Specifications

9-50
[ 2 ] Binary-coded Level Registration
(1) Manual
Binary process registration tool Q Click on in the tool bar.
The binary process registration tool appears.
R Select a window for measuring the histogram with
process range (A).
S Set the detection mode (B) to Manual.
T Click on Histogram.
The histogram appears.
U Drag the slider (C) and set the lower limit of binary-
coding level.
V Drag the slider (D) and set the upper limit of binary-
coding level.
Sliders (C and D) can be dragged (changed) only
when the detection mode (B) is set to Manual.
(2) Automatic
Binary process registration tool Q Click on in the tool bar.
The binary -coded register tool appears.
R Select a window for measuring the histogram with
the process range (A).
S Set the detection mode (B) to automatic mode
(mode method, discriminant analysis method, and P
tile method). If you are using a method other than
the P tile method of detection, this is the end of the
procedure.
T Specify the reference area (C) used for the P tile
method.
U Specify the object (D) of the area to measure with
the P tile method.
CD
AB
ABCD