Vacuum Solutions Application Support Service LEYBOLD VACUUM GA05118_1302 TURBOVAC Turbomolecular pumps with grease-lubricated bearings idealvac.com (505)872-0037 idealvac.
Description Contents Page Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 Compatibility with pumped media. . . . . . . . . . . . . 2 1.1 Standard equipment . . . . . . . . . . . . . . . . . . . . . . . 3 1.2 Order data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 1.3 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 1 Description 1 2 2.1 2.2 2.3 2.4 2.5 2.6 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Description 1.1 Standard equipment Both the purge gas port and the airing port are blanked off for shipping. The TURBOVAC is shipped in a sealed PE bag which also contains a desiccant. In addition the pivoted threaded fittings used to make the coolant connection are included as standard equipment for the TURBOVAC 151, 361 and 600; if needed, they can be used to replace the hose nipples installed at the factory. The maximum effective life of the desiccant is one year.
Description 1.3 Technical data TURBOVAC High-vacuum port nom.diam. 50 50 50 50 50 D2 40 KF 40 CF 63 ISO-K 63 CF 63 ISO-K Pumping speed for N2 l/sec 33 33 55 55 55 Ultimate pressure mbar 8·10-9 < 10-9 8·10-9 < 10-9 < 10-9 0.5 0.5 0.5 0.5 15 Forevacuum pressure, max. N2 mbar Recommended forevacuum pump TRIVAC D 2.5 E D 2.5 E D 2.5 E D 2.
Description TURBOVAC High-vacuum port nom. diam.
Description A A F C B E D B F TURBOVAC 50 D2 TURBOVAC 151 C; TURBOVAC 361 C is similar A B F TURBOVAC 50 Fig.
Description A A C C B D D B E E F F TURBOVAC 600 C TURBOVAC 1000 C A B C D E F High-vacuum connector flange Forevacuum connector flange Airing flange Purge gas flange Connection for water cooling Electrical connection Fig.
Connections Operating environment and cooling TURBOVAC No additional cooling required if all these conditions are satisfied Air or water cooling required Water cooling required if any one of these conditions prevails 50 D2 Ambient temperature < 30° C No bakeout operations High-vacuum pressure < 10-3 mbar Ambient temperature 30 to 40 °C Bakeout operations High-vacuum pressure 10-3 to 10-2 mbar Forevacuum pressure 5·10-1 to 2 mbar Ambient temperature 40 - 45 °C Bakeout operations High-vacuum pressure
Connection max. 100 mm (4 inch) max. 100 mm (4 inch) max. 100 mm (4 inch) Incorrect Fig. 4 Permanent flanging of the TURBOVAC to the vacuum chamber 2.1 Operating environment When using the TURBOVAC inside a magnetic field, the magnetic induction at the pump housing surface may not exceed the following values: TURBOVAC 50: B = 7 mT TURBOVAC 151 – 1000: B = 5 mT in case of radial impingement B = 15 mT in case of axial impingement Provide suitable shielding measures if these values are exceeded.
Connection Install outer centering ring Fig. 5 Using ISO-K flanges Braking Clamping torque [Nm] bolts TURBOVAC 50 63 4 50 D2 150 4 151/151 C 283 4 361/361 C 580 6 600 C 1486 10 1500 1500 16 10 1000 C DN 160 DN 250 Clamping bolts made of steel must be torqued down to 35 Nm, those made of stainless steel to 50 Nm. When installing CF flanges, use only the bolts specified (tightening torque is 15 Nm for DN 40 CF, 30 Nm for DN 63 CF and larger).
Connection Legend for Fig. 6 1 Turbomolecular pump 2 Forevacuum test point 3 Forevacuum pump 4 Anti-vibration bellows 5 Adsorption trap 6 Forevacuum valve 7 Airing valve 8 High-vacuum valve 9 Purge gas connection 10 Valve in the roughing pump line 11 Electronic frequency converter — — — — Roughing pump line; recommended to achieve the shortest possible cycling times Fig.
Connection 2.3 Making the forevacuum connection A suitable forevacuum pump is to be connected to the forevacuum connection flange. Fig. 6 shows schematically the design of a pump system incorporating a TURBOVAC turbomolecular pump and a TRIVAC forevacuum pump with anti-suckback valve. When using a forevacuum pump not having an antisuckback valve, a separate safety valve should be provided.
