Operating instructions

CPS:Doc 20017 V1 24/01/2012 Page 3 Issue 1 24/01/2012
An external voltage of 0 to 5Volts can be used to control the output. This is particularly
useful in sputter coating applications where the d.c. voltage developed across the
plasma dark space can be controlled rather than the RF power.
General Specifications – RFG4K-13 and RFG4K-27 RF Generators
Output frequency
RFG4K-13, 13.56MHz.
RFG4K-27, 27.12MHz.
Output power
4000Watts
Frequency stability
Crystal controlled:
13.56MHz +/-1.4kHz
27.12MHz +/-2.7kHz
Output impedance
50
Output connection
7/16 type/50
Power control
Analogue control system
allows power or external
feedback control. Output
stability is +/-1% for +/-15%
variation in line.
VSWR capability
Can withstand any VSWR at
any phase angle
Harmonic output
Better than 40dB below
fundamental
Output envelope
ripple
Less than 1% of full
amplitude
Pulse operation
SMA TTL input on rear
panel.
Minimum pulse width 40s.
The external power control
signal should vary the peak
output from 0 to 4000W,
with a pulse-on duty cycle
from zero to continuous DC
(100% duty cycle.)
The front panel display
automatically shows pulse
output levels by utilising
sample/hold technology
Front panel controls
Line
RF on
RF off
Output power set
Pulse/CW switch
Remote switches
Menu switches
Front panel indicator
RF power on
RF power off
Front panel display
Vacuum fluorescent display
showing:
Forward (Incident) Power
Reflected Power
Reflected power exceed
limit
Remote operation
Timer
Cooling interlock
External interlock
AMN display (option)
Rear panel
switches/connectors
Remote connector (25-way
‘D’)
Common exciter
output(SMA)
Common exciter
input/external signal
source(SMA)(max. 13dBm)
Pulse input connector
(SMA)
Line input
AMN display(option)
RF output connector (N50)
Remote control
Accessed via rear panel 25-
way ‘D' type socket
indicators:
RF on/off (open collector
100mA)
Incident power
Reflected power
RF on/off (contact closure)
Interlock (contact closure)
Output set 0-5Volts = 0-
100%
Remote output set request
External feedback
Remote RF on/off request
Cooling
Forced air – air intake
through front, exhaust
through rear
Line
380-415 VAC Three phase
and Neutral
50/60Hz
Size
Full rack mounting 5U high
550mm deep (external
connectors may protrude an
extra 50mm)
Weight
25kg
Finish
Front Panel -RAL7135 light
grey
Rear Panel - Stainless Steel
Cover - Stainless Steel
Environment
Operating temperature:
0-35°C (-20° to +65° C
storage)
Standards
EN61000-3-2:2006
EN6100-3-3/A2:2005
EN61326-1:2006
EN61010-1:2001