Instruction manual

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3.5.7 Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage)
The S-4800 type 2 SEM provides a 5-axis motorized stage
3.5.7.1 Coordinate notation
S-4800 utilizes two coordinate notation system, stage (mechanical) coordinate and sample
coordinate. The sample coordinate system will be better for using the Rotation Assist function.
The stage coordinate system is also available for users familiar with previous Hitachi SEMs using
the stage coordinate system.
(1) Relationship of stage and sample coordinates
Following is an example of 5 inches diameter sample.
On the stage coordinate system, the center of the sample is (X=35,Y=55mm) and the origin
is at the upper-left corner of XY movable area.
On the sample coordinate system, the center of the sample is (X=0,Y=0mm) and the origin
fits to it.
Stage movable area5 inches sample
(0,0) (110,0)
(0,110)
(110,110)
(35,55)(0,55)
(-27.5,55)
(137.5,55)
Stage movable area5 inches sample
(-35､-55) (75,-55)
(-35,55) (75,55)
(0,0)(-35,0)
(-62.5,0)
(62.5,0)
(0,62.5)
(0,-62.5)
(35,-12.5)
(35,117.5)
X
Y
X
Y
Stage (mechanical) coordinate Sample coordinate system
(2) Selecting a coordinate system
Open the Optional Setup dialog window by selecting Stage command in Optional Setup
menu.
On the COORDINATE area, select Sample or Stage. OK button will update the coordinate
system.
NOTICE
The sample coordinate is not exactly the coordinate of the sample. It is not rotated with the
sample when it is rotated.