Instruction manual

3 - 48
NOTICE
When the specimen height is set higher than the standard position, actual specimen surface
position will be changed by tilting. The allowable range of Z and Tilt are therefore recalculated
after the tilting angle is specified for movement. It may cause somewhat different allowable
range value than that has been indicated before specifying tilting angle.
(2) Modes of operation
Two modes of operation, "Set values and Go" and "Continuous driving" are possible.
When the Continuous mode is selected, the stage moves following the scrollbar operation for
each axis. It is recommended to press or click the arrow buttons of the scrollbars, as the
mechanical motion of the stage is relatively slow compared to the scrollbar operation.
The step of motion is 0.1mm (Z), 0.5° (Tilt) by arrow buttons and 1mm (Z), 1° (Tilt) by clicking
on scrollbar (side of slider).
It is advisable to use mouse operation on the scanning image for continuous operation of Z or
Tilt axes.
When the Continuous mode is off (unchecked), the stage begins its motion after clicking the
Go button. In this mode of operation, select Z and Tilt movement with scrollbar s and then
click the Go button.
Blue numerals on scrollbars indicate the movable range of each axis. These values are
adjusted according to the specimen size and present position of other axes.
NOTICE: Release stage lock to enable Z and Tilt operation.
CAUTION

The specimen size and height, and detectors being used must be set correctly to
allow motion of each axis in the proper ranges. If this is not done, the specimen may
strike the objective lens and cause damage to the specimen and objective lens