr 250 m Torr 500 m Torr 1 Torr 2 Torr 5 Torr 10 Torr 20 Torr 50 Torr 100 Torr 500 Torr 1000 Torr 1.33 mbar 2 mbar 5 mbar 10 mbar 100 mbar 500 mbar 1000 mbar 13.33 Pa 33.32 Pa 66.65 Pa 133.3 Pa 266.6 Pa 666.6 Pa 1.333 kPa 2.666 kPa 13.33 kPa 66.66 kPa 133.
_DESCRIPTION 2.0 2.11 PHYSICAL DIMENSIONS “A” DIMENSION* “B” DIMENSION FITTING CODE CMX45 / CMX100 OVERALL LENGTH .05” OD Tube 0 26.3mm [1.04”] 141.70mm [5.58”] KF-10 Flange 1 39.0mm [1.54”] 154.40mm [6.08”] 154.40mm [6.08”] FITTING TYPE KF-16 Flange 2 39.0mm [1.54”] KF-25 Flange 3 30.1mm [1.19”] 145.50mm [5.73”] 8 VCR Female 4 52.24mm [2.06”] 167.64mm [6.60”] Mini CF 5 27.56mm [1.09”] 142.96mm [5.63”] *See Figure 14:, Dimensions With Connectors.
_DESCRIPTION 2.0 “A” DIMENSION “B” DIMENSION FITTING CODE CMX45 / CMX100 OVERALL LENGTH .05” OD Tube 0 26.30mm [1.04”] 154.30mm [6.08”] KF-10 Flange 1 39.00mm [1.54”] 167.00mm [6.58”] KF-16 Flange 2 39.00mm [1.54”] 167.00mm [6.58”] KF-25 Flange 3 30.1mm [1.19”] 158.10mm [6.23”] FITTING TYPE 8 VCR Female 4 52.24mm [2.06”] 180.24mm [7.10”] Mini CF 5 27.56mm [1.09”] 155.56mm [6.13”] *See Figure 14:, Dimensions With Connectors.
_DESCRIPTION 2.0 FITTING TYPE “A” DIMENSION “B” DIMENSION FITTING CODE CMX160 OVERALL LENGTH 159.30mm [6.28”] .05” OD Tube 0 26.30mm [1.04”] KF-10 Flange 1 39.00mm [1.54”] 172.00mm [6.78”] KF-16 Flange 2 39.00mm [1.54”] 172.00mm [6.78”] KF-25 Flange 3 30.1mm [1.19”] 163.10mm [6.33”] 8 VCR Female 4 52.24mm [2.06”] 185.40mm [7.30”] Mini CF 5 27.56mm [1.09”] 160.56mm [6.43”] * See Figure 14:, Dimensions With Connectors.
_DESCRIPTION 2.0 “A” DIMENSION “B” DIMENSION FITTING CODE CMX160 OVERALL LENGTH .05” OD Tube 0 26.30mm [1.04”] 147.00mm [5.79”] KF-10 Flange 1 39.00mm [1.54”] 159.70mm [6.29”] KF-16 Flange 2 39.00mm [1.54”] 159.70mm [6.29”] 150.80mm [5.94”] FITTING TYPE KF-25 Flange 3 30.10mm [1.19”] 8 VCR Female 4 52.24mm [2.06”] 172.94mm [6.81”] Mini CF 5 27.56mm [1.09”] 148.26mm [5.84”] *See Figure 14:, Dimensions With Connectors.
_DESCRIPTION 2.0 2.12 CMX DIMENSIONS WITH CONNECTORS Not to Scale. Additional Flanges and Fittings available. Contact Brooks Technical support for information. Figure 14: Dimensions With Connectors O 81.0 mm (3.19 inch) 77.4 mm (3.05 inch) Figure 15: Analog 9-Pin Top Dimensions O 81.0 mm (3.19 inch) 77.4 mm (3.05 inch) Figure 16: Analog 15-Pin Top Dimension p.
_DESCRIPTION 2.0 O 81.0 mm (3.19 inch) 77.4 mm (3.05 inch) Figure 17: DeviceNet Top Dimension O 81.0 mm (3.19 inch) 77.4 mm (3.05 inch) Figure 18: Zero Bias (Indy) 15-Pin Table 4: CMX Top LED Indicators, Switches, and Connectors ITEM DESCRIPTION DIAG 2.5mm Diagnostic Port - supports diagnostic functions via an RS-485 based communications protocol. ZERO When pressed, the gauge will automatically adjust the pressure signal to zero volts. MSD ADDRESS Most Significant address Digit (MAC ID).
