Instruction manual

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(9) Tilt axis operation to a specified coordinate
On the circle of the Tilt axis tool, mouse pointer will be changed as shown below.
Press down the left button and move the mouse up or downward holding down the button. The
circle moves following mouse and the Tilt axis value is shown in the indicator box. Then
release the button. Stage will go to the Tilt angle specified in the indicator box.
The change of Tilt is limited to a range allowable for the present Z value.
(10) Tilt axis continuous driving
On the rectangles at the top and bottom of Tilt axis tool, mouse pointer will be changed as
shown below.
Press down the left button on one of the rectangles. Tilt axis will move continuously while
holding the button down. On the top rectangle, tilt angle is increased and on the bottom,
decreased.
Tilting will stop when it reached to the end of allowable range calculated using the present Z
angle.