Technical Data Sheet No. TD9805M Rev. L Date of issue: September, 2006 OPERATING MANUAL FOR DMF DIGITAL MASS FLOW CONTROLLERS P.O. Box 373 Michigan City, IN 46361 USA Phone: (219) 879 8000 FAX: (219) 879 9057 E mail: info@dwyer.com Internet: http://www.dwyer-inst.
TABLE OF CONTENTS 1. UNPACKING THE DMF MASS FLOW CONTROLLER........................1 1.1 Inspect Package for External Damage.............................................. 1 1.2 Unpack the Mass Flow Controller....................................................... 1 1.3 Returning Merchandise for Repair.....................................................1 2. INSTALLATION.................................................................... 1 2.1 Primary Gas Connections..........................................
APPENDIX 1 COMPONENT DIAGRAM...................................................... 21 APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)..................................... 25 APPENDIX 3 DIMENSIONAL DRAWINGS.................................................. 29 APPENDIX 4 31 SENDING COMMANDS TO THE DMF........................................ APPENDIX 5 37 SDPROC TABLES: GAS DEPENDENT VARIABLES.................... 39 GAS INDEPENDENT VARIABLES............... APPENDIX 6 WARRANTY..............................
1. UNPACKING THE DMF MASS FLOW CONTROLLER 1.1 Inspect Package for External Damage Your DMF Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately. 1.
Attitude sensitivity of the Mass Flow Controller is +15F. This means that the gas flow path of the Flow Controller must be horizontal within those stated limits. Should there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the DMF transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and drafts.
RS-485 option: The RS485 converter/adapter has to be configured for: multidrop, 2 wire, half duplex mode. The transmitter circuit has to be enabled by TD or RTS (depending on which is available on the converter/adapter). Settings for the receiver circuit usually should follow the selection made for the transmitter circuit in order to eliminate Echo. Pin 11 (-) of the “D” connector has to be connected to T- or R- on the RS-485 converter/adapter.
FIGURE b-1, WIRING DIAGRAM FOR DMF TRANSDUCERS.
PIN FUNCTION 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 +15 VDC Power Supply 0-5 VDC Flow Signal (4-20mA Option) 0-5 VDC Set Point Input (4-20mA Option) Force Valve Open Control Force Valve Closed Control (Reserved) (Reserved) Relay No. 1 - Common Contact Relay No. 1 - Normally Open Contact Relay No.
Use of the DMF flow transducer in a manner other than that specified in this manual or in writing from Dwyer, may impair the protection provided by the equipment. 3. PRINCIPLE OF OPERATION The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube. The remainder of the gas flows through the primary flow conduit.
4.1 DMF Mass Flow Controllers ACCURACY: +1% of full scale, including linearity for gas temperatures ranging from 59FF to 77F F (15F C to 25F C) and pressures of 10 to 60 psia (0.7 to 4.1 bars). REPEATABILITY: +0.15% of full scale. TEMPERATURE COEFFICIENT: 0.1% of full scale/ FC. PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar). RESPONSE TIME: DMF 41401-41411: 300ms time constant; approximately 1 second to within +2% of set flow rate for 25% to 100% of full scale flow.
Dwyer makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models. INLET AND OUTLET CONNECTIONS: 1/4" (DMF 41401-41433) (DMF 41842) or 3/8" compression fittings standard; 1/8" or 3/8" compression fittings and 1/4" VCR7 fittings are optional.
FLOW RANGES TABLE I DMF 41 LOW FLOW MASS FLOW CONTROLLERS* CODE scc/min [N2] CODE std liters/min [N2] 401 0 to 10 07 0 to 1 402 0 to 20 08 0 to 2 403 0 to 50 09 0 to 5 404 0 to 100 10 0 to 10 405 0 to 200 406 0 to 500 TABLE II DMF 36 MEDIUM FLOW MASS FLOW CONTROLLERS* CODE standard liters/min [N2] 11 0 to 15 30 20 31 30 32 40 33 50 TABLE III DMF 46 HIGH FLOW MASS FLOW CONTROLLERS* CODE standard liters/min [N2] 40 60 41 80 42 100 * Flow rates are stated for Nitrog
TABLE IV PRESSURE DROPS MODEL FLOW RATE [std liters/min] MAXIMUM PRESSURE DROP [mm H2O] [psid] [mbar] up to 10 720 1.06 75 15 2630 3.87 266 30 2380 3.50 241 DMF 41433 50 5440 8.00 551 DMF 41842 100 12850 18.89 1302 DMF 41411 DMF 41431 TABLE V APPROXIMATE WEIGHTS MODEL WEIGHT SHIPPING WEIGHT DMF 41401-41411 controller 2.20 lbs (1.00 kg) 3.70 lbs (1.68 kg) DMF 41431-41842 controller 2.84 lbs (1.29 kg) 4.34 lbs (1.
