Instruction manual

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1. [Rotation Center]:

A mask holder specimen cannot be used.

2. [Tilt Center]:

A BSE detector must be pulled out.

3. [Z Axis Comp.]:

Both EDX and BSE detectors must be pulled out. And mask holder specimen

cannot be used.

4. [Tilt Center] started by Calibration button:

GW and ETP type BSE detectors must be pulled out.

When the presence/absence of these detectors is set correctly at SPECIMEN

block, a warning message [For this operation (1) Extract optional detector(s). (2)

Use 5inches or smaller sample.] will appear if an optional detector is still

inserted, and the operation will be disabled.

Note that if these settings are not made, protection will not be provided and the

specimen and/or detectors may be damaged.

(3)

Stage tilt calibration - Calibration necessary for each specimen exchange

When specimen height differs from the standard value and the specimen is tilted, the rotation

and tilt center axes will shift. For accurate operation of the eucentric function, the specimen

height must be measured and corrected at each specimen exchange.

Since the previous correction factor is retained, calibration is not necessary if the specimen

height does not vary at each specimen exchange.

Carry out the calibration as follows.

(a) Insert a specimen, set WD at 12 mm or more, tilt at 0° and R at 0°, then search for a

structure of interest near the specimen center.

(b) Click the Calibration button at the Z/Tilt area on Z/Tilt block, then the Stage Tilt

Calibration dialog window will appear.

[Move a remarkable object to the center of image and click Enter button for Tilt 0deg..

Stage will move to 30deg. Move the object to the center of image and click Enter button

for Tilt 30deg. Click Apply button and close the dialog.]