Instruction manual

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3.5.7.2 Movable range and specimen exchange position
The following table shows movable range and specimen exchange position.
Mechanical coordinate and specimen coordinate expression are selectable for X and Y axes.
The specimen coordinate is (0,0) at the center of the specimen holder.
Movable Range
of mechanical coordinate
Movable Range
of specimen coordinate
Exchange position of
mechanical (specimen)
coordinate
X 0 to 110 mm -35 to +75 mm 35.0 mm (0 mm)
Y 0 to 110 mm -55 to +55 mm 0 mm (55mm)
R 0 to 360° 0 to 360° 0°
T -5 to 70° -5 to 70° 0°
Z 1.5 to 40 mm 1.5 to 40 mm 8 mm
The allowable range of X, Y, Z and T axes are limited for large specimen, and when optional
detectors are under operation position.
Motion of each axis is limited within the allowable ranges by computer control. There is no risk of
striking the objective lens if the correct specimen size and height, and detectors being used are
set correctly.
Te following table shows limitation of X and Y allowable range for various specimen size. Further
limitation is set when the YAG type BSE detector is in use.
No optional detectors Using YAG BSE detector
Specimen size
X Y X Y
Φ 15mm 27.5 to 42.5 47.5 to 62.5 27.5 to 42.5 47.5 to 62.5
Φ 25mm 22.5 to 47.5 42.5 to 67.5 22.5 to 47.5 42.5 to 67.5
Φ 50mm 10 to 60 30 to 80 10 to 60 30 to 80
Φ 75mm 0 to 72.5 17.5 to 92.5 0 to 72.5 17.5 to 92.5
Φ 100mm 0 to 85 5 to 105 0 to 85 5 to 105
Φ 125mm 0 to 97.5 0 to 110 0 to 97.5 0 to 110
Φ 150mm 0 to 110 0 to 110 6 to 110 0 to 110
Φ 200mm 6 to 84.5 24v86 28 to 84.5 24 to 86
□ 100mm 0 to 107 0 to 110 2 to 107 0 to 110
□ 125mm 0 to 97 12 to 98 20 to 97 12 to 98