5. OPERATING INSTRUCTIONS 5.1 Preparation and Warm Up It is assumed that the Mass Flow Controller or Controller has been correctly installed and thoroughly leak tested as described in section (2). Make sure the flow source is OFF. Power up the transducer using your own power supply (or switch the POWER switch to the ON position at the front panel of your SDPROC Command Module). Allow the Mass Flow Meter or Controller to warm-up for a minimum of 15 minutes.
5.4 Set Point Reference Signal DMF flow controllers have a built-in solenoid valve and allow the user to set the flow to any desired flow rate within the range of the particular model installed. This valve is normally closed when no power is applied. The set point input in analog mode responds to an analog 0 to 5 VDC reference voltage or 4-20mA reference current. This voltage is a linear representation of 0 to 100% of the full scale mass flow rate.
5.7 Analog Interface Configuration The DMF can be configured for the desired range and scaling by selection of analog board (see APPENDIX 1 on page 21) jumpers as follows: 0 to 5 V output: Jumper Jumper Jumper Jumper pins pins pins pins 0 to 5 V input: Jumper pins 2 and 3 of JP2. Jumper pins 2 and 3 of JP4. Jumper pins 1 and 2 of JP11. 0 to 10 V output: As for 0 to 5V, but jumper pins 2 and 3 of JP12. 4 to 20 mA output: Jumper Jumper Jumper Jumper 4 to 20 mA input: Jumper pins 1 and 2 of JP2.
6.2 Flow Path Cleaning Before attempting any disassembly of the unit for cleaning, try inspecting the flow paths by looking into the inlet and outlet ends of the meter for any debris that may be clogging the flow through the meter. Remove debris as necessary. If the flow path is not unclogged, then proceed with steps below. Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids, please return meter to Dwyer for servicing. 6.2.
Inspect the flow path inside the transducer for any visible signs of contaminants. If necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths by flowing clean dry gas through. Re-install the inlet parts and filter screen. Be sure that no dust has collected on the O-ring seal. It is advisable that at least one calibration point be checked after re installing the inlet fitting - see section (7). 6.2.
priate relative correction factor should be recalculated see section (9). It is standard practice to calibrate Mass Flow Meters/Controllers with dry nitrogen gas at 70FF (21.1EC), 20 psig (1.4 bars) [25 psig (1.7 bars) for DMF 41842] inlet pressure and 0 psig (0 bar) outlet pressure. It is best to calibrate the DMF transducers to actual operating conditions. Specific gas calibrations of non-toxic and non-corrosive gases are available at specific conditions.
8. TROUBLESHOOTING 8.1 Common Conditions Your Mass Flow Controller was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations. It was calibrated in accordance to your desired flow and pressure conditions for a given gas or a mixture of gases. It was carefully packed to prevent damage during shipment.
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Indication Likely Reason Remedy full scale output at "no flow" condition or with valve closed defective sensor return to factory for replacement gas Leak locate and repair calibration off gas metered is not the same as what meter was calibrated for use matched calibration composition of gas changed see K factor tables in APPENDIX 2 gas leak locate and correct pc board defective return to factory for replacement RFE dirty flush clean or disassemble to remove impediments occluded sensor tub
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES The calibration conversion incorporates the K factor. The K factor is derived from gas density and coefficient of specific heat. For diatomic gases: 1 d X Cp where d = gas density (gram/liter) Cp = coefficient of specific heat (cal/gram) K gas = Note in the above relationship that d and Cp are usually chosen at standard conditions of one atmosphere and 25F C.
APPENDIX 1 COMPONENTS DIAGRAMS DMF Digital PC Board (Primary Side) 21
APPENDIX 1 (CONTINUED) DMF Digital PC Board (Secondary Side) 22
APPENDIX 1 (CONTINUED) DMF Analog PC Board (Primary Side) 23
APPENDIX 1 (CONTINUED) DMF Analog PC Board (Secondary Side) 24
APPENDIX 2 GAS FACTOR TABLES (“K” FACTORS) Actual Gas K Factor Relative to N2 Cp [Cal/g] Density [g/I] AcetyleneC2H2 Air Allene (Propadiene) C3H4 Ammonia NH3 Argon Ar Arsine AsH3 Boron Trichloride BCl3 Boron Trifluoride BF3 Bromine Br2 Boron Tribromide Br3 Bromine Pentafluoride BrF5 Bromine Trifluoride BrF3 Bromotrifluoromethane (Freon-13 B1) CBrF3 1,3-Butadiene C4H6 Butane C4H10 1-Butane C4H8 2-Butane C4H8 CIS 2-Butane C4H8 TRANS Carbon Dioxide CO2 Carbon Disulfide CS2 Carbon Monoxide C0 Carbon Tetrach
Actual Gas K Factor Relative to N2 .1947 .3538 .4252 .2522 .4044 .2235 .4271 .3714 .3896 .2170 .50 .3918 .3225 .3891 .60 .5191 .9784 .4967 .3287 .3538 .3834 .3697 .4210 .4252 .4589 .2031 .2240 .2418 .1760 .5696 .2668 1.454 .2421 .1792 1.0106 1.000 1.000 1.
