Instruction manual

3-111
3.11.4 Alignment of the Objective Lens Aperture
(1) In the Beam Align mode, set the objective lens aperture at 2 or 3.
Aperture diameter is
opening 1：100 µm
opening 2 and 3：50 µm
opening 4：30 µm
(2) Adjust the brightness and contrast if the circular image becomes dark.
(3) Adjust the X and Y knobs of the objective lens aperture so that the circular image is aligned to
the center of the screen.
3.11.5 Mechanical Alignment of the First Condenser Lens
(1) In the Beam Alignment mode, set the Cond Lens 1 to 5 in the
Column tab.
(2) The circular image may become smaller and brighter. Adjust the
brightness and contrast if necessary.
(3) Adjust the alignment knobs of the first condenser lens so that
the circular image is aligned to the center of the screen.
3.11.6 Mechanical Alignment of the Second Condenser Lens
(1) Click the Off button in the Alignment dialog window to terminate Beam Align mode.
(2) Check the Cond Lens 2 box (ON) in the Column tab.
(3) Observe an image at a magnification of about 2000×, and
adjust the brightness, contrast and focus.
(4) Place a point of interest in the center of the image display
using the specimen stage.