Product specifications

Batch Management
3BDS011222-510 B 327
2. Verify the phases match the equipment phases defined for the controller (EPT
control modules only).
3. Configure equipment names.
4. Specify equipment attributes. Identify characteristics of the equipment that
could have an effect on which equipment should be used for a particular batch.
5. Specify which phases can run on which equipment.
6. Define equipment groups.
Procedure Configuration
Once the equipment has been configured, procedures can be created that reference
the equipment.
Batch Management procedures are configured by creating PFCs (procedure function
charts). Procedures are drawn using an object oriented approach. The PFC created
during procedure configuration will also be used at run time by the operator to
monitor the progress of a batch.
The steps to create a procedure are:
1. Configure the procedure header providing information about the procedure.
2. Configure the standard operating procedure (SOP), which is a textual
representation of the procedure (optional).
3. Configure procedure parameters.
4. Create the PFC.
a. Add objects representing batch manager actions to acquire equipment.
b. Add objects representing phases, subprocedures, compute batch manager
actions, message batch manager actions, and so on, which includes
defining each object. Procedure specific values for procedure and phase
parameters can be included.
c. Add objects representing batch manager actions to release equipment.
d. Add connector objects linking objects on the PFC.
Prior to procedure configuration, the designer may want to specify batch cells.