_DESCRIPTION 3.0 ! CAUTION ITEM ! DO NOT mount the CMX with the inlet tube port facing upward (see Figure 19). The sensing diaphragm may be damaged by process contamination, which will adversely affect the operation and will void the warranty. ! WARNING 9-PIN D SUB (FEMALE) DESCRIPTION Analog output signal available on DeviceNet models. ! The CMX may not be used in any application where it may be exposed to conditions or materials that could cause damage to the device or injury to the operator.
_INSTALLATION 3.0 3.0 INSTALLATION 3.1 CMX MOUNTING CONSIDERATIONS efg CAUTION ! efg Ab cd NO Figure 19: Mounting Orientation 3.2 PLUMBING SIZE CAUTION ! CAUTION ! The tubing between the CMX and the system chamber must be of equal or greater internal diameter than the CMX inlet tube. ! g ! Ab cdef ! For an CMX with full scale 01 Torr or less, the mounting orientation for the device is specified for optimal performance.
_INSTALLATION 3.0 3.5 MECHANICAL CONNECTION 1. Vent the vacuum system. 2. At the location of installation, remove the CMX from the shipping container. Take care to not drop the device or contaminate it with dust or other foreign matter. 3. Install the CMX in the vacuum system. Take care not to twist or apply mechanical loading on the CMX housing or tube. 3.
_INSTALLATION 3.
_INSTALLATION 3.0 • Green – unit is at the proper operating temperature. • Red – unit is over the proper operating temperature or at a fault condition. 1. After assuring power has been removed to the system, connect the appropriate 9-pin (Figure 23) and 5-pin connector (Figure 24). If no connector cable is available, use one the following pin-out table for construction of one. 2. Connect the 9-pin cable to the CMX. 3. Hand tighten the lock screws to secure the connector. 4.
_INSTALLATION 3.0 3.7.2 DeviceNet Cables Table 5: DeviceNet Cables CABLE LENGTH BAUD RATE DROP-LENGTH (Maximum Meters) DROP-LENGTH (Cumulative Meters) Lthick + 5 Lthin 500 125k 6 156 Lthick = 2.5thin 250 250k 6 78 Lthick + 5 Lthin 100 500k 6 39 4 3 3 ............5 5...........
_INSTALLATION 3.0 3.8 ELECTRICAL SIGNAL DESCRIPTION Table 6: Electrical Signals Descriptions Signal Description Notes + 15 VDC Positive power supply input for the CMX. Wire size should be selected to minimize the voltage drop between the power source and the CMX. -15 VDC Negative power supply input for the CMX. Chassis ground This pin connects to the system chassis ground when the CMX is mounted.
_OPERATION 4.0 ! CAUTION ! Never over-pressurize the CMX. The CMX is designed to withstand a positive over pressure of 17 PSIA or 125% of rated full scale, whichever is greater, within the pressure port. Pressures greater than this may damage the pressure-sensitive diaphragm and cause a failure of the CMX. ! CAUTION ! Never exceed the ambient temperature operating limits. These limits are listed in the Specifications Table 3, beginning on page 10.
_OPERATION 4.0 4.4 DEVICE WARM-UP When an CMX is installed and powered up on a system or tool, the signal output will be variable for a period of time. Once the temperature profile of the device reaches a steady-state condition and thermal saturation has occurred, the variance in the signal output will be negligible.
_OPERATION 4.0 The temperature indicator status can also be monitored remotely through pin 1 of the DB15 connector, or through pin 3 of the DB9 connector. This pin is normally driven high to 3.3 volts when the temperature LED is Green. 4.6 ZEROING THE CMX When the gauge is placed into operation for the first time or after a shut down of the system, ZERO should be set using the following steps. • Adjust ZERO at the ambient temperature at which the gauge is normally operated.
_MAINTENANCE 5.0 5.0 MAINTENANCE AND TROUBLESHOOTING 5.1 CALIBRATION The Brooks CMX has been manufactured, tested and is compliant to all requirements of the applicable published specifications. All devices used for the manufacture and test of these instruments have traceability to National Institute of Standards (NIST) according to ISO 10012-1. Digital CMs should be calibrated every 6-12 months depending on the application and actual usage.