Connection TURBOVAC 600, 1000 50 l/h 40 80 l/h 70 30 60 20 10 0 5 10 15 20 25 30 °C 35 Cooling water temperature Cooling water flow Cooling water flow TURBOVAC 50 50 40 30 20 10 TURBOVAC 151, 361 0 Cooling water flow 50 l/h 40 5 10 15 20 25 30 °C 35 Cooling water temperature 30 20 10 0 5 10 15 20 25 30 °C 35 Cooling water temperature Fig.
Operation 103 TURBOVAC 50 mbar Starting pressure TURBOVAC 151 to 1000 102 101 Sf = Pumping speed at the forevacuum pump (m3/h) V = Chamber volume (m3) 100 0 25 50 75 100 h Sf / V -1 125 Fig. 8 Determining the starting pressure for a TURBOVAC when evacuating larger volumes 3 Operation 3.2 Bakeout 3.1 Switching on If pressures in the range of 10-8 mbar are to be developed within a short period of time, the vacuum chamber and the components installed therein will have to be baked out.
Operation 103 mbar Forevacuum pressure 102 10 TURBOVAC 50 TURBOVAC 151, 361 1 TURBOVAC 600, 1000 10-1 10-2 0 5 10 15 20 25 30 Time 35 s 40 Fig. 9 Curves showing the pressure rise 3.4 Switching off 3.5 Venting Switch off the TURBOVAC at the TURBOTRONIK. As to suitable gases, see Chapter 2.5. Refer to the TURBOTRONIK operating instructions for details. Venting Methods Switch off the forevacuum pump. Air the TURBOVAC before it has come to a full standstill; refer to Section 3.5.
Operation Speed of the Pressure Rise All turbomolecular pumps may be vented at full speed. However, the pressure must not increase faster than specified through the pressure rise curve. The pump must be vented significantly slower when there is the risk of particles entering into the pump from the process. During venting, the flow must be of the laminar type in both the vacuum chamber and the turbomolecular pump.
Maintenance 4 Maintenance After 15,000 operating hours at the latest a standard bearing exchange will be recommended for the TURBOVAC 50 to 361 C. For the TURBOVAC 600 C and 1000 C a standard bearing exchange will be required after 10,000 operating hours at the latest. Moreover we recommend to have the rotor assy. exchanged , depending on the thermal stress on the rotor, after 45,000 to 100,000 operating hours. This can only be done by Leybold Service. For this ask for a quotation.
Troubleshooting 5 Troubleshooting Warning Are the connections . . . - from the mains power cord to the frequency converter - at the connector cable from the frequency converter to the mains network in good working order? When the connector cable to the TURBOVAC is attached, the outputs of the TURBOTRONIK frequency converter are not free of If a water flow monitoring device is connected, is it functioning properly? voltage.
EC Manufacturer’s Declaration in the spirit of Appendix IIb to the 89/392/EEC Machinery Guidelines We, the Leybold Vakuum GmbH, declare herewith that the commissioning of the incomplete machine designated below is prohibited until such time as it has been determined that the system in which this complete machine is to be installed corresponds with the EC Machinery Guidelines. At the same time we certify conformity with the LowVoltage Guidelines 73/23/EEC. When using the appropriate Leybold accessories, e.
Notes 20 GA05118_1302 - 01/2004
Declaration of Contamination of Vacuum Equipment and Components Copies: Page 1 (white) to manufacturer or representative - Page 2 (yellow) attach to consignment packaging securety - Page 3 (blue) copy for file of sender The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declaration.
Sales and Service Net Worldwide USA: P.R. China: Japan: LEYBOLD VACUUM ITALIA S.p.A. 8, Via Trasimeno 20128 Milano Sales: e-mail: sales@leybold.it Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 Service: e-mail: service@leybold.it Phone: +39-02-27 22 31 Fax: +39-02-27 20 96 41 LEYBOLD VACUUM USA INC. 5700 Mellon Road Export, PA 15632 e-mail: info@leyboldvacuum.com LEYBOLD VACUUM (Tianjin) International Trade Co., Ltd. Beichen Economic Development Area (BEDA), Tianjin, 300400, China.
