Instruction manual

2 - 39

2.3.6.8 TILT COMPENSATION block

Specimen tilting causes defocusing and magnification change to the tilt direction.

Tilt compensation is the tool to correct the two phenomena.

(1) Dynamic focus

Dynamic Focus scans the focal length linked with the scanning positions. When a specimen

is tilted, the field of view that can be focused is small (particularly at low magnifications and at

a short WD). Dynamic Focus function allows you to focus the beam for the entire field of

view.

Refer to <3.9.9 Raster Rotation, Dynamic focus and Tilt Compensation>

(2) Tilt compensation

When a specimen is tilted, magnification along the tilting direction is [cos (tilting angle)] lower

than that of a non-tilting direction. As a result, the image appears to be contracted in the

tilting direction. The image can be corrected at the magnification in all directions by using Tilt

Compensation function.

Refer to <3.9.9 Raster Rotation, Dynamic focus and Tilt Compensation>

2.3.6.9 COLOR MIXING block

The Color Mixing mode displays a color composite image. Each of three colors (Red, Green or

Blue) is assigned for two images signals for A (Left) and B (Right) screens, and displayed as a

color composite image.

This function is available only in Dual Screen mode. The color composite image is displayed on

the right (B) screen.

To display a color composite image, check the COLOR MIXING box and assign A or B signal (or

OFF) for the three colors by selecting the appropriate colors and. For example if the A signal is

SE and the B signal is BSE, and A is assigned to Blue and B is assigned to both Red and Green,

Dynamic focus check box

Dynamic focus set / indication box

Dynamic focus adjust slider

Dynamic focus adjust button

Tilt-magnification compensation check box

Tilt-magnification compensation set / indication box

Tilt-magnification compensation adjust slider

Tilt-ma

nification com

ensation ad

ust button