_MAINTENANCE 5.0 5.4 REMOVAL OF CMX DANGER Contaminated parts can pose a health hazard. Before beginning work, determine whether any parts are contaminated. Adhere to all regulations and take all necessary precautions when handling and shipping contaminated parts. ! CAUTION ! Handle vacuum products with care. Dirt and damage severely impair the function of the vacuum component. 1. Vent the vacuum system to atmospheric pressure. 2. Remove power to the CMX. 3.
_DEVICENET MODELS 6.0 6.0 MODELS WITH DEVICENET 6.1 DEVICENET POWER UP SEQUENCE Applying power to a DeviceNet CMX initiates a power-up sequence that initializes the embedded Vacuum Measurement system along with performing a Module and Network test. The real time status of these tests is indicated on the Module and Network LEDs on the top of the device. After power is applied, the CMX flashes the Module and Network LEDs according to the following sequence.
_DEVICENET MODELS 6.0 6.2.1 Power-up LED Sequence Fails If the Module or Network LEDs fail to sequence from OFF to Red to Green as previously described, there is either a network power supply problem or the device has most likely experienced an unrecoverable fault. The corrective action is to verify that the power supply is providing 11 to 24 volts to the DeviceNet network on the correct cable conductors.
_EXTENDED RANGE 7.0 7.0 CMX MODELS WITH EXTENDED RANGE CAPABILITY 7.1 CMX WITH EXTENDED RANGE The CMX can be configured with Extended Range (ER) Calibration. The ranges that are currently supported for extended range calibration are 10T, 50T, and 500T. Legacy CMX devices are calibrated from 10% to 100% of full-scale pressure (over one pressure decade). The Extended Range CMX is calibrated from 1% to 100% of full-scale (over two pressure decades). 7.
_EXTENDED RANGE 7.0 The series communication port signals are included in the DB9 connector which enables the user to communicate to the device over the same cable as is used for power and analog pressure output. Contact Brooks regarding questions concerning the digital communications protocol. p.
_SERVICE AND RETURN 8.0 8.0 SERVICE AND RETURN 8.1 SERVICE INSTRUCTIONS Contact the nearest Brooks Technical Support office prior to returning any CMX. In response to your call, a qualified Technical Support Engineer will assist in diagnosing the CMX. When contacting the Technical Support Group, please have available: • the serial number on the CMX case, • the gas(es) to which the CMX has been exposed, and • a description of the process system on which the CMX is installed.
_SERVICE AND RETURN 8.0 Figure 26: Contamination Disclosure Form (Example) p.
_ p.
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9.0 - Essential Instructions Installation and Operation Manual X-VAC-CMX-eng Part Number:541B154AAG January, 2011 Brooks® CMX Series Romanian IndicaĠii de referinĠă CitiĠi-le întâi pe acestea! Brooks Instrument îúi proiectează, produce úi testează produsele într-un mod ce respectă un mare număr de standarde autohtone úi internaĠionale. Aceste instalaĠii trebuie amplasate, exploatate úi întreĠinute corespunzător, pentru ca în toate situaĠiile, domeniul lor de lucru să corespundă operării normale.
9.0 - Essential Instructions Installation and Operation Manual X-VAC-CMX-eng Part Number:541B154AAG January, 2011 Brooks® CMX Series Slovak Základné príkazy PreþítaĢ pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalovaĢ, prevádzkovaĢ a udržiavaĢ, na zabezpeþenie ich spoĐahlivej a normálnej prevádzky v celom pracovnom rozsahu.
9.0 - Essential Instructions Installation and Operation Manual X-VAC-CMX-eng Part Number:541B154AAG January, 2011 Brooks® CMX Series Slovene Osnovna navodila Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim domaþim in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podroþju funkcioniranja.
9.0 - Essential Instructions Installation and Operation Manual X-VAC-CMX-eng Part Number:541B154AAG January, 2011 Brooks® CMX Series Spanish Instrucciones básicas ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
9.0 - Essential Instructions Installation and Operation Manual X-VAC-CMX-eng Part Number:541B154AAG January, 2011 Brooks® CMX Series Swedish Väsentliga anvisningar. Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation.
Installation and Operation Manual X-VAC-CMX-eng Part Number: 541B154AAG January, 2011 Brooks® CMX Series THIS PAGE WAS INTENTIONALLY LEFT BLANK
Brooks® CMX Series Installation and Operation Manual X-VAC-CMX-eng Part Number: 541B154AAG January, 2011 LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
