Instruction manual

SAFETY - 17
INTERLOCK
Electron Gun The Gun cable is now interlocked with a momentary switch.
If the cover at the top of the electron gun is removed to
disconnect gun cable, the High Voltage applied to the electron
gun is shut off. This switch can be overridden for service.
However, if the cable is replaced the service override is removed.
Ion Pump The ion pump cover at the back of the electron optical column
has a safety interlock switch. If the cover is removed, the High
Voltage supplied to the ion pumps is shut off and lamps in the
RESET switches for ion pumps located on the evacuation control
panel will go off. For service the switches can be overridden,
but as soon as the ion pump cover is put again, the service
override is removed.
Other High Voltages High voltage power supply for photo multipliers and electrodes
are placed inside of a box located at the behind of the specimen
chamber. The cover of the box has a safety interlock switch. If
the cover is removed, the High Voltage supplied to the photo
multipliers and electrodes is shut off. For service the switches
can be overridden, but as soon as the cover is put again, the
interlock is functional.
Baking power supply Baking heater power supply connectors are placed at the right
side of the ion pumps cover. To connect heater connectors, the
box cover of the connector must be removed. The box cover of
the connector has a safety interlock switch. The baking power is
shut off when the cover is removed. After connecting connectors,
put the cover again. The baking power then becomes applicable.
Unit power supply Four side covers of the Main unit have safety interlock switches
one for each. If one of the side covers is removed, AC power
supply for the Main unit (for evacuation system, ion pump power
supply and stage controller) will be shut off. The switches can be
overridden for service. However, if the covers are put again, the
service override is removed.
The interlock location is shown in fig S-6
Protection for Earthquakes It is recommended that the protection for movement of Main unit
and Display unit during earthquakes is to be provided by user as
shown in figures S-7 and S-8.
Gravity location of units The gravity location of Main and Display unit are shown in fig S-
9 through S-11.
Water-leakage detection It is recommended that the water–leakage detector is to be
provided by user. Figure S-12 shows an example of the water–
leakage detector.