Spectrum House Finmere Road Eastbourne E.Sussex BN22 8QL UK Tel: +44 (1) 323 639974 Fax:+44 (1) 323 739654 E-mail : sales@coaxialpower.com Web: www.coaxialpower.
oaxial Power Systems Ltd Spectrum House, Finmere Road, Eastbourne, E. Sussex, BN22 8QL Tel: +44(0)1323 639974 Fax: +44(0)1323 739654 E-mail: sales@coaxialpower.com Web: www.coaxialpower.com High Efficiency RF Generator Model RFG4K-13, 4000 Watts at 13.56MHz Model RFG4K-27, 4000 Watts at 27.12MHz The high efficiency range of RF generators are precision units intended for scientific and industrial applications.
An external voltage of 0 to 5Volts can be used to control the output. This is particularly useful in sputter coating applications where the d.c. voltage developed across the plasma dark space can be controlled rather than the RF power. General Specifications – RFG4K-13 and RFG4K-27 RF Generators Output frequency RFG4K-13, 13.56MHz. RFG4K-27, 27.12MHz. Output power 4000Watts Frequency stability Crystal controlled: 13.56MHz +/-1.4kHz 27.12MHz +/-2.
Safety Labels Labels are provided to inform service and operating personnel of conditions that may cause personal physical injury or damage to the equipment from misuse.
Unpacking Items included in carton. RF Generator. 25 Way remote connector Instruction Manual Remove all contents from carton and inspect generator for shipping damage. If there is any evidence of damage contact Coaxial Power Systems Ltd within 5 days of receipt. Installation Installation must only be performed by suitably qualified authorised personnel. This generator is designed to be fitted inside a suitable 19” rack enclosure. It should not be operated unless so fitted.
Connect the 25-Way remote connector into socket on rear panel (factory wired to bridge external interlock) Connect the earth stud on the rear panel to a safe reliable earth using a green/yellow insulated wire (14-gauge minimum) which should be as short as practical. Screw the cable connector on to the RF Output connector on the generator.
Front Panel Controls Output Set The control sets the output power, provided the unit is in “local power set” mode, meaning the remote power switch is in the down position and the remote power link is not made in the remote control connector. RF On and Off switches: The switches turn the RF output on and off, provided the unit is in “local on/off” mode, meaning the remote on switch is in the down position and the remote on/off link is not made in the remote control connector.
Remote control of RF power Operating this switch locks out the Output set control on the front panel so that RF power is controlled by a voltage on the remote connector. Power control divide by ten This simply reduces the voltage span of the output set control to allow the setting of powers up to 10% with finer resolution.
Interlock Indicators: Ref. Pwr: this is a warning of a high reflected power level and illuminates if the reflected power exceeds 16% of the maximum capable generator output. Cooling: this relates to over temperature of the internal power amplifier module. If illuminated, RF On will not function until module has reached a safe temperature. NB. This interlock will operate when there is : Inadequate ventilation Defective cooling. RF module fault.
Remote Control connector The 25 way D type connector on the rear panel allows remote control of the generator. Below is a description of the various remote functions. Pin Function 1 2 3 4 5 6 7 8 9 10 11 12 13 Remote power neg. Remote power pos. Incident power Reflected power Remote RF On Ground Ground Auxiliary feedback neg. Auxiliary feedback pos.
Description Of Remote Status Connections / Functions Pin 3 Incident power. Pin 3 is an analogue output voltage 0-5 volts representing zero to maximum output power. N.B. This output can source 5mA. Pin 4 Reflected power. Pin 4 is analogue output voltage 0-5 volts representing 0-maximum output power. N.B. This output can source 5mA. Pin 14 RF Off light. Pin 9 is an open collector transistor that grounds with RF Off. This can sink 45mA 20V. Pin 19 RF On light.
Description Of Remote Switching and Power control Remote RF ON Remote Output set Pin 5 RF On/Off. To enable this function connect pin 10 to a ground pin. To enable RF connect pin 5 to a ground pin, via a switch, transistor or relay. This is not latching, grounding pin 5 will switch RF On, and removing this ground will switch RF Off. N.B. Interlock functions will operate normally when using this function. Pin 15 Remote RF On/Off Switch Enable.
Description Of Remote Interlock Connection / Function Pin 13 External Interlock. When this pin is connected to +12v it allows the generator output to be switched on. When this pin is open-circuit the “External” warning light will illuminate. Pin 25 Positive supply, +12V.
Description Of Auxiliary feedback Connection / Function Auxiliary feedback is typically used in vacuum processes in order to control the dark space bias potential. The following drawing shows the connections to link the CPS RF generator to a CPS automatic matching network controller. Pin 9 Auxiliary feedback -ve. To enable this function connect pin 16 to a ground pin. The feedback signal should be a negative voltage in the range 0v to –5v.
Description Of 3 Phase Mains Input Connection Round connector pinout Pin 1 Reserved Pin 2 Reserved Pin 3 Live Phase 2 Pin 4 Earth Pin 5 Live Phase 3 Pin 6 Live Phase 1 Pin 7 Neutral Neutral is mandatory, failure to provide a neutral will result in damage Pulse Operation. Pulse mode is selected by the Pulse / CW switch on the front panel. The pulse signal should be TTL (active high).
CPS:Doc 20017 V1 24/01/2012 Page 16 Issue 1 24/01/2012
