Instruction manual

3 - 39
Important
In case of φ15mm and φ25mm specimens, by applying limitation in X and Y directions written in
page 3-40, the figure for 3 axes motorized stage (shown below) can be used. For avoiding
damage of specimen and objective lens, be careful not to exceed limits of each axis.
3.5.6.4 3 axes motorized stage (Type1 stage option)
This is motorized control of type 1 stage in X, Y, R directions. Figure of relationship between
allowable tilting angle for various Z position is shown below. For details of this option, refer to the
manual of 3 axes motorized stage.
0
10
20
30
40
50
60
70
0 5 10 15 20 25 30
Z (mm)
T (deg)
φ25mm
φ15mm
φ50mm
φ75mm
φ100mm
φ125mm
φ150mm
CAUTION

Set Z and T within the allowable range; otherwise, the specimen may strike the objective lens
and cause damage to the specimen and objective lens.