Instruction manual

SAFETY - 3
Electrical Hazard
Electrical hazards exist due to the following:
Electron Gun : 0.5 to 30 kV DC
Ion Pump : 5 kV DC
Photomultiplier : 1 kV DC
Scintillator of secondary electron detector : 10 kV DC
Electrode 1 : 50 V DC
Electrode 2 : 200 V (Max) DC
Electrode 3 : 100 V (Max) DC
ExB : 30 V (Max)DC
Penning gauge : 3 kV
Photo CRT : 10 kV DC
An enclosure is provided for each high voltage power supply sub-unit. These enclosures are
fixed by screws and electrically connected to the protective grounding, so electrical hazards by
direct contact are prevented.
At the high voltage power supply sub-units, warning labels are attached to prevent hazards
during maintenance. The maintenance should be carried out only by the service personnel
specified and trained by the manufacturer.
The operator should not open the enclosure of the high voltage power supply sub-units in the
main unit, display unit or ion pump power supply unit.
• If you touch a terminal board, you may receive an electric shock.
• If you touch a high-voltage section also, you may receive an electric shock.