Actual Gas K Factor Relative to N2 Hydrogen Fluoride HF Hydrogen Iodide HI Hydrogen Selenide H2Se Hydrogen Sulfide H2S Iodine Pentafluoride IF5 Isobutane CH(CH3)3 Isobutylene C4H6 Krypton Kr Methane CH4 Methanol CH3 Methyl Acetylene C3H4 Methyl Bromide CH2Br Methyl Chloride CH3Cl Methyl Fluoride CH3F Methyl Mercaptan CH3SH Methyl Trichlorosilane (CH3)SiCl3 Molybdenum Hexafluoride MoF6 Monoethylamine C2H5NH2 Monomethylamine CH3NH2 Neon NE Nitric Oxide NO Nitrogen N2 Nitrogen Dioxide NO2 Nitrogen Trifluorid
Actual Gas K Factor Relative to N2 Cp [Cal/g] Density [g/I] .30 .35 .40 .5982 .284 .3482 .69 .2635 .3883 .5096 .3237 .3287 .3278 .1250 .399 .366 .3189 .1270 .1691 .1488 .1592 .1543 .127 .182 .1357 .1380 6.127 1.967 1.877 1.433 7.580 4.643 2.858 6.516 4.562 4.224 4.64 6.129 6.043 .2031 .161 8.36 .0608 .2691 .32 .2792 .2541 .1961 .4616 .48 1.44 .508 .120 .163 .3710 .0810 .0888 .1241 .12054 .0378 8.848 8.465 5.95 2.639 13.28 15.70 4.772 2.788 5.
APPENDIX 3 DIMENSIONAL DRAWINGS DMF 41401-41411 Mass Flow Controller NOTES: Dwyer reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Dwyer.
DMF 41431-41842 Mass Flow Controller NOTES: Dwyer reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Dwyer.
APPENDIX 4 SENDING COMMANDS TO THE DMF RS485 The standard DMF comes with an RS485 interface. The protocol described below allows for the unit using either a custom software program or a “dumb terminal”. All values are sent as printable ASCII characters.
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APPENDIX 5 CALIBRATION TABLE: GAS DEPENDENT VARIABLES DATA TYPE INDEX NAME 0 BlankSDPROC char[10] Do not modify. For internal use only. 1 SerialNumber char[20] 2 ModelNumber char[20] 3 SoftwareVer char[10] 4 TimeSinceCalHr float Time since last calibration in hours. 5 Options uint Misc. Options.
INDEX NAME DATA TYPE 29 Kgain[2] float 30 Kgain[3] float 31 Kgain[4] float 32 Kgain[5] float 33 Reserved float 34 Reserved float 35 Reserved float 36 Reserved float 37 Reserved float 38 Reserved float 39 ValveTbl[0][open] float Index 0: Valve actuation. Must be 0.0.- Do Not Alter 40 ValveTbl[0][valve value] uint Index 0: Valve: D/A value - Do Not Alter 41 ValveTbl[1][flow] float Index 1: Actual valve opening in % FS.
CALIBRATION TABLE: GAS INDEPENDENT VARIABLES INDEX NAME DATA TYPE 100 GasIdentifer char[27] 101 FullScaleRange float 102 StdTemp float 103 StdPressure float 104 StdDensity float 105 CalibrationGas char[27] 106 CalibratedBy char[20] 107 CalibratedAt char[20] 108 DateCalibrated char[10] 109 DateCalibrationDue char[10] 110 PID_Kp float 111 PID_Ki float 112 PID_Kd float 113 SensorTbl[0][Sensor Value] uint Index 0: Must be 120 (zero value) 114 SensorTbl[0][Flow] fl
INDEX NAME DATA TYPE 129 SensorTbl[8][Sensor Value] uint 130 SensorTbl[8][Flow] float 131 SensorTbl[9][Sensor Value] uint 132 SensorTbl[9][Flow] float 133 SensorTbl[10][Sensor Value] uint 134 SensorTbl[10][Flow] float NOTES Flow in PFS. Should be 1.0 135 136 137 Note: Values will be available for selected gas only.
APPENDIX 6 WARRANTY Dwyer Mass Flow Systems are warranted against parts and workmanship for a period of one year from the date of purchase. Calibrations are warranted for up to six months after date of purchase, provided calibration seals have not been tampered with. It is assumed that equipment selected by the customer is constructed of materials compatible with gases used. Proper selection is the responsibility of the